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Settlements of vested units into common stock will occur on the earlier of the Settlement Date and the date the reporting person ceases to provide service to the Issuer, and thereafter on the first market trading day if the applicable date is not a market trading day."}],"balance_after":4577,"source":{"system":"sec-edgar","filing":"0001314431-24-000008","document":"wk-form4_1716333664.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000131443124000008/wk-form4_1716333664.xml","form_type":"4"}},{"id":1565059,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2024-03-21T23:22:19.000Z","date":"2024-03-19","kind":"grant","planned":false,"acquired":true,"shares":749,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares of Common Stock underlying a time-based restricted stock unit award (\"RSU\"). The RSUs will vest in two (2) monthly installments beginning March 19, 2024, such that the RSUs awarded will vest in full on May 19, 2024, subject to the continuing service of the Reporting Person on each vesting date."}],"balance_after":749,"source":{"system":"sec-edgar","filing":"0001314431-24-000006","document":"wk-form4_1711063330.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000131443124000006/wk-form4_1711063330.xml","form_type":"4"}},{"id":1696819,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2024-01-02T22:53:43.000Z","date":"2023-12-06","kind":"tax_withholding","planned":false,"acquired":false,"shares":5426,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on December 6, 2023 of certain restricted stock units granted to the executive in accordance with the Company's Executive Equity Retirement Program.  As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on December 6, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on December 6, 2023 after the vesting of certain restricted stock units under the Company's Executive Equity Retirement Program, 8,281 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":19597,"source":{"system":"sec-edgar","filing":"0001209191-24-000214","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919124000214/doc4.xml","form_type":"4"}},{"id":1878497,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-05-25T20:07:49.000Z","date":"2023-05-25","kind":"sale","planned":false,"acquired":false,"shares":2313,"price":148,"value":342324.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 25, 2023, 20,513 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":4510,"source":{"system":"sec-edgar","filing":"0001209191-23-032143","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123032143/doc4.xml","form_type":"4"}},{"id":1887216,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common 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forfeiture."}],"balance_after":27336,"source":{"system":"sec-edgar","filing":"0001209191-23-030582","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030582/doc4.xml","form_type":"4"}},{"id":1887215,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-05-18T20:03:02.000Z","date":"2023-05-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":699,"price":129.92,"value":90814.08,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 22,699 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":28306,"source":{"system":"sec-edgar","filing":"0001209191-23-030582","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030582/doc4.xml","form_type":"4"}},{"id":1891931,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-05-16T22:34:37.000Z","date":"2023-05-16","kind":"sale","planned":false,"acquired":false,"shares":6505,"price":130.84,"value":851114.2,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F7","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $130.70 to $130.94, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this sale on May 16, 2023, 24,275 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":29005,"source":{"system":"sec-edgar","filing":"0001209191-23-029943","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029943/doc4.xml","form_type":"4"}},{"id":1891930,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-05-16T22:34:37.000Z","date":"2023-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":1844,"price":127.99,"value":236013.56,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F3","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F6","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 24,275 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":35510,"source":{"system":"sec-edgar","filing":"0001209191-23-029943","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029943/doc4.xml","form_type":"4"}},{"id":1891929,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-05-16T22:34:37.000Z","date":"2023-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":1928,"price":127.99,"value":246764.72,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F3","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 28,432 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":37354,"source":{"system":"sec-edgar","filing":"0001209191-23-029943","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029943/doc4.xml","form_type":"4"}},{"id":1891928,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-05-16T22:34:37.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":3005,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment, 100% of the earned shares will vest on February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after the grant on May 15, 2023, 32,777 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":39282,"source":{"system":"sec-edgar","filing":"0001209191-23-029943","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029943/doc4.xml","form_type":"4"}},{"id":1897019,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-05-11T20:14:24.000Z","date":"2023-05-11","kind":"sale","planned":false,"acquired":false,"shares":10546,"price":125.06,"value":1318882.76,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 11, 2023, 29,772 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":36277,"source":{"system":"sec-edgar","filing":"0001209191-23-028727","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123028727/doc4.xml","form_type":"4"}},{"id":1984297,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-03-01T21:12:28.000Z","date":"2023-02-28","kind":"tax_withholding","acquired":false,"shares":1704,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 29,772 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":46823,"source":{"system":"sec-edgar","filing":"0001209191-23-014083","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123014083/doc4.xml","form_type":"4"}},{"id":1984296,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2023-03-01T21:12:28.000Z","date":"2023-02-28","kind":"tax_withholding","acquired":false,"shares":1965,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 34,027 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 4,255 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023."