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Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2027."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2026, 1,440 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":13189,"source":{"system":"sec-edgar","filing":"0001908822-26-000002","document":"form4-05182026_050507.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000190882226000002/form4-05182026_050507.xml","form_type":"4"}},{"id":1147851,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45763,"kind":"person","name":"Quirk Jeanne","position":1,"cik":"0001908822","reported_name":"Quirk Jeanne","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2025-05-15T21:00:22.000Z","date":"2025-05-15","kind":"grant","planned":false,"acquired":true,"shares":3586,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025.  Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2025, 4,158 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":11749,"source":{"system":"sec-edgar","filing":"0001415889-25-013217","document":"form4-05152025_050518.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013217/form4-05152025_050518.xml","form_type":"4"}},{"id":1514655,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45763,"kind":"person","name":"Quirk Jeanne","position":1,"cik":"0001908822","reported_name":"Quirk Jeanne","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2024-05-16T20:16:12.000Z","date":"2024-05-15","kind":"grant","planned":false,"acquired":true,"shares":1662,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024.  Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2024, 2,805 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":8162,"source":{"system":"sec-edgar","filing":"0001415889-24-013335","document":"form4a-05162024_040557.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013335/form4a-05162024_040557.xml","form_type":"4/A","original_submission_date":"2024-05-15"}},{"id":1516276,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45763,"kind":"person","name":"Quirk Jeanne","position":1,"cik":"0001908822","reported_name":"Quirk Jeanne","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2024-05-15T20:15:49.000Z","date":"2024-05-15","kind":"grant","planned":false,"acquired":true,"shares":1162,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024.  Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2024, 2,305 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":7662,"source":{"system":"sec-edgar","filing":"0001415889-24-013226","document":"form4-05152024_040540.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013226/form4-05152024_040540.xml","form_type":"4"}},{"id":1859306,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45763,"kind":"person","name":"Quirk Jeanne","position":1,"cik":"0001908822","reported_name":"Quirk Jeanne","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-06-12T20:16:45.000Z","date":"2023-06-12","kind":"sale","planned":false,"acquired":false,"shares":900,"price":177.41,"value":159669.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"This sale of  shares was made to cover the tax liability incident to the 2023 vesting of shares on restricted stock units previously granted to the director."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of June 12, 2023, 4,278 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":7782,"source":{"system":"sec-edgar","filing":"0001209191-23-036272","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123036272/doc4.xml","form_type":"4"}},{"id":1893809,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45763,"kind":"person","name":"Quirk Jeanne","position":1,"cik":"0001908822","reported_name":"Quirk Jeanne","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-15T20:22:01.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":1282,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on of May 15, 2023, 5,685 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":7400,"source":{"system":"sec-edgar","filing":"0001209191-23-029452","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029452/doc4.xml","form_type":"4"}},{"id":2270702,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45763,"kind":"person","name":"Quirk Jeanne","position":1,"cik":"0001908822","reported_name":"Quirk Jeanne","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-16T20:30:29.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":2689,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on of May 16, 2022, 6,118 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":6118,"source":{"system":"sec-edgar","filing":"0001209191-22-029145","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122029145/doc4.xml","form_type":"4"}},{"id":2333770,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45763,"kind":"person","name":"Quirk Jeanne","position":1,"cik":"0001908822","reported_name":"Quirk Jeanne","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-03-15T21:57:43.000Z","date":"2022-03-15","kind":"grant","acquired":true,"shares":1143,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on September 15, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"All of the shares held as of March 15, 2022 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":3429,"source":{"system":"sec-edgar","filing":"0001209191-22-018927","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122018927/doc4.xml","form_type":"4"}},{"id":2333769,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45763,"kind":"person","name":"Quirk Jeanne","position":1,"cik":"0001908822","reported_name":"Quirk Jeanne","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-03-15T21:57:43.000Z","date":"2022-03-15","kind":"grant","acquired":true,"shares":2286,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, 25% of these restricted stock units will vest on each of March 15, 2023, March 15, 2024, March 15, 2025 and March 15, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"All of the shares held as of March 15, 2022 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":2286,"source":{"system":"sec-edgar","filing":"0001209191-22-018927","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122018927/doc4.xml","form_type":"4"}}]}