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The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on September 15, 2026, 19,782 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":34816,"source":{"system":"sec-edgar","filing":"0001940017-26-000010","document":"form4-09162026_050903.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1940017/000194001726000010/form4-09162026_050903.xml","form_type":"4"}},{"id":770414,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-05-20T21:05:09.000Z","date":"2026-05-18","kind":"tax_withholding","planned":false,"acquired":false,"shares":79,"price":146.24,"value":11552.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this vesting event on May 16, 2026, 20,488 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":35024,"source":{"system":"sec-edgar","filing":"0001940017-26-000008","document":"form4-05202026_050505.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000008/form4-05202026_050505.xml","form_type":"4"}},{"id":770413,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-05-20T21:05:09.000Z","date":"2026-05-18","kind":"tax_withholding","planned":false,"acquired":false,"shares":111,"price":146.24,"value":16232.64,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2026 of service vesting restricted stock units granted to the executive in May 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on May 16, 2026, 20,756 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":35103,"source":{"system":"sec-edgar","filing":"0001940017-26-000008","document":"form4-05202026_050505.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000008/form4-05202026_050505.xml","form_type":"4"}},{"id":772865,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:08.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":177,"price":155.18,"value":27466.86,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F10","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F11","text":"Of the shares held after this vesting event on May 15, 2026, 21,131 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":35214,"source":{"system":"sec-edgar","filing":"0001940017-26-000006","document":"form4-05192026_050504.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000006/form4-05192026_050504.xml","form_type":"4"}},{"id":772864,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:08.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":210,"price":155.18,"value":32587.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this vesting event on May 15, 2026, 21,732 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":35391,"source":{"system":"sec-edgar","filing":"0001940017-26-000006","document":"form4-05192026_050504.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000006/form4-05192026_050504.xml","form_type":"4"}},{"id":772863,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:08.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":452,"price":155.18,"value":70141.36,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2026, 22,445 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":35601,"source":{"system":"sec-edgar","filing":"0001940017-26-000006","document":"form4-05192026_050504.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000006/form4-05192026_050504.xml","form_type":"4"}},{"id":772862,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:08.000Z","date":"2026-05-15","kind":"grant","planned":false,"acquired":true,"shares":3115,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this grant on May 15, 2026, 23,982 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":36053,"source":{"system":"sec-edgar","filing":"0001940017-26-000006","document":"form4-05192026_050504.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000006/form4-05192026_050504.xml","form_type":"4"}},{"id":772861,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:08.000Z","date":"2026-05-15","kind":"grant","planned":false,"acquired":true,"shares":3115,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held following this grant on May 15, 2026, 20,867 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32938,"source":{"system":"sec-edgar","filing":"0001940017-26-000006","document":"form4-05192026_050504.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000006/form4-05192026_050504.xml","form_type":"4"}},{"id":779646,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-05-14T21:05:05.000Z","date":"2026-05-13","kind":"sale","planned":false,"acquired":false,"shares":2883,"price":160.85,"value":463730.55,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held after this sale on May 13, 2026, 17,752 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals."}],"balance_after":29823,"source":{"system":"sec-edgar","filing":"0001940017-26-000004","document":"form4-05142026_050501.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000004/form4-05142026_050501.xml","form_type":"4"}},{"id":869603,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2026-03-03T22:05:17.000Z","date":"2026-03-02","kind":"tax_withholding","planned":false,"acquired":false,"shares":723,"price":86.58,"value":62597.34,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units (\"2024 PRSUs\") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after the vesting of the remaining 2024 PRSUs, 16,984 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":31938,"source":{"system":"sec-edgar","filing":"0001940017-26-000002","document":"form4-03032026_050305.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001726000002/form4-03032026_050305.xml","form_type":"4"}},{"id":1038311,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-09-17T21:05:05.000Z","date":"2025-09-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":208,"price":87.3,"value":18158.4,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on September 15, 2025 of service vesting restricted stock units granted to the executive in September 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on September 15, 2025, 19,120 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32661,"source":{"system":"sec-edgar","filing":"0001940017-25-000004","document":"form4-09172025_050901.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000194001725000004/form4-09172025_050901.xml","form_type":"4"}},{"id":1108490,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-06-17T21:05:07.000Z","date":"2025-06-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":734,"price":68.96,"value":50616.64,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on June 15, 2025 of service vesting restricted stock units granted to the executive in June 2021. The shares issued to the executive following the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on June 15, 2025, 19,826 are issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32869,"source":{"system":"sec-edgar","filing":"0001415889-25-017560","document":"form4-06172025_050604.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925017560/form4-06172025_050604.xml","form_type":"4"}},{"id":1140873,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-05-20T20:30:15.000Z","date":"2025-05-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":190,"price":61.58,"value":11700.2,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2025 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on May 16, 2025, 22,326 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":33603,"source":{"system":"sec-edgar","filing":"0001415889-25-013805","document":"form4-05202025_040504.