}],"balance_after":48527,"source":{"system":"sec-edgar","filing":"0001209191-23-014083","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123014083/doc4.xml","form_type":"4"}},{"id":2116604,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-11-15T21:48:56.000Z","date":"2022-11-15","kind":"sale","acquired":false,"shares":138,"price":80.09,"value":11052.42,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.08 to $80.12, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 15, 2022, 38,378 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":48286,"source":{"system":"sec-edgar","filing":"0001209191-22-057016","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122057016/doc4.xml","form_type":"4"}},{"id":2116603,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-11-15T21:48:56.000Z","date":"2022-11-15","kind":"sale","acquired":false,"shares":6362,"price":79.24,"value":504124.88,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $79.00 to $79.99, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 15, 2022, 38,378 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":48424,"source":{"system":"sec-edgar","filing":"0001209191-22-057016","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122057016/doc4.xml","form_type":"4"}},{"id":2185876,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-08-15T20:36:47.000Z","date":"2022-08-15","kind":"sale","acquired":false,"shares":500,"price":76.23,"value":38115.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $76.19 to $76.31, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 15, 2022, 38,378 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":54786,"source":{"system":"sec-edgar","filing":"0001209191-22-045811","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122045811/doc4.xml","form_type":"4"}},{"id":2185875,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-08-15T20:36:47.000Z","date":"2022-08-15","kind":"sale","acquired":false,"shares":8961,"price":75.3,"value":674763.3,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $75.00 to $75.98, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 15, 2022, 38,378 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":55286,"source":{"system":"sec-edgar","filing":"0001209191-22-045811","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122045811/doc4.xml","form_type":"4"}},{"id":2266156,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-05-18T20:59:49.000Z","date":"2022-05-17","kind":"tax_withholding","acquired":false,"shares":970,"price":60.56,"value":58743.2,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2022, 38,378 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64247,"source":{"system":"sec-edgar","filing":"0001209191-22-030103","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030103/doc4.xml","form_type":"4"}},{"id":2266155,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-05-18T20:59:49.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":6303,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F8","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024.  Unearned restricted stock units will forfeit on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this second grant on May 16, 2022, 40,564 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":65217,"source":{"system":"sec-edgar","filing":"0001209191-22-030103","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030103/doc4.xml","form_type":"4"}},{"id":2266154,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-05-18T20:59:49.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":6303,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this first grant on May 16, 2022, 34,261 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":58914,"source":{"system":"sec-edgar","filing":"0001209191-22-030103","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030103/doc4.xml","form_type":"4"}},{"id":2266153,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-05-18T20:59:49.000Z","date":"2022-05-16","kind":"tax_withholding","acquired":false,"shares":1743,"price":56.38,"value":98270.34,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 27,958 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":52611,"source":{"system":"sec-edgar","filing":"0001209191-22-030103","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030103/doc4.xml","form_type":"4"}},{"id":2266152,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-05-18T20:59:49.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":1844,"price":56.38,"value":103964.72,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 31,888 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":54354,"source":{"system":"sec-edgar","filing":"0001209191-22-030103","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030103/doc4.xml","form_type":"4"}},{"id":2266151,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-05-18T20:59:49.