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The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on September 15, 2026, 20,590 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":27491,"source":{"system":"sec-edgar","filing":"0001990732-26-000010","document":"form4-09162026_050901.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1990732/000199073226000010/form4-09162026_050901.xml","form_type":"4"}},{"id":768494,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2026-05-21T21:05:18.000Z","date":"2026-05-20","kind":"sale","planned":false,"acquired":false,"shares":1166,"price":149.75,"value":174608.5,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held after this sale on May 20, 2026, 20,871 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":27627,"source":{"system":"sec-edgar","filing":"0001990732-26-000008","document":"form4-05212026_050513.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073226000008/form4-05212026_050513.xml","form_type":"4"}},{"id":772873,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:10.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":170,"price":155.18,"value":26380.6,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F10","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F11","text":"Of the shares held after this vesting event on May 15, 2026, 20,871 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":28793,"source":{"system":"sec-edgar","filing":"0001990732-26-000006","document":"form4-05192026_050506.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073226000006/form4-05192026_050506.xml","form_type":"4"}},{"id":772872,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:10.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":345,"price":155.18,"value":53537.1,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this vesting event on May 15, 2026, 21,221 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":28963,"source":{"system":"sec-edgar","filing":"0001990732-26-000006","document":"form4-05192026_050506.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073226000006/form4-05192026_050506.xml","form_type":"4"}},{"id":772871,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:10.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":744,"price":155.18,"value":115453.92,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2026, 21,934 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":29308,"source":{"system":"sec-edgar","filing":"0001990732-26-000006","document":"form4-05192026_050506.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073226000006/form4-05192026_050506.xml","form_type":"4"}},{"id":772870,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:10.000Z","date":"2026-05-15","kind":"grant","planned":false,"acquired":true,"shares":3504,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this grant on May 15, 2026, 23,471 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":30052,"source":{"system":"sec-edgar","filing":"0001990732-26-000006","document":"form4-05192026_050506.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073226000006/form4-05192026_050506.xml","form_type":"4"}},{"id":772869,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:10.000Z","date":"2026-05-15","kind":"grant","planned":false,"acquired":true,"shares":3504,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held following this grant on May 15, 2026, 19,967 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":26548,"source":{"system":"sec-edgar","filing":"0001990732-26-000006","document":"form4-05192026_050506.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073226000006/form4-05192026_050506.xml","form_type":"4"}},{"id":803865,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2026-04-21T21:05:05.000Z","date":"2026-04-20","kind":"tax_withholding","planned":false,"acquired":false,"shares":907,"price":131.02,"value":118835.14,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on April 18, 2026 of service vesting restricted stock units granted to the executive in April 2022. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the Company's common stock on the date of the tax withholding."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting on April 18, 2026, 16,463 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals."}],"balance_after":23044,"source":{"system":"sec-edgar","filing":"0001990732-26-000004","document":"form4-04212026_050401.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073226000004/form4-04212026_050401.xml","form_type":"4"}},{"id":869604,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2026-03-03T22:05:19.000Z","date":"2026-03-02","kind":"tax_withholding","planned":false,"acquired":false,"shares":1121,"price":86.58,"value":97056.18,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units (\"2024 PRSUs\") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after the vesting of the remaining 2024 PRSUs, 17,570 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":23183,"source":{"system":"sec-edgar","filing":"0001990732-26-000002","document":"form4-03032026_050308.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073226000002/form4-03032026_050308.xml","form_type":"4"}},{"id":1038312,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2025-09-17T21:05:07.000Z","date":"2025-09-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":137,"price":87.3,"value":11960.1,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on September 15, 2025 of service vesting restricted stock units granted to the executive in September 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on September 15, 2025, 19,706 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":24304,"source":{"system":"sec-edgar","filing":"0001990732-25-000004","document":"form4-09172025_050903.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000199073225000004/form4-09172025_050903.xml","form_type":"4"}},{"id":1143479,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2025-05-19T20:30:33.000Z","date":"2025-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":170,"price":62.67,"value":10653.9,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this vesting event on May 15, 2025, 19,988 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":24441,"source":{"system":"sec-edgar","filing":"0001415889-25-013647","document":"form4-05192025_040527.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013647/form4-05192025_040527.xml","form_type":"4"}},{"id":1143478,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2025-05-19T20:30:33.000Z","date":"2025-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":345,"price":62.67,"value":21621.15,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of service vesting restricted stock units granted to the executive in May 2024.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2025, 20,338 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":24611,"source":{"system":"sec-edgar","filing":"0001415889-25-013647","document":"form4-05192025_040527.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013647/form4-05192025_040527.xml","form_type":"4"}},{"id":1143477,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2025-05-19T20:30:33.000Z","date":"2025-05-15","kind":"grant","planned":false,"acquired":true,"shares":6148,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025.  