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These shares were sold in multiple transactions at prices ranging from $130.41 to $130.48, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 10, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":4157,"source":{"system":"sec-edgar","filing":"0001209191-23-054922","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123054922/doc4.xml","form_type":"4"}},{"id":1856377,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-06-14T16:39:49.000Z","date":"2023-06-12","kind":"sale","planned":false,"acquired":false,"shares":500,"price":181.75,"value":90875.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 12, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":4157,"source":{"system":"sec-edgar","filing":"0001209191-23-037053","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123037053/doc4.xml","form_type":"4"}},{"id":1864280,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-06-07T16:14:59.000Z","date":"2023-06-07","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":173,"value":173000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 7, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":4657,"source":{"system":"sec-edgar","filing":"0001209191-23-035065","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123035065/doc4.xml","form_type":"4"}},{"id":1865546,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-06-06T16:30:34.000Z","date":"2023-06-06","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":163.5,"value":163500.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 6, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":5657,"source":{"system":"sec-edgar","filing":"0001209191-23-034768","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123034768/doc4.xml","form_type":"4"}},{"id":1865545,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-06-06T16:27:53.000Z","date":"2023-05-25","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":152.21,"value":152210.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $152.17 to $152.25, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 25, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":6657,"source":{"system":"sec-edgar","filing":"0001209191-23-034761","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123034761/doc4a.xml","form_type":"4/A","original_submission_date":"2023-05-25"}},{"id":1878633,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-25T18:22:40.000Z","date":"2023-05-25","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":152.21,"value":152210.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $152.17 to $152.25, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 25, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":9657,"source":{"system":"sec-edgar","filing":"0001209191-23-032268","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123032268/doc4.xml","form_type":"4"}},{"id":1885494,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-19T16:15:51.000Z","date":"2023-05-18","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":143.09,"value":143090.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":7657,"source":{"system":"sec-edgar","filing":"0001209191-23-030995","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123030995/doc4.xml","form_type":"4"}},{"id":1885493,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-19T16:15:51.000Z","date":"2023-05-18","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":141.77,"value":141770.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.60 to $141.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":8657,"source":{"system":"sec-edgar","filing":"0001209191-23-030995","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123030995/doc4.xml","form_type":"4"}},{"id":1885492,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-19T16:15:51.000Z","date":"2023-05-17","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":134.5,"value":134500.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 17, 2023 and May 18, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":9657,"source":{"system":"sec-edgar","filing":"0001209191-23-030995","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123030995/doc4.xml","form_type":"4"}},{"id":1892129,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-16T17:23:27.000Z","date":"2023-05-16","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":131,"value":131000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 16, 2023, 1,282 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":10657,"source":{"system":"sec-edgar","filing":"0001209191-23-029871","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123029871/doc4.xml","form_type":"4"}},{"id":1893960,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-15T16:21:00.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":1282,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this grant on of May 15, 2023, 3,971 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":11657,"source":{"system":"sec-edgar","filing":"0001209191-23-029450","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123029450/doc4.xml","form_type":"4"}},{"id":1893959,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-15T16:21:00.000Z","date":"2023-05-15","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":127.84,"value":127840.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.71 to $127.91, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this sale on May 15, 2023, 2,689 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":10375,"source":{"system":"sec-edgar","filing":"0001209191-23-029450","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123029450/doc4.xml","form_type":"4"}},{"id":1893958,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-15T16:21:00.000Z","date":"2023-05-15","kind":"sale","planned":false,"acquired":false,"shares":2000,"price":125.19,"value":250380.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $125.01 to $125.23, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this sale on May 15, 2023, 2,689 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":11375,"source":{"system":"sec-edgar","filing":"0001209191-23-029450","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1073329/000120919123029450/doc4.xml","form_type":"4"}},{"id":2020626,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":96163,"kind":"person","name":"KEITHLEY JOSEPH P","position":1,"cik":"0001073329","reported_name":"KEITHLEY JOSEPH P","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-02-13T16:24:59.000Z","date":"2023-02-13","kind":"sale","acquired":false,"shares":3000,"price":123.36,"value":370080.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $123.25 to $123.59, inclusive. 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