{"transactions":[{"id":1471034,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-06-24T21:15:04.000Z","date":"2024-06-20","kind":"tax_withholding","planned":false,"acquired":false,"shares":1396,"price":136.02,"value":189883.92,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on June 20, 2024 of certain restricted stock units granted to the executive in accordance with the Company's Executive Equity Retirement Program. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of June 20, 2024, after the acceleration of vesting, 4,128 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":15808,"source":{"system":"sec-edgar","filing":"0001415889-24-018031","document":"form4-06242024_050601.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924018031/form4-06242024_050601.xml","form_type":"4"}},{"id":1509367,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-05-20T20:15:20.000Z","date":"2024-05-17","kind":"tax_withholding","planned":false,"acquired":false,"shares":743,"price":113.23,"value":84129.89,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 17, 2024 of service vesting restricted stock units granted to the executive in May 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on May 17, 2024, 7,010 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":17202,"source":{"system":"sec-edgar","filing":"0001415889-24-013741","document":"form4-05202024_040509.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013741/form4-05202024_040509.xml","form_type":"4"}},{"id":1512117,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:47.000Z","date":"2024-05-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":536,"price":113.57,"value":60873.52,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2024 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this vesting event on May 16, 2024, 8,685 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":17945,"source":{"system":"sec-edgar","filing":"0001415889-24-013488","document":"form4-05172024_040531.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013488/form4-05172024_040531.xml","form_type":"4"}},{"id":1512116,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:47.000Z","date":"2024-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":256,"price":112.94,"value":28912.64,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F6","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2024 of service vesting restricted stock units granted to the executive in May 2020. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2024, 9,893 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":18481,"source":{"system":"sec-edgar","filing":"0001415889-24-013488","document":"form4-05172024_040531.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013488/form4-05172024_040531.xml","form_type":"4"}},{"id":1512115,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:47.000Z","date":"2024-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":861,"price":112.94,"value":97241.34,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F3","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2024 of service vesting restricted stock units granted to the executive in May 2023.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this vesting event on May 15, 2024, 10,469 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":18737,"source":{"system":"sec-edgar","filing":"0001415889-24-013488","document":"form4-05172024_040531.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013488/form4-05172024_040531.xml","form_type":"4"}},{"id":1512114,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:47.000Z","date":"2024-05-15","kind":"grant","planned":false,"acquired":true,"shares":1365,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024.  In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2024 performance goals. 100% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on May 15, 2024, 13,192 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":19598,"source":{"system":"sec-edgar","filing":"0001415889-24-013488","document":"form4-05172024_040531.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013488/form4-05172024_040531.xml","form_type":"4"}},{"id":1607798,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-03-01T21:30:35.000Z","date":"2024-02-28","kind":"tax_withholding","planned":false,"acquired":false,"shares":457,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of performance based restricted stock units granted to the executive in May 2023.  Of the units granted, 135% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2024, and half of the earned shares vested on February 28, 2024. As agreed with the executive, the shares issued to the executive on the vested PRSUs were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held as of February 28, 2024 after the vesting of both the 2022 PRSUs and 2023 PRSUs, 11,827 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":18233,"source":{"system":"sec-edgar","filing":"0001415889-24-006105","document":"form4-03012024_040319.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924006105/form4-03012024_040319.xml","form_type":"4"}},{"id":1607797,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-03-01T21:30:35.000Z","date":"2024-02-28","kind":"tax_withholding","planned":false,"acquired":false,"shares":958,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of the remainder of performance based restricted stock units (\"PRSUs\") granted to the executive in May 2022.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023, and half of the earned shares vested on February 28, 2023. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of February 28, 2024 after the vesting of the 2022 PRSUs and before the vesting of the 2023 PRSUs, 13,382 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":18690,"source":{"system":"sec-edgar","filing":"0001415889-24-006105","document":"form4-03012024_040319.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924006105/form4-03012024_040319.xml","form_type":"4"}},{"id":1620125,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, CORPORATE MKTG & STRATEGY"}}],"security":"Common Stock","published_at":"2024-02-26T13:15:07.000Z","date":"2024-02-23","kind":"purchase","planned":false,"acquired":true,"shares":500,"price":111.04,"value":55520.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 23, 2024, 16,644 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":19648,"source":{"system":"sec-edgar","filing":"0001415889-24-005162","document":"form4-02262024_080202.