In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this grant on May 15, 2025, 21,050 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":24956,"source":{"system":"sec-edgar","filing":"0001415889-25-013647","document":"form4-05192025_040527.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013647/form4-05192025_040527.xml","form_type":"4"}},{"id":1143476,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2025-05-19T20:30:33.000Z","date":"2025-05-15","kind":"grant","planned":false,"acquired":true,"shares":6148,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025.  Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held following this grant on May 15, 2025, 14,902 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":18808,"source":{"system":"sec-edgar","filing":"0001415889-25-013647","document":"form4-05192025_040527.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925013647/form4-05192025_040527.xml","form_type":"4"}},{"id":1167867,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2025-04-22T20:30:09.000Z","date":"2025-04-21","kind":"tax_withholding","planned":false,"acquired":false,"shares":907,"price":45.23,"value":41023.61,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on April 18, 2025 of the restricted stock units (\"RSUs\") granted to the executive in April 2022.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested RSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of a share of the Company's common stock on April 21, 2025, the date shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of RSUs on April 18, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of April 21, 2025, 8,754 shares were issuable on vesting of RSUs granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":12660,"source":{"system":"sec-edgar","filing":"0001415889-25-011152","document":"form4-04222025_040401.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925011152/form4-04222025_040401.xml","form_type":"4"}},{"id":1230825,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2025-03-04T21:30:42.000Z","date":"2025-02-28","kind":"tax_withholding","planned":false,"acquired":false,"shares":1146,"price":54.79,"value":62789.34,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2025 of performance based restricted stock units (\"2024 PRSUs\") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, and half of the earned shares vested on February 28, 2025.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the Company's common stock on February 28, 2025, the date of the tax withholding."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of February 28, 2025 after the vesting of the 2024 PRSUs, 10,629 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":13567,"source":{"system":"sec-edgar","filing":"0001415889-25-006550","document":"form4-03042025_040328.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925006550/form4-03042025_040328.xml","form_type":"4"}},{"id":1405568,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2024-09-17T20:30:14.000Z","date":"2024-09-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":83,"price":98.86,"value":8205.38,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on September 16, 2024 of service vesting restricted stock units granted to the executive in September 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this forfeiture event on September 16, 2024, 11,342 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":13288,"source":{"system":"sec-edgar","filing":"0001415889-24-023523","document":"form4-09172024_040907.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924023523/form4-09172024_040907.xml","form_type":"4"}},{"id":1514660,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2024-05-16T22:01:05.000Z","date":"2024-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":103,"price":112.94,"value":11632.82,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2024 of service vesting restricted stock units granted to the executive in May 2023.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2024, 11,623 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":13371,"source":{"system":"sec-edgar","filing":"0001415889-24-013377","document":"form4-05162024_100557.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013377/form4-05162024_100557.xml","form_type":"4"}},{"id":1514659,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2024-05-16T22:01:05.000Z","date":"2024-05-15","kind":"grant","planned":false,"acquired":true,"shares":2849,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024.  In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2024 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2025, and 50% of the earned shares will vest on February 28, 2026. Unearned restricted stock units will forfeit on February 28, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this grant on May 15, 2024, 11,973 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":13474,"source":{"system":"sec-edgar","filing":"0001415889-24-013377","document":"form4-05162024_100557.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013377/form4-05162024_100557.xml","form_type":"4"}},{"id":1514658,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2024-05-16T22:01:05.000Z","date":"2024-05-15","kind":"grant","planned":false,"acquired":true,"shares":2849,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024.  Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2025, May 15, 2026, May 15, 2027, and May 15, 2028."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held following this grant on May 15, 2024, 9,124 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":10625,"source":{"system":"sec-edgar","filing":"0001415889-24-013377","document":"form4-05162024_100557.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013377/form4-05162024_100557.xml","form_type":"4"}},{"id":1538568,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2024-04-19T21:00:20.000Z","date":"2024-04-18","kind":"tax_withholding","planned":false,"acquired":false,"shares":551,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on April 18, 2024 of the restricted stock units (\"RSUs\") granted to the executive in April 2022.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested RSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of RSUs on April 18, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of April 18, 2024, 6,275 shares were issuable on vesting of RSUs granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":7776,"source":{"system":"sec-edgar","filing":"0001415889-24-011242","document":"form4-04192024_050401.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924011242/form4-04192024_050401.xml","form_type":"4"}},{"id":1780344,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":45357,"kind":"person","name":"Tatnall Christopher","position":1,"cik":"0001990732","reported_name":"Tatnall Christopher","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP Global Customer Operations"}}],"security":"Common Stock","published_at":"2023-09-15T11:07:46.000Z","date":"2023-09-15","kind":"grant","planned":false,"acquired":true,"shares":1125,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of September 15, 2024, September 15, 2025, September 15, 2026, and September 15, 2027."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on September 15, 2023, 8,150 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":8327,"source":{"system":"sec-edgar","filing":"0001209191-23-049537","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123049537/doc4.xml","form_type":"4"}}]}