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013805/form4-05202025_040504.xml","form_type":"4"}},{"id":1143475,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-05-19T20:30:29.000Z","date":"2025-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":177,"price":62.67,"value":11092.59,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this vesting event on May 15, 2025, 22,968 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":33793,"source":{"system":"sec-edgar","filing":"0001415889-25-013646","document":"form4-05192025_040524.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013646/form4-05192025_040524.xml","form_type":"4"}},{"id":1143474,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-05-19T20:30:29.000Z","date":"2025-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":209,"price":62.67,"value":13098.03,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2024.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2025, 23,569 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":33970,"source":{"system":"sec-edgar","filing":"0001415889-25-013646","document":"form4-05192025_040524.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013646/form4-05192025_040524.xml","form_type":"4"}},{"id":1143473,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-05-19T20:30:29.000Z","date":"2025-05-15","kind":"grant","planned":false,"acquired":true,"shares":6148,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025.  In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this grant on May 15, 2025, 24,281 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":34179,"source":{"system":"sec-edgar","filing":"0001415889-25-013646","document":"form4-05192025_040524.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013646/form4-05192025_040524.xml","form_type":"4"}},{"id":1143472,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-05-19T20:30:29.000Z","date":"2025-05-15","kind":"grant","planned":false,"acquired":true,"shares":6148,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025.  Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held following this grant on May 15, 2025, 18,133 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":28031,"source":{"system":"sec-edgar","filing":"0001415889-25-013646","document":"form4-05192025_040524.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013646/form4-05192025_040524.xml","form_type":"4"}},{"id":1230820,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-03-04T21:30:25.000Z","date":"2025-02-28","kind":"tax_withholding","planned":true,"acquired":false,"shares":749,"price":54.79,"value":41037.71,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units (\"2024 PRSUs\") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, and half of the earned shares vested on February 28, 2025.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held as of February 28, 2025 after the vesting of the 2024 PRSUs, 11,985 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":21883,"source":{"system":"sec-edgar","filing":"0001415889-25-006547","document":"form4-03042025_040321.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925006547/form4-03042025_040321.xml","form_type":"4"}},{"id":1230819,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2025-03-04T21:30:25.000Z","date":"2025-02-28","kind":"tax_withholding","planned":true,"acquired":false,"shares":471,"price":54.79,"value":25806.09,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units (\"2023 PRSUs\") granted to the executive in   May 2023.  The units vesting on the 2023 PRSUs were deemed earned by the Compensation Committee in February 2024, and the shares vesting on February 28, 2025 represent the final tranche of that grant. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2023 PRSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of February 28, 2025 after the vesting of the  2023 PRSUs, 14,123 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":22632,"source":{"system":"sec-edgar","filing":"0001415889-25-006547","document":"form4-03042025_040321.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925006547/form4-03042025_040321.xml","form_type":"4"}},{"id":1359890,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2024-11-19T22:30:05.000Z","date":"2024-09-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":236,"price":98.86,"value":23330.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on September 16, 2024 of service vesting restricted stock units granted to the executive in September 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this forfeiture event on September 16, 2024, 14,321 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":21678,"source":{"system":"sec-edgar","filing":"0001415889-24-027249","document":"form4a-11192024_051101.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924027249/form4a-11192024_051101.xml","form_type":"4/A","original_submission_date":"2024-09-17"}},{"id":1405567,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2024-09-17T20:30:13.000Z","date":"2024-09-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":236,"price":98.86,"value":23330.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on September 16, 2024 of service vesting restricted stock units granted to the executive in September 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this forfeiture event on September 16, 2024, 16,821 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":22455,"source":{"system":"sec-edgar","filing":"0001415889-24-023522","document":"form4-09172024_040905.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924023522/form4-09172024_040905.xml","form_type":"4"}},{"id":1475963,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2024-06-18T20:15:41.000Z","date":"2024-06-17","kind":"tax_withholding","planned":false,"acquired":false,"shares":777,"price":138.02,"value":107241.54,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on June 17, 2024 of service vesting restricted stock units granted to the executive in June 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this forfeiture event on June 17, 2024, 15,028 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":21914,"source":{"system":"sec-edgar","filing":"0001415889-24-017398","document":"form4-06182024_040634.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924017398/form4-06182024_040634.xml","form_type":"4"}},{"id":1512121,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:51.000Z","date":"2024-05-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":190,"price":113.57,"value":21578.3,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2024 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"f the shares held after this vesting event on May 16, 2024, 17,528 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":22691,"source":{"system":"sec-edgar","filing":"0001415889-24-013486","document":"form4-05172024_040527.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013486/form4-05172024_040527.xml","form_type":"4"}},{"id":1512120,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:51.000Z","date":"2024-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":177,"price":112.94,"value":19990.38,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2024 of service vesting restricted stock units granted to the executive in May 2023.