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924005162/form4-02262024_080202.xml","form_type":"4"}},{"id":1814047,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-08-07T22:01:56.000Z","date":"2023-08-07","kind":"sale","planned":false,"acquired":false,"shares":375,"price":177.45,"value":66543.75,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of August 7, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":18342,"source":{"system":"sec-edgar","filing":"0001209191-23-044869","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123044869/doc4.xml","form_type":"4"}},{"id":1859304,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-06-12T12:03:02.000Z","date":"2023-06-09","kind":"sale","planned":false,"acquired":false,"shares":400,"price":175,"value":70000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 9, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":18717,"source":{"system":"sec-edgar","filing":"0001209191-23-036134","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123036134/doc4.xml","form_type":"4"}},{"id":1875234,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-30T20:10:34.000Z","date":"2023-05-26","kind":"sale","planned":false,"acquired":false,"shares":200,"price":153,"value":30600.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 26, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":19117,"source":{"system":"sec-edgar","filing":"0001209191-23-032863","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123032863/doc4.xml","form_type":"4"}},{"id":1885345,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-19T20:16:50.000Z","date":"2023-05-19","kind":"sale","planned":false,"acquired":false,"shares":550,"price":144.82,"value":79651.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 19, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":19317,"source":{"system":"sec-edgar","filing":"0001209191-23-030996","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030996/doc4.xml","form_type":"4"}},{"id":1887220,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-18T20:04:59.000Z","date":"2023-05-18","kind":"sale","planned":false,"acquired":false,"shares":4703,"price":141.05,"value":663358.15,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.00 to $141.36, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F6","text":"Of the shares held after this sale on May 18, 2023, 15,838 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":19867,"source":{"system":"sec-edgar","filing":"0001209191-23-030588","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030588/doc4.xml","form_type":"4"}},{"id":1887219,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-18T20:04:59.000Z","date":"2023-05-17","kind":"tax_withholding","planned":false,"acquired":false,"shares":744,"price":137.69,"value":102441.36,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2023, 15,838 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":24570,"source":{"system":"sec-edgar","filing":"0001209191-23-030588","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030588/doc4.xml","form_type":"4"}},{"id":1887218,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-18T20:04:59.000Z","date":"2023-05-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":536,"price":129.92,"value":69637.12,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 17,514 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":25314,"source":{"system":"sec-edgar","filing":"0001209191-23-030588","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030588/doc4.xml","form_type":"4"}},{"id":1891940,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-16T22:36:22.000Z","date":"2023-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":1209,"price":127.99,"value":154739.91,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 18,722 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":25850,"source":{"system":"sec-edgar","filing":"0001209191-23-029945","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029945/doc4.xml","form_type":"4"}},{"id":1891939,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-16T22:36:22.000Z","date":"2023-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":1263,"price":127.99,"value":161651.37,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 21,446 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":27059,"source":{"system":"sec-edgar","filing":"0001209191-23-029945","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029945/doc4.xml","form_type":"4"}},{"id":1891938,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-16T22:36:22.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":2304,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment,50% of the earned shares will vest on  February 28, 2024 and 50% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2023, 24,293 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":28322,"source":{"system":"sec-edgar","filing":"0001209191-23-029945","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029945/doc4.xml","form_type":"4"}},{"id":1891937,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-16T22:36:22.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":576,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 100% of these restricted stock units will vest on May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2023, 21,989 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":26018,"source":{"system":"sec-edgar","filing":"0001209191-23-029945","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029945/doc4.xml","form_type":"4"}},{"id":1898404,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-05-10T22:08:16.000Z","date":"2023-05-10","kind":"sale","planned":false,"acquired":false,"shares":5734,"price":122,"value":699548.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 10, 2023, 31,176 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":35205,"source":{"system":"sec-edgar","filing":"0001209191-23-028544","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123028544/doc4.xml","form_type":"4"}},{"id":1984301,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-03-01T21:13:44.000Z","date":"2023-02-28","kind":"tax_withholding","acquired":false,"shares":1034,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 21,413 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":31176,"source":{"system":"sec-edgar","filing":"0001209191-23-014085","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123014085/doc4.xml","form_type":"4"}},{"id":1984300,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-03-01T21:13:44.000Z","date":"2023-02-28","kind":"tax_withholding","acquired":false,"shares":1521,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 24,675 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 3,262 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023."}],"balance_after":32210,"source":{"system":"sec-edgar","filing":"0001209191-23-014085","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123014085/doc4.xml","form_type":"4"}},{"id":2020350,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2023-02-13T21:17:59.000Z","date":"2023-02-13","kind":"sale","acquired":false,"shares":1998,"price":122.47,"value":244695.06,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 13, 2023, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32040,"source":{"system":"sec-edgar","filing":"0001209191-23-008704","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123008704/doc4.xml","form_type":"4"}},{"id":2103564,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-11-28T21:15:57.000Z","date":"2022-11-28","kind":"sale","acquired":false,"shares":350,"price":76.52,"value":26782.