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This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"shares","element":"transactionShares","label":"F4","text":"On March 13, 2023, the reporting person was granted the contingent right to receive 15,600 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. 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This contingent right was subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which was based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represented the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  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Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"On March 17, 2022, the reporting person was granted the contingent right to receive 16,250 performance-based restricted stock units (\"PRSUs\").  This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represents the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  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The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  If the Criteria are not achieved, the award will be forfeited.  Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.underlying_shares","element":"underlyingSecurityShares","label":"F3","text":"On March 17, 2022, the reporting person was granted the contingent right to receive 16,250 performance-based restricted stock units (\"PRSUs\").  This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  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This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represents the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  If the Criteria are not achieved, the award will be forfeited.  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This amount overreported Dr. Porshnev's ownership by 1,372 shares, due to an error made in connection with the Form 4 filed on May 6, 2021 for Dr. Porshnev.  The total ownership amount reflected in this Form 4 is correct."}],"balance_after":86008.139,"source":{"system":"sec-edgar","filing":"0001179110-21-007435","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021007435/edgar.xml","form_type":"4"}},{"id":2665231,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":48951,"kind":"person","name":"Porshnev Peter","position":1,"cik":"0001805363","reported_name":"Porshnev Peter","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP, Unified Engineering"}}],"security":"Common Stock","published_at":"2021-06-18T00:09:11.000Z","date":"2021-06-16","kind":"tax_withholding","acquired":false,"shares":365,"price":25.17,"value":9187.05,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":85972.4809,"source":{"system":"sec-edgar","filing":"0001179110-21-006844","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021006844/edgar.xml","form_type":"4"}},{"id":2725962,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":48951,"kind":"person","name":"Porshnev Peter","position":1,"cik":"0001805363","reported_name":"Porshnev Peter","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP, Unified Engineering"}}],"security":"Common Stock","published_at":"2021-05-06T20:13:26.000Z","date":"2021-05-04","kind":"tax_withholding","acquired":false,"shares":1785,"price":22.75,"value":40608.75,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F3","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":86337.4809,"source":{"system":"sec-edgar","filing":"0001179110-21-004950","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021004950/edgar.xml","form_type":"4"}},{"id":2725961,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":48951,"kind":"person","name":"Porshnev Peter","position":1,"cik":"0001805363","reported_name":"Porshnev Peter","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP, Unified Engineering"}}],"security":"Common Stock","published_at":"2021-05-06T20:13:26.000Z","date":"2021-05-04","kind":"grant","acquired":true,"shares":2960,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents the vesting of a portion of the PRSUs granted on March 14, 2018 based on partial achievement of the performance criteria specified in the award agreement. 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