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The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":14787,"source":{"system":"sec-edgar","filing":"0001257815-23-000094","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000094/edgardoc.xml","form_type":"4"}},{"id":1779588,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":78536,"kind":"person","name":"Slicer Mark","position":1,"cik":"0001930126","reported_name":"Slicer Mark","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-09-18T20:36:45.000Z","date":"2023-09-15","kind":"sale","planned":true,"acquired":false,"shares":728,"price":123.64,"value":90009.92,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 16, 2023."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $123.07 to $124.05, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":15388,"source":{"system":"sec-edgar","filing":"0001257815-23-000094","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000094/edgardoc.xml","form_type":"4"}},{"id":1890532,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":78536,"kind":"person","name":"Slicer Mark","position":1,"cik":"0001930126","reported_name":"Slicer Mark","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-05-17T22:24:57.000Z","date":"2023-05-17","kind":"tax_withholding","planned":false,"acquired":false,"shares":1269,"price":97.95,"value":124298.55,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person."}],"balance_after":16116,"source":{"system":"sec-edgar","filing":"0001257815-23-000066","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000066/edgardoc.xml","form_type":"4"}},{"id":2012563,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":78536,"kind":"person","name":"Slicer Mark","position":1,"cik":"0001930126","reported_name":"Slicer Mark","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Financial Officer"}}],"security":"Performance Stock Unit","published_at":"2023-02-16T13:32:18.000Z","date":"2023-02-14","kind":"grant","acquired":true,"shares":2281,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"The Reporting Person was granted performance stock units (\"PSUs\"), each of which represents a contingent right to receive one share of ONTO common stock. 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The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":2281,"derivative":{"expiration_date":"2026-02-14","underlying":"Common Stock","underlying_shares":2281},"source":{"system":"sec-edgar","filing":"0001257815-23-000034","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000034/edgardoc.xml","form_type":"4"}},{"id":2012562,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":78536,"kind":"person","name":"Slicer Mark","position":1,"cik":"0001930126","reported_name":"Slicer Mark","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Financial Officer"}}],"security":"Performance Stock Unit","published_at":"2023-02-16T13:32:18.000Z","date":"2023-02-14","kind":"grant","acquired":true,"shares":2282,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"The Reporting Person was granted performance stock units (\"PSUs\"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"The Reporting Person was granted performance stock units (\"PSUs\"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. 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Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date."}],"balance_after":12821,"source":{"system":"sec-edgar","filing":"0001407682-22-000059","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000059/edgardoc.xml","form_type":"4"}}]}