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $76.52 to $76.54, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 28, 2022, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":34038,"source":{"system":"sec-edgar","filing":"0001209191-22-058856","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122058856/doc4.xml","form_type":"4"}},{"id":2192140,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-08-08T20:12:06.000Z","date":"2022-08-09","kind":"sale","acquired":false,"shares":4554,"price":74.69,"value":340138.26,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $74.30 to $74,96, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 8, 2022, 28,011 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":34388,"source":{"system":"sec-edgar","filing":"0001209191-22-044789","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122044789/doc4.xml","form_type":"4"}},{"id":2266181,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-05-18T21:07:31.000Z","date":"2022-05-17","kind":"tax_withholding","acquired":false,"shares":744,"price":60.56,"value":45056.64,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2022, 28,011 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":38942,"source":{"system":"sec-edgar","filing":"0001209191-22-030113","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030113/doc4.xml","form_type":"4"}},{"id":2266180,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-05-18T21:07:31.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":4832,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F8","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024.  Unearned restricted stock units will forfeit on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this second grant on May 16, 2022, 29,687 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":39686,"source":{"system":"sec-edgar","filing":"0001209191-22-030113","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030113/doc4.xml","form_type":"4"}},{"id":2266179,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-05-18T21:07:31.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":4832,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this first grant on May 16, 2022, 24,855 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":34854,"source":{"system":"sec-edgar","filing":"0001209191-22-030113","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030113/doc4.xml","form_type":"4"}},{"id":2266178,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-05-18T21:07:31.000Z","date":"2022-05-16","kind":"tax_withholding","acquired":false,"shares":842,"price":56.38,"value":47471.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 20,023 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":30022,"source":{"system":"sec-edgar","filing":"0001209191-22-030113","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030113/doc4.xml","form_type":"4"}},{"id":2266177,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-05-18T21:07:31.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":1208,"price":56.38,"value":68107.04,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 21,921 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":30864,"source":{"system":"sec-edgar","filing":"0001209191-22-030113","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030113/doc4.xml","form_type":"4"}},{"id":2266176,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-05-18T21:07:31.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":1263,"price":56.38,"value":71207.94,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 24,644 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32072,"source":{"system":"sec-edgar","filing":"0001209191-22-030113","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030113/doc4.xml","form_type":"4"}},{"id":2355849,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-03-03T21:26:34.000Z","date":"2022-03-03","kind":"sale","acquired":false,"shares":2798,"price":71.65,"value":200476.7,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of March 2, 2022 and March 3, 2022, 27,490 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":33335,"source":{"system":"sec-edgar","filing":"0001209191-22-015430","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122015430/doc4.xml","form_type":"4"}},{"id":2355848,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-03-03T21:26:34.000Z","date":"2022-03-02","kind":"sale","acquired":false,"shares":4531,"price":69.3,"value":313998.3,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of March 2, 2022 and March 3, 2022, 27,490 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":36133,"source":{"system":"sec-edgar","filing":"0001209191-22-015430","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122015430/doc4.xml","form_type":"4"}},{"id":2361758,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-03-02T22:04:08.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":2230,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 27,490 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":40664,"source":{"system":"sec-edgar","filing":"0001209191-22-014863","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014863/doc4.xml","form_type":"4"}},{"id":2361757,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2022-03-02T22:04:08.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":2416,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 32,518 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,028 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022."}],"balance_after":42894,"source":{"system":"sec-edgar","filing":"0001209191-22-014863","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014863/doc4.xml","form_type":"4"}},{"id":2521702,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-11-08T22:28:09.000Z","date":"2021-11-08","kind":"sale","acquired":false,"shares":1217,"price":62.41,"value":75952.97,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 8, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":41958,"source":{"system":"sec-edgar","filing":"0001209191-21-063420","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121063420/doc4.xml","form_type":"4"}},{"id":2585442,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-08-31T20:07:30.000Z","date":"2021-08-31","kind":"sale","acquired":false,"shares":655,"price":49.63,"value":32507.65,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $49.62 to $49.67, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 31, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":43175,"source":{"system":"sec-edgar","filing":"0001209191-21-054061","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121054061/doc4.xml","form_type":"4"}},{"id":2699392,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-05-24T20:38:53.000Z","date":"2021-05-24","kind":"sale","acquired":false,"shares":4022,"price":40.5,"value":162891.