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":1927,"price":56.38,"value":108644.26,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 36,045 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":56198,"source":{"system":"sec-edgar","filing":"0001209191-22-030103","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030103/doc4.xml","form_type":"4"}},{"id":2361754,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-03-02T22:01:52.000Z","date":"2022-03-02","kind":"sale","acquired":false,"shares":8636,"price":70.89,"value":612206.04,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $70.80 to $70.90, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of March 2, 2022, 40,389 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":58125,"source":{"system":"sec-edgar","filing":"0001209191-22-014844","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014844/doc4.xml","form_type":"4"}},{"id":2361753,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-03-02T22:01:52.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":2909,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 40,389 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":66761,"source":{"system":"sec-edgar","filing":"0001209191-22-014844","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014844/doc4.xml","form_type":"4"}},{"id":2361752,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2022-03-02T22:01:52.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":3688,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 46,947 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,558 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022."}],"balance_after":69670,"source":{"system":"sec-edgar","filing":"0001209191-22-014844","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014844/doc4.xml","form_type":"4"}},{"id":2588673,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2021-08-27T20:18:28.000Z","date":"2021-08-27","kind":"sale","acquired":false,"shares":8656,"price":50.39,"value":436175.84,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $50.00 to $50.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 26, 2021 and August 27, 2021, 50,889 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":68986,"source":{"system":"sec-edgar","filing":"0001209191-21-053614","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121053614/doc4.xml","form_type":"4"}},{"id":2588672,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2021-08-27T20:18:28.000Z","date":"2021-08-26","kind":"sale","acquired":false,"shares":9409,"price":49.1,"value":461981.9,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $49.00 to $49.22, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 26, 2021 and August 27, 2021, 50,889 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":77642,"source":{"system":"sec-edgar","filing":"0001209191-21-053614","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121053614/doc4.xml","form_type":"4"}},{"id":2708605,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2021-05-18T21:32:37.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":8743,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023.  Unearned restricted stock units will forfeit on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this second grant on May 17, 2021, 50,889 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":87051,"source":{"system":"sec-edgar","filing":"0001209191-21-033619","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033619/doc4.xml","form_type":"4"}},{"id":2708604,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2021-05-18T21:32:37.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":8743,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F7","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first grant on May 17, 2021, 42,146 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":78308,"source":{"system":"sec-edgar","filing":"0001209191-21-033619","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033619/doc4.xml","form_type":"4"}},{"id":2708603,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN 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granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":69565,"source":{"system":"sec-edgar","filing":"0001209191-21-033619","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033619/doc4.xml","form_type":"4"}},{"id":2708602,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common 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forfeiture."}],"balance_after":70951,"source":{"system":"sec-edgar","filing":"0001209191-21-033619","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033619/doc4.xml","form_type":"4"}},{"id":2708601,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2021-05-18T21:32:37.000Z","date":"2021-05-15","kind":"tax_withholding","acquired":false,"shares":1844,"price":38.16,"value":70367.04,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 40,458 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":72694,"source":{"system":"sec-edgar","filing":"0001209191-21-033619","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033619/doc4.xml","form_type":"4"}},{"id":2708600,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS 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the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 44,615 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":74538,"source":{"system":"sec-edgar","filing":"0001209191-21-033619","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033619/doc4.xml","form_type":"4"}},{"id":2821447,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common 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These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 48,960 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":76466,"source":{"system":"sec-edgar","filing":"0001209191-21-016222","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016222/doc4.xml","form_type":"4"}},{"id":2821446,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2021-03-02T22:18:39.000Z","date":"2021-02-28","kind":"tax_withholding","acquired":false,"shares":3854,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 57,274 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 8,314 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021."}],"balance_after":80154,"source":{"system":"sec-edgar","filing":"0001209191-21-016222","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016222/doc4.xml","form_type":"4"}},{"id":3135563,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2020-05-26T20:13:32.000Z","date":"2020-05-02","kind":"sale","acquired":false,"shares":20000,"price":26.27,"value":525400.