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2024, 18,171 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":22881,"source":{"system":"sec-edgar","filing":"0001415889-24-013486","document":"form4-05172024_040527.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013486/form4-05172024_040527.xml","form_type":"4"}},{"id":1512119,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:51.000Z","date":"2024-05-15","kind":"grant","planned":false,"acquired":true,"shares":2849,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024.  In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2024 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2025, and 50% of the earned shares will vest on February 28, 2026. Unearned restricted stock units will forfeit on February 28, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this grant on May 15, 2024, 18,772 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":23058,"source":{"system":"sec-edgar","filing":"0001415889-24-013486","document":"form4-05172024_040527.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013486/form4-05172024_040527.xml","form_type":"4"}},{"id":1512118,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:51.000Z","date":"2024-05-15","kind":"grant","planned":false,"acquired":true,"shares":2849,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024.  Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2025, May 15, 2026, May 15, 2027, and May 15, 2028."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held following this grant on May 15, 2024, 15,923 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":20209,"source":{"system":"sec-edgar","filing":"0001415889-24-013486","document":"form4-05172024_040527.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013486/form4-05172024_040527.xml","form_type":"4"}},{"id":1607799,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP MARKETING AND APPLICATIONS"}}],"security":"Common Stock","published_at":"2024-03-01T21:30:42.000Z","date":"2024-02-28","kind":"tax_withholding","planned":false,"acquired":false,"shares":477,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of performance based restricted stock units (\"PRSUs\") granted to the executive in May 2023.  Of the units granted, 135% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2024, and half of the earned shares vested on February 28, 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of February 28, 2024 after the vesting of the  2023 PRSUs, 13,074 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":17360,"source":{"system":"sec-edgar","filing":"0001415889-24-006106","document":"form4-03012024_040330.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924006106/form4-03012024_040330.xml","form_type":"4"}},{"id":1779274,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Marketing and Applications"}}],"security":"Common 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forfeiture."}],"balance_after":16995,"source":{"system":"sec-edgar","filing":"0001209191-23-049740","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123049740/doc4.xml","form_type":"4"}},{"id":1781242,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Marketing and Applications"}}],"security":"Common Stock","published_at":"2023-09-14T20:28:07.000Z","date":"2023-09-14","kind":"sale","planned":false,"acquired":false,"shares":600,"price":180.18,"value":108108.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held after this sale on September 14, 2023, 14,561 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":17203,"source":{"system":"sec-edgar","filing":"0001209191-23-049430","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123049430/doc4.xml","form_type":"4"}},{"id":1852888,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Marketing and Applications"}}],"security":"Common Stock","published_at":"2023-06-16T21:15:01.000Z","date":"2023-06-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":734,"price":170.97,"value":125491.98,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on June 15, 2023, 14,561 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":17803,"source":{"system":"sec-edgar","filing":"0001209191-23-038000","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123038000/doc4.xml","form_type":"4"}},{"id":1887228,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Marketing and Applications"}}],"security":"Common Stock","published_at":"2023-05-18T20:07:11.000Z","date":"2023-05-17","kind":"sale","planned":false,"acquired":false,"shares":1000,"price":135,"value":135000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this sale on  May 17, 2023, 17,061 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":18537,"source":{"system":"sec-edgar","filing":"0001209191-23-030598","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030598/doc4.xml","form_type":"4"}},{"id":1887227,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Marketing and Applications"}}],"security":"Common Stock","published_at":"2023-05-18T20:07:11.000Z","date":"2023-05-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":190,"price":129.92,"value":24684.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 17,061 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":19537,"source":{"system":"sec-edgar","filing":"0001209191-23-030598","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030598/doc4.xml","form_type":"4"}},{"id":1891927,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Marketing and Applications"}}],"security":"Common Stock","published_at":"2023-05-16T20:54:32.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":2404,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment,50% of the earned shares will vest on  February 28, 2024 and 50% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2023, 17,704 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":19727,"source":{"system":"sec-edgar","filing":"0001209191-23-029835","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029835/doc4.xml","form_type":"4"}},{"id":1891926,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Marketing and Applications"}}],"security":"Common Stock","published_at":"2023-05-16T20:54:32.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":2404,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2024, May 15, 2025, May 15, 2026 and May 15, 2027."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2023, 15,300 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":17323,"source":{"system":"sec-edgar","filing":"0001209191-23-029835","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029835/doc4.xml","form_type":"4"}},{"id":2158651,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45762,"kind":"person","name":"Redinbo Greg","position":1,"cik":"0001940017","reported_name":"Redinbo Greg","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Marketing and Applications"}}],"security":"Common Stock","published_at":"2022-09-15T20:47:47.000Z","date":"2022-09-15","kind":"grant","acquired":true,"shares":2825,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of September 15, 2023, September 15, 2024, September 15, 2025 and September 15, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on September 15, 2022, 12,896 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":14919,"source":{"system":"sec-edgar","filing":"0001209191-22-050084","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122050084/doc4.xml","form_type":"4"}}]}