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 24, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":43830,"source":{"system":"sec-edgar","filing":"0001209191-21-035337","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121035337/doc4.xml","form_type":"4"}},{"id":2701308,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-05-21T20:40:44.000Z","date":"2021-05-21","kind":"sale","acquired":false,"shares":5829,"price":40.28,"value":234792.12,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $40.20 to $40.78, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 21, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":47852,"source":{"system":"sec-edgar","filing":"0001209191-21-034945","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121034945/doc4.xml","form_type":"4"}},{"id":2708623,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-05-18T21:33:57.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":6703,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023.  Unearned restricted stock units will forfeit on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this second grant on May 17, 2021, 34,613 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":53681,"source":{"system":"sec-edgar","filing":"0001209191-21-033623","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033623/doc4.xml","form_type":"4"}},{"id":2708622,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-05-18T21:33:57.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":6703,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F7","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first grant on May 17, 2021, 27,910 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":46978,"source":{"system":"sec-edgar","filing":"0001209191-21-033623","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033623/doc4.xml","form_type":"4"}},{"id":2708621,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-05-18T21:33:57.000Z","date":"2021-05-17","kind":"tax_withholding","acquired":false,"shares":971,"price":38.16,"value":37053.36,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F6","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2021, 21,207 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":40275,"source":{"system":"sec-edgar","filing":"0001209191-21-033623","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033623/doc4.xml","form_type":"4"}},{"id":2708620,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-05-18T21:33:57.000Z","date":"2021-05-16","kind":"tax_withholding","acquired":false,"shares":842,"price":38.16,"value":32130.72,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 23,395 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":41246,"source":{"system":"sec-edgar","filing":"0001209191-21-033623","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033623/doc4.xml","form_type":"4"}},{"id":2708619,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-05-18T21:33:57.000Z","date":"2021-05-15","kind":"tax_withholding","acquired":false,"shares":1209,"price":38.16,"value":46135.44,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 25,292 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":42088,"source":{"system":"sec-edgar","filing":"0001209191-21-033623","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033623/doc4.xml","form_type":"4"}},{"id":2708618,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-05-18T21:33:57.000Z","date":"2021-05-15","kind":"tax_withholding","acquired":false,"shares":1263,"price":38.16,"value":48196.08,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 28,016 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":43297,"source":{"system":"sec-edgar","filing":"0001209191-21-033623","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033623/doc4.xml","form_type":"4"}},{"id":2814988,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-03-03T21:13:45.000Z","date":"2021-03-03","kind":"sale","acquired":false,"shares":3125,"price":38.5,"value":120312.5,"ownership":{"direct":false,"nature":"Held by Spouse"},"balance_after":0,"source":{"system":"sec-edgar","filing":"0001209191-21-016841","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016841/doc4.xml","form_type":"4"}},{"id":2814987,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-03-03T21:13:45.000Z","date":"2021-03-03","kind":"sale","acquired":false,"shares":7375,"price":38.5,"value":283937.5,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F6","text":"Of the shares held as of March 3, 2021, 30,862 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":44560,"source":{"system":"sec-edgar","filing":"0001209191-21-016841","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016841/doc4.xml","form_type":"4"}},{"id":2814986,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-03-03T21:13:45.000Z","date":"2021-02-28","kind":"tax_withholding","acquired":false,"shares":1599,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 30,862 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":51935,"source":{"system":"sec-edgar","filing":"0001209191-21-016841","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016841/doc4.xml","form_type":"4"}},{"id":2814985,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2021-03-03T21:13:45.000Z","date":"2021-02-28","kind":"tax_withholding","acquired":false,"shares":1671,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 36,309 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,447 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021."}],"balance_after":53534,"source":{"system":"sec-edgar","filing":"0001209191-21-016841","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016841/doc4.xml","form_type":"4"}},{"id":3132513,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-28T12:05:04.000Z","date":"2020-05-27","kind":"sale","acquired":false,"shares":8261,"price":27.07,"value":223625.27,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $27.00 to $27.17, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 27, 2020, 42,002 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":55205,"source":{"system":"sec-edgar","filing":"0001209191-20-032504","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120032504/doc4.xml","form_type":"4"}},{"id":3132519,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-28T12:00:10.000Z","date":"2020-05-17","kind":"tax_withholding","acquired":false,"shares":643,"price":23.95,"value":15399.85,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2020, 42,002 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":63466,"source":{"system":"sec-edgar","filing":"0001209191-20-032503","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120032503/doc4a.xml","form_type":"4/A","original_submission_date":"2020-05-19"}},{"id":3132518,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-28T12:00:10.000Z","date":"2020-05-16","kind":"tax_withholding","acquired":false,"shares":558,"price":23.95,"value":13364.1,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 16, 2020, 44,189 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64109,"source":{"system":"sec-edgar","filing":"0001209191-20-032503","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120032503/doc4a.xml","form_type":"4/A","original_submission_date":"2020-05-19"}},{"id":3132517,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-28T12:00:10.000Z","date":"2020-05-16","kind":"tax_withholding","acquired":false,"shares":1404,"price":23.95,"value":33625.