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $26.20 to $26.41, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 26, 2020, 65,964 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":84009,"source":{"system":"sec-edgar","filing":"0001209191-20-031981","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120031981/doc4.xml","form_type":"4"}},{"id":3143298,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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held after this tax withholding forfeiture (and related vesting) on  May 17, 2020, 65,964 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":104009,"source":{"system":"sec-edgar","filing":"0001209191-20-030469","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030469/doc4.xml","form_type":"4"}},{"id":3143297,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common 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of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 16, 2020, 73,019 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":107142,"source":{"system":"sec-edgar","filing":"0001209191-20-030469","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030469/doc4.xml","form_type":"4"}},{"id":3143295,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS 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the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 80,519 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":110472,"source":{"system":"sec-edgar","filing":"0001209191-20-030469","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030469/doc4.xml","form_type":"4"}},{"id":3143294,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common 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Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and February 28, 2022.  Unearned restricted stock units will forfeit on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2020, 84,863 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":112401,"source":{"system":"sec-edgar","filing":"0001209191-20-030469","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030469/doc4.xml","form_type":"4"}},{"id":3143293,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2020-05-19T20:24:26.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":16628,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2021, May 15, 2022, May 15, 2023 and May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2020, 68,235 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":95773,"source":{"system":"sec-edgar","filing":"0001209191-20-030469","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030469/doc4.xml","form_type":"4"}},{"id":3238752,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2020-03-02T21:25:56.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":3858,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2021, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 51,607 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":79145,"source":{"system":"sec-edgar","filing":"0001209191-20-014454","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014454/doc4.xml","form_type":"4"}},{"id":3238751,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2020-03-02T21:25:56.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":3490,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the remainder of performance based restricted stock units granted to the executive in May 2018.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 5, 2019, and half of the earned shares vested on February 28, 2019. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of the 2018 performance based restricted stock units, 60,296 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 8,689 shares issuable under the executive's 2019 performance based restricted stock units, which also vested on February 28, 2020."}],"balance_after":83003,"source":{"system":"sec-edgar","filing":"0001209191-20-014454","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014454/doc4.xml","form_type":"4"}},{"id":3277593,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Stock Option (right to buy)","published_at":"2020-02-12T22:38:32.000Z","date":"2020-02-11","kind":"exercise","acquired":false,"shares":24610,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":12.04,"exercise_date":"2019-07-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":24610},"source":{"system":"sec-edgar","filing":"0001209191-20-008905","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008905/doc4.xml","form_type":"4"}},{"id":3277592,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Stock Option (right to buy)","published_at":"2020-02-12T22:38:32.000Z","date":"2020-02-11","kind":"exercise","acquired":false,"shares":14063,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":7.2,"exercise_date":"2018-07-15","expiration_date":"2021-07-15","underlying":"Common Stock","underlying_shares":14063},"source":{"system":"sec-edgar","filing":"0001209191-20-008905","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008905/doc4.xml","form_type":"4"}},{"id":3277591,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2020-02-12T22:38:32.000Z","date":"2020-02-11","kind":"sale","acquired":false,"shares":24610,"price":29.03,"value":714428.3,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $29.00 to $29.11, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 11, 2020, 68,156 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":86493,"source":{"system":"sec-edgar","filing":"0001209191-20-008905","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008905/doc4.xml","form_type":"4"}},{"id":3277590,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2020-02-12T22:38:32.000Z","date":"2020-02-11","kind":"exercise","acquired":true,"shares":24610,"price":12.04,"value":296304.4,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 11, 2020, 68,156 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":111103,"source":{"system":"sec-edgar","filing":"0001209191-20-008905","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008905/doc4.xml","form_type":"4"}},{"id":3277589,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2020-02-12T22:38:32.000Z","date":"2020-02-11","kind":"sale","acquired":false,"shares":14063,"price":29.05,"value":408530.15,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $29.00 