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 16, 2020, 46,086 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64667,"source":{"system":"sec-edgar","filing":"0001209191-20-032503","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120032503/doc4a.xml","form_type":"4/A","original_submission_date":"2020-05-19"}},{"id":3132516,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-28T12:00:10.000Z","date":"2020-05-15","kind":"tax_withholding","acquired":false,"shares":837,"price":23.52,"value":19686.24,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 50,859 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":66071,"source":{"system":"sec-edgar","filing":"0001209191-20-032503","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120032503/doc4a.xml","form_type":"4/A","original_submission_date":"2020-05-19"}},{"id":3132515,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-28T12:00:10.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":10894,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and February 28, 2022.  Unearned restricted stock units will forfeit on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2020, 53,705 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":66908,"source":{"system":"sec-edgar","filing":"0001209191-20-032503","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120032503/doc4a.xml","form_type":"4/A","original_submission_date":"2020-05-19"}},{"id":3132514,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-28T12:00:10.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":10894,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2021, May 15, 2022, May 15, 2023 and May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2020, 42,811 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":56014,"source":{"system":"sec-edgar","filing":"0001209191-20-032503","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120032503/doc4a.xml","form_type":"4/A","original_submission_date":"2020-05-19"}},{"id":3143320,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-19T21:21:56.000Z","date":"2020-05-17","kind":"tax_withholding","acquired":false,"shares":643,"price":23.95,"value":15399.85,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2020, 42,002 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":72180,"source":{"system":"sec-edgar","filing":"0001209191-20-030598","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030598/doc4.xml","form_type":"4"}},{"id":3143319,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-19T21:21:56.000Z","date":"2020-05-16","kind":"tax_withholding","acquired":false,"shares":558,"price":23.95,"value":13364.1,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 16, 2020, 44,189 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":72823,"source":{"system":"sec-edgar","filing":"0001209191-20-030598","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030598/doc4.xml","form_type":"4"}},{"id":3143318,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-19T21:21:56.000Z","date":"2020-05-16","kind":"tax_withholding","acquired":false,"shares":1404,"price":23.95,"value":33625.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 16, 2020, 46,086 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":73381,"source":{"system":"sec-edgar","filing":"0001209191-20-030598","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030598/doc4.xml","form_type":"4"}},{"id":3143317,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-19T21:21:56.000Z","date":"2020-05-15","kind":"tax_withholding","acquired":false,"shares":837,"price":23.52,"value":19686.24,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 50,859 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":74785,"source":{"system":"sec-edgar","filing":"0001209191-20-030598","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030598/doc4.xml","form_type":"4"}},{"id":3143316,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-19T21:21:56.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":10894,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and February 28, 2022.  Unearned restricted stock units will forfeit on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2020, 53,705 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":75622,"source":{"system":"sec-edgar","filing":"0001209191-20-030598","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030598/doc4.xml","form_type":"4"}},{"id":3143315,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-19T21:21:56.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":10894,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2021, May 15, 2022, May 15, 2023 and May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2020, 42,811 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64728,"source":{"system":"sec-edgar","filing":"0001209191-20-030598","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030598/doc4.xml","form_type":"4"}},{"id":3156746,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-05-08T20:19:40.000Z","date":"2020-05-08","kind":"sale","acquired":false,"shares":8714,"price":26,"value":226564.