to $29.14, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 11, 2020, 68,156 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":86493,"source":{"system":"sec-edgar","filing":"0001209191-20-008905","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008905/doc4.xml","form_type":"4"}},{"id":3277588,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2020-02-12T22:38:32.000Z","date":"2020-02-11","kind":"exercise","acquired":true,"shares":14063,"price":7.2,"value":101253.6,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 11, 2020, 68,156 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":100556,"source":{"system":"sec-edgar","filing":"0001209191-20-008905","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008905/doc4.xml","form_type":"4"}},{"id":3348357,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2019-12-09T21:45:55.000Z","date":"2019-12-09","kind":"sale","acquired":false,"shares":24389,"price":22.56,"value":550215.84,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $22.50 to $22.70, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of December 9, 2019, 68,156 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":86493,"source":{"system":"sec-edgar","filing":"0001209191-19-059684","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119059684/doc4.xml","form_type":"4"}},{"id":3521615,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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as of May 17, 2019, 68,156 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":110882,"source":{"system":"sec-edgar","filing":"0001209191-19-030928","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030928/doc4.xml","form_type":"4"}},{"id":3521614,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common 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forfeiture."}],"balance_after":111801,"source":{"system":"sec-edgar","filing":"0001209191-19-030928","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030928/doc4.xml","form_type":"4"}},{"id":3521613,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2019-05-17T20:24:48.000Z","date":"2019-05-16","kind":"tax_withholding","acquired":false,"shares":2205,"price":16.95,"value":37374.75,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2019, 71,281 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":112957,"source":{"system":"sec-edgar","filing":"0001209191-19-030928","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030928/doc4.xml","form_type":"4"}},{"id":3521612,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held as of May 15, 2019, 82,711 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":115162,"source":{"system":"sec-edgar","filing":"0001209191-19-030928","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030928/doc4.xml","form_type":"4"}},{"id":3521611,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2019-05-17T20:24:48.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":17378,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2019, 65,333 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":97784,"source":{"system":"sec-edgar","filing":"0001209191-19-030928","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030928/doc4.xml","form_type":"4"}},{"id":3623642,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2019-03-01T21:09:22.000Z","date":"2019-02-28","kind":"tax_withholding","acquired":false,"shares":2127,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"On February 5, 2019, the Axcelis Technologies, Inc. Compensation Committee determined that restricted stock units with performance vesting terms granted in May 2018 had been earned as to 100% of the units. In accordance with the terms of these grants, on February 28, 2019, 50% of the earned shares vested. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2019, 47,955 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":80406,"source":{"system":"sec-edgar","filing":"0001209191-19-014940","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119014940/doc4.xml","form_type":"4"}},{"id":3926115,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2018-05-18T20:09:16.000Z","date":"2018-05-17","kind":"tax_withholding","acquired":false,"shares":921,"price":22.4,"value":20630.4,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"Represents the closing price on May 17, 2018."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 17, 2018."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held as of May 17, 2018, 55,815 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":82533,"source":{"system":"sec-edgar","filing":"0001209191-18-031385","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031385/doc4.xml","form_type":"4"}},{"id":3926114,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2018-05-18T20:09:16.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":15720,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2019 and February 28, 2020, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2018, 58,940 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":83454,"source":{"system":"sec-edgar","filing":"0001209191-18-031385","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031385/doc4.xml","form_type":"4"}},{"id":3926113,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & Chief Financial Officer"}}],"security":"Common Stock","published_at":"2018-05-18T20:09:16.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":15720,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2019, May 16, 2020, May 16, 2021 and May 16, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held as of May 16, 2018, 43,220 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":67734,"source":{"system":"sec-edgar","filing":"0001209191-18-031385","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031385/doc4.xml","form_type":"4"}},{"id":3926112,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":66758,"kind":"person","name":"BREWER KEVIN J","position":1,"cik":"0001314431","reported_name":"BREWER KEVIN 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