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 8, 2020, 31,917 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":45120,"source":{"system":"sec-edgar","filing":"0001209191-20-027887","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120027887/doc4.xml","form_type":"4"}},{"id":3228196,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-03-04T21:57:24.000Z","date":"2020-03-04","kind":"sale","acquired":false,"shares":9019,"price":24.05,"value":216906.95,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of March 4, 2020, 31,917 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":53834,"source":{"system":"sec-edgar","filing":"0001209191-20-016182","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120016182/doc4.xml","form_type":"4"}},{"id":3233567,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Stock option (right to buy)","published_at":"2020-03-03T21:47:23.000Z","date":"2020-03-03","kind":"exercise","acquired":false,"shares":3907,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":12.04,"exercise_date":"2019-07-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":3907},"source":{"system":"sec-edgar","filing":"0001209191-20-015291","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120015291/doc4.xml","form_type":"4"}},{"id":3233566,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-03-03T21:47:23.000Z","date":"2020-03-03","kind":"sale","acquired":false,"shares":3907,"price":24.2,"value":94549.4,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 31,917 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":62853,"source":{"system":"sec-edgar","filing":"0001209191-20-015291","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120015291/doc4.xml","form_type":"4"}},{"id":3233565,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-03-03T21:47:23.000Z","date":"2020-03-03","kind":"exercise","acquired":true,"shares":3907,"price":12.04,"value":47040.28,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 31,917 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":66760,"source":{"system":"sec-edgar","filing":"0001209191-20-015291","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120015291/doc4.xml","form_type":"4"}},{"id":3233564,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-03-03T21:47:23.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":2394,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2021, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 31,917 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":62853,"source":{"system":"sec-edgar","filing":"0001209191-20-015291","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120015291/doc4.xml","form_type":"4"}},{"id":3233563,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2020-03-03T21:47:23.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":1786,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the remainder of performance based restricted stock units granted to the executive in May 2018.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 5, 2019, and half of the earned shares vested on February 28, 2019. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of the 2018 performance based restricted stock units, 37,609 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,692 shares issuable under the executive's 2019 performance based restricted stock units, which also vested on February 28, 2020."}],"balance_after":65247,"source":{"system":"sec-edgar","filing":"0001209191-20-015291","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120015291/doc4.xml","form_type":"4"}},{"id":3432297,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-08-21T20:17:38.000Z","date":"2019-08-21","kind":"purchase","acquired":true,"shares":2480,"price":15.05,"value":37324.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of August 21, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":67033,"source":{"system":"sec-edgar","filing":"0001209191-19-046978","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119046978/doc4.xml","form_type":"4"}},{"id":3432296,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-08-21T20:17:38.000Z","date":"2019-08-21","kind":"purchase","acquired":true,"shares":414,"price":15.04,"value":6226.56,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of August 21, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64553,"source":{"system":"sec-edgar","filing":"0001209191-19-046978","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119046978/doc4.xml","form_type":"4"}},{"id":3432295,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-08-21T20:17:38.000Z","date":"2019-08-21","kind":"purchase","acquired":true,"shares":106,"price":15.03,"value":1593.18,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of August 21, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64139,"source":{"system":"sec-edgar","filing":"0001209191-19-046978","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119046978/doc4.xml","form_type":"4"}},{"id":3521625,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:56.000Z","date":"2019-05-17","kind":"tax_withholding","acquired":false,"shares":644,"price":16.5,"value":10626.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held as of May 17, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64033,"source":{"system":"sec-edgar","filing":"0001209191-19-030933","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030933/doc4.xml","form_type":"4"}},{"id":3521624,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:56.000Z","date":"2019-05-16","kind":"tax_withholding","acquired":false,"shares":558,"price":16.95,"value":9458.1,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2019, 43,592 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64677,"source":{"system":"sec-edgar","filing":"0001209191-19-030933","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030933/doc4.xml","form_type":"4"}},{"id":3521623,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:56.000Z","date":"2019-05-16","kind":"tax_withholding","acquired":false,"shares":1404,"price":16.95,"value":23797.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2019, 43,592 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":65235,"source":{"system":"sec-edgar","filing":"0001209191-19-030933","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030933/doc4.xml","form_type":"4"}},{"id":3521622,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:56.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":11385,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held as of May 15, 2019, 50,262 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":66639,"source":{"system":"sec-edgar","filing":"0001209191-19-030933","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030933/doc4.xml","form_type":"4"}},{"id":3521621,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:56.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":11385,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2019, 38,877 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":55254,"source":{"system":"sec-edgar","filing":"0001209191-19-030933","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030933/doc4.xml","form_type":"4"}},{"id":3623644,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-03-01T21:11:09.000Z","date":"2019-02-28","kind":"tax_withholding","acquired":false,"shares":1027,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"On February 5, 2019, the Axcelis Technologies, Inc. Compensation Committee determined that restricted stock units with performance vesting terms granted in May 2018 had been earned as to 100% of the units. In accordance with the terms of these grants, on February 28, 2019, 50% of the earned shares vested. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2019, 27,492 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":43869,"source":{"system":"sec-edgar","filing":"0001209191-19-014946","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119014946/doc4.xml","form_type":"4"}},{"id":3654125,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Stock option (right to buy)","published_at":"2019-02-15T21:12:19.000Z","date":"2019-02-15","kind":"exercise","acquired":false,"shares":7813,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":7.2,"exercise_date":"2018-07-15","expiration_date":"2021-07-15","underlying":"Common Stock","underlying_shares":7813},"source":{"system":"sec-edgar","filing":"0001209191-19-010565","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119010565/doc4.xml","form_type":"4"}},{"id":3654124,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Stock option (right to buy)","published_at":"2019-02-15T21:12:19.000Z","date":"2019-02-15","kind":"exercise","acquired":false,"shares":5859,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"These options are unvested and will vest as to 50% of the unvested shares on each of April 15,2019 and July 15,2019 if the executive remains in the service of the Company on such vesting date."}],"balance_after":3906,"derivative":{"exercise_price":12.04,"exercise_date":"2019-01-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":5859},"source":{"system":"sec-edgar","filing":"0001209191-19-010565","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119010565/doc4.xml","form_type":"4"}},{"id":3654123,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-02-15T21:12:19.000Z","date":"2019-02-15","kind":"sale","acquired":false,"shares":13672,"price":22.51,"value":307756.72,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $22.50 to $22.61, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 15, 2019, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":44896,"source":{"system":"sec-edgar","filing":"0001209191-19-010565","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119010565/doc4.xml","form_type":"4"}},{"id":3654122,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-02-15T21:12:19.000Z","date":"2019-02-15","kind":"exercise","acquired":true,"shares":7813,"price":7.2,"value":56253.6,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 15, 2019, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":58568,"source":{"system":"sec-edgar","filing":"0001209191-19-010565","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119010565/doc4.xml","form_type":"4"}},{"id":3654121,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-02-15T21:12:19.000Z","date":"2019-02-15","kind":"exercise","acquired":true,"shares":5859,"price":12.04,"value":70542.36,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 15, 2019, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":50755,"source":{"system":"sec-edgar","filing":"0001209191-19-010565","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119010565/doc4.xml","form_type":"4"}},{"id":3663474,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Stock option (right to buy)","published_at":"2019-02-12T21:11:37.000Z","date":"2018-06-01","kind":"exercise","acquired":false,"shares":1953,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"These options will vest as to 20% of the unvested shares each of October 15,2018, January 15,2019, April 15,2019 and July 15,2019 if the executive remains in the service of the Company on such vesting date."}],"balance_after":9766,"derivative":{"exercise_price":12.04,"exercise_date":"2018-04-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":1953},"source":{"system":"sec-edgar","filing":"0001209191-19-009283","document":"doc4a.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119009283/doc4a.xml","form_type":"4/A","original_submission_date":"2018-06-01"}},{"id":3663473,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-02-12T21:11:37.000Z","date":"2018-06-01","kind":"sale","acquired":false,"shares":1953,"price":21.74,"value":42458.22,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 1, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"The original Form 4, filed on June 1, 2018, is being amended by this Form 4 amendment solely to correct an administrative error, which misreported a sale that occurred on June 1, 2018 as a total of 1,154 shares sold when in fact 1,554 shares of the Issuer's common stock were sold. As a result of this administrative error, the number of shares beneficially owned by the reporting person following the corrected transaction reflects a reduction of 400 shares."}],"balance_after":44896,"source":{"system":"sec-edgar","filing":"0001209191-19-009283","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119009283/doc4a.xml","form_type":"4/A","original_submission_date":"2018-06-01"}},{"id":3663472,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-02-12T21:11:37.000Z","date":"2018-06-01","kind":"exercise","acquired":true,"shares":1953,"price":12.04,"value":23514.12,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 1, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"The original Form 4, filed on June 1, 2018, is being amended by this Form 4 amendment solely to correct an administrative error, which misreported a sale that occurred on June 1, 2018 as a total of 1,154 shares sold when in fact 1,554 shares of the Issuer's common stock were sold. As a result of this administrative error, the number of shares beneficially owned by the reporting person following the corrected transaction reflects a reduction of 400 shares."}],"balance_after":46849,"source":{"system":"sec-edgar","filing":"0001209191-19-009283","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119009283/doc4a.xml","form_type":"4/A","original_submission_date":"2018-06-01"}},{"id":3663471,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-02-12T21:11:37.000Z","date":"2018-06-01","kind":"sale","acquired":false,"shares":1554,"price":21.71,"value":33737.34,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 1, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"The original Form 4, filed on June 1, 2018, is being amended by this Form 4 amendment solely to correct an administrative error, which misreported a sale that occurred on June 1, 2018 as a total of 1,154 shares sold when in fact 1,554 shares of the Issuer's common stock were sold. As a result of this administrative error, the number of shares beneficially owned by the reporting person following the corrected transaction reflects a reduction of 400 shares."}],"balance_after":44896,"source":{"system":"sec-edgar","filing":"0001209191-19-009283","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119009283/doc4a.xml","form_type":"4/A","original_submission_date":"2018-06-01"}},{"id":3663470,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2019-02-12T21:11:37.000Z","date":"2018-06-01","kind":"sale","acquired":false,"shares":3000,"price":21.72,"value":65160.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 1, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":46450,"source":{"system":"sec-edgar","filing":"0001209191-19-009283","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119009283/doc4a.xml","form_type":"4/A","original_submission_date":"2018-06-01"}},{"id":3911108,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Stock option (right to buy)","published_at":"2018-06-01T20:34:14.000Z","date":"2018-06-01","kind":"exercise","acquired":false,"shares":1953,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"These options will vest as to 20% of the unvested shares each of October 15,2018, January 15,2019, April 15,2019 and July 15,2019 if the executive remains in the service of the Company on such vesting date."}],"balance_after":9766,"derivative":{"exercise_price":12.04,"exercise_date":"2018-04-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":1953},"source":{"system":"sec-edgar","filing":"0001209191-18-034696","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118034696/doc4.xml","form_type":"4"}},{"id":3911107,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-06-01T20:34:14.000Z","date":"2018-06-01","kind":"sale","acquired":false,"shares":1953,"price":21.74,"value":42458.22,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 1, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":45296,"source":{"system":"sec-edgar","filing":"0001209191-18-034696","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118034696/doc4.xml","form_type":"4"}},{"id":3911106,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-06-01T20:34:14.000Z","date":"2018-06-01","kind":"exercise","acquired":true,"shares":1953,"price":12.04,"value":23514.12,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 1, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":47249,"source":{"system":"sec-edgar","filing":"0001209191-18-034696","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118034696/doc4.xml","form_type":"4"}},{"id":3911105,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-06-01T20:34:14.000Z","date":"2018-06-01","kind":"sale","acquired":false,"shares":1154,"price":21.71,"value":25053.34,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 1, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":45296,"source":{"system":"sec-edgar","filing":"0001209191-18-034696","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118034696/doc4.xml","form_type":"4"}},{"id":3911104,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-06-01T20:34:14.000Z","date":"2018-06-01","kind":"sale","acquired":false,"shares":3000,"price":21.72,"value":65160.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 1, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":46450,"source":{"system":"sec-edgar","filing":"0001209191-18-034696","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118034696/doc4.xml","form_type":"4"}},{"id":3926119,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-05-18T20:11:22.000Z","date":"2018-05-17","kind":"tax_withholding","acquired":false,"shares":645,"price":22.4,"value":14448.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"Represents the closing price on May 17, 2018."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 17, 2018."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held as of May 17, 2018, 31,286 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":49450,"source":{"system":"sec-edgar","filing":"0001209191-18-031391","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031391/doc4.xml","form_type":"4"}},{"id":3926118,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-05-18T20:11:22.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":7589,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2019 and February 28, 2020, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2018, 33,473 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":50095,"source":{"system":"sec-edgar","filing":"0001209191-18-031391","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031391/doc4.xml","form_type":"4"}},{"id":3926117,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-05-18T20:11:22.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":7589,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2019, May 16, 2020, May 16, 2021 and May 16, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held as of May 16, 2018, 25,884 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":42506,"source":{"system":"sec-edgar","filing":"0001209191-18-031391","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031391/doc4.xml","form_type":"4"}},{"id":3926116,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-05-18T20:11:22.000Z","date":"2018-05-16","kind":"tax_withholding","acquired":false,"shares":1406,"price":22.4,"value":31494.4,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price on May 16, 2018."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 16, 2018."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of May 16, 2018, 18,295 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":34917,"source":{"system":"sec-edgar","filing":"0001209191-18-031391","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031391/doc4.xml","form_type":"4"}},{"id":3996628,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Stock Option (right to buy)","published_at":"2018-03-14T20:23:43.000Z","date":"2018-03-14","kind":"exercise","acquired":false,"shares":1953,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"31,250 options were granted on July 15, 2015 and were vested as to 62.5% of the options as of January 15, 2018.  Of the remaining 11,719 options held by the executive after the sales reported on this form, 1953/4 options will vest on the 15th of each of October, January, April and July until fully vested on July 15, 2019, if the officer remains in the service of the Company on such vesting dates."}],"balance_after":11719,"derivative":{"exercise_price":12.04,"exercise_date":"2018-01-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":1953},"source":{"system":"sec-edgar","filing":"0001209191-18-019555","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118019555/doc4.xml","form_type":"4"}},{"id":3996627,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":89598,"kind":"person","name":"Lawson Douglas A.","position":1,"cik":"0001420601","reported_name":"Lawson Douglas A.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Corporate Mktg & Strategy"}}],"security":"Common Stock","published_at":"2018-03-14T20:23:43.000Z","date":"2018-03-14","kind":"sale","acquired":false,"shares":3478,"price":26.52,"value":92236.56,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $26.47 to $26.55, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of March 14, 2018, 23,069 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":36324,"source":{"system":"sec-edgar","filing":"0001209191-18-019555","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118019555/doc4.xml","form_type":"4"}}],"next_cursor":"2018-03-14T20:23:43.000000Z,3996627"}