{"transactions":[{"id":4632445,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2026-10-02T00:34:44.000Z","date":"2026-09-29","kind":"sale","planned":true,"acquired":false,"shares":2000,"price":300,"value":600000.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on June 11, 2026"}],"balance_after":10692,"source":{"system":"sec-edgar","filing":"0001233488-26-000007","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000123348826000007/edgardoc.xml","form_type":"4"}},{"id":767015,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2026-05-22T20:48:54.000Z","date":"2026-05-20","kind":"grant","planned":false,"acquired":true,"shares":761,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The Reporting Person was granted restricted stock units (\"RSUs\"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date."}],"balance_after":12692,"source":{"system":"sec-edgar","filing":"0001233488-26-000003","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000123348826000003/edgardoc.xml","form_type":"4"}},{"id":1136371,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2025-05-23T20:09:25.000Z","date":"2025-05-21","kind":"grant","planned":false,"acquired":true,"shares":2114,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The Reporting Person was granted restricted stock units (\"RSUs\"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date."}],"balance_after":11931,"source":{"system":"sec-edgar","filing":"0002022859-25-000060","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000202285925000060/edgardoc.xml","form_type":"4"}},{"id":1504645,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2024-05-23T20:27:39.000Z","date":"2024-05-22","kind":"grant","planned":false,"acquired":true,"shares":809,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The Reporting Person was granted restricted stock units (\"RSUs\"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date."}],"balance_after":9817,"source":{"system":"sec-edgar","filing":"0002022859-24-000017","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000202285924000017/edgardoc.xml","form_type":"4"}},{"id":1647722,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2024-02-13T23:01:47.000Z","date":"2024-02-13","kind":"sale","planned":false,"acquired":false,"shares":2800,"price":170.49,"value":477372.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $170.490 to $170.495, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":9008,"source":{"system":"sec-edgar","filing":"0001257815-24-000010","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781524000010/edgardoc.xml","form_type":"4"}},{"id":1879158,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-25T20:59:24.000Z","date":"2023-05-23","kind":"sale","planned":false,"acquired":false,"shares":1185,"price":99.21,"value":117563.85,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $99.07 to $99.37, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":11808,"source":{"system":"sec-edgar","filing":"0001257815-23-000072","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000072/edgardoc.xml","form_type":"4"}},{"id":1879157,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-25T20:59:24.000Z","date":"2023-05-23","kind":"sale","planned":false,"acquired":false,"shares":3815,"price":99.84,"value":380889.6,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $99.38 to $100.38, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":12993,"source":{"system":"sec-edgar","filing":"0001257815-23-000072","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000072/edgardoc.xml","form_type":"4"}},{"id":1897468,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-11T20:16:13.000Z","date":"2023-05-09","kind":"grant","planned":false,"acquired":true,"shares":2200,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"The Reporting Person was granted restricted stock units (\"RSUs\"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting."}],"balance_after":16808,"source":{"system":"sec-edgar","filing":"0001257815-23-000047","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000047/edgardoc.xml","form_type":"4"}},{"id":2274209,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-12T20:42:17.000Z","date":"2022-05-10","kind":"grant","acquired":true,"shares":2100,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting."}],"balance_after":14608,"source":{"system":"sec-edgar","filing":"0001407682-22-000047","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000047/edgardoc.xml","form_type":"4"}},{"id":2479810,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-12-09T21:07:07.000Z","date":"2021-12-07","kind":"sale","acquired":false,"shares":5500,"price":97.41,"value":535755.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $97.37 to $97.56, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":12508,"source":{"system":"sec-edgar","filing":"0001407682-21-000138","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000138/edgardoc.xml","form_type":"4"}},{"id":2717618,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-05-12T19:57:43.000Z","date":"2021-05-11","kind":"grant","acquired":true,"shares":2500,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting."}],"balance_after":18008,"source":{"system":"sec-edgar","filing":"0001407682-21-000074","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000074/edgardoc.xml","form_type":"4"}},{"id":2834224,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-02-25T20:43:51.000Z","date":"2021-02-24","kind":"disposition_to_issuer","acquired":false,"shares":6501,"price":62.95,"value":409237.95,"ownership":{"direct":true},"balance_after":15508,"source":{"system":"sec-edgar","filing":"0001407682-21-000054","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000054/edgardoc.xml","form_type":"4"}},{"id":3149980,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-05-14T16:27:08.000Z","date":"2020-05-12","kind":"grant","acquired":true,"shares":4800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting."}],"balance_after":22009,"source":{"system":"sec-edgar","filing":"0001407682-20-000072","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000072/edgardoc.xml","form_type":"4"}},{"id":3386759,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2019-10-30T01:36:42.000Z","date":"2019-10-25","kind":"grant","acquired":true,"shares":3297,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"These restricted stock units (\"RSUs\") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the \"Plan\") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"On October 25, 2019, pursuant to an Agreement and Plan of Merger (the \"Merger Agreement\"), Rudolph Technologies, Inc. (\"Rudolph\") and Nanometrics Incorporated (\"Nanometrics\") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the \"Merger\"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to \"Onto Innovation Inc.\" (\"Onto Innovation\") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the \"Exchange Ratio\"), with cash paid in lieu of fractional shares."}],"balance_after":17209,"source":{"system":"sec-edgar","filing":"0000899243-19-026256","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000089924319026256/doc4.xml","form_type":"4"}},{"id":3386758,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2019-10-30T01:36:42.000Z","date":"2019-10-25","kind":"grant","acquired":true,"shares":13912,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On October 25, 2019, pursuant to an Agreement and Plan of Merger (the \"Merger Agreement\"), Rudolph Technologies, Inc. (\"Rudolph\") and Nanometrics Incorporated (\"Nanometrics\") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the \"Merger\"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to \"Onto Innovation Inc.\" (\"Onto Innovation\") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the \"Exchange Ratio\"), with cash paid in lieu of fractional shares."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"On October 25, 2019, pursuant to an Agreement and Plan of Merger (the \"Merger Agreement\"), Rudolph Technologies, Inc. (\"Rudolph\") and Nanometrics Incorporated (\"Nanometrics\") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the \"Merger\"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to \"Onto Innovation Inc.\" (\"Onto Innovation\") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the \"Exchange Ratio\"), with cash paid in lieu of fractional shares."}],"balance_after":13912,"source":{"system":"sec-edgar","filing":"0000899243-19-026256","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000089924319026256/doc4.xml","form_type":"4"}},{"id":3386498,"issuer":{"id":131655,"kind":"organization","name":"RUDOLPH TECHNOLOGIES INC","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2019-10-29T20:51:07.000Z","date":"2019-10-25","kind":"disposition_to_issuer","acquired":false,"shares":21400,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On October 25, 2019, pursuant to an Agreement and Plan of Merger (the \"Merger Agreement\"), Rudolph Technologies, Inc. (\"Rudolph\") and Nanometrics Incorporated (\"Nanometrics\") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the \"Merger\"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to \"Onto Innovation Inc.\" and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) (\"Onto\") common stock (the \"Exchange Ratio\")."},{"field":"shares","element":"transactionShares","label":"F2","text":"Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"On October 25, 2019, pursuant to an Agreement and Plan of Merger (the \"Merger Agreement\"), Rudolph Technologies, Inc. (\"Rudolph\") and Nanometrics Incorporated (\"Nanometrics\") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the \"Merger\"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to \"Onto Innovation Inc.\" and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) (\"Onto\") common stock (the \"Exchange Ratio\")."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio."}],"balance_after":0,"source":{"system":"sec-edgar","filing":"0000899243-19-026178","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1094392/000089924319026178/doc4.xml","form_type":"4"}},{"id":3526545,"issuer":{"id":131655,"kind":"organization","name":"RUDOLPH TECHNOLOGIES INC","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2019-05-15T17:31:54.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":4100,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date.  Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting."}],"balance_after":21400,"source":{"system":"sec-edgar","filing":"0001407682-19-000087","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1094392/000140768219000087/edgardoc.xml","form_type":"4"}},{"id":3926371,"issuer":{"id":131655,"kind":"organization","name":"RUDOLPH TECHNOLOGIES INC","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2018-05-18T14:50:36.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":3100,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date.  Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting."}],"balance_after":17300,"source":{"system":"sec-edgar","filing":"0001257815-18-000010","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1094392/000125781518000010/edgardoc.xml","form_type":"4"}},{"id":3939528,"issuer":{"id":131655,"kind":"organization","name":"RUDOLPH TECHNOLOGIES INC","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2018-05-10T17:33:04.000Z","date":"2018-05-09","kind":"sale","acquired":false,"shares":3600,"price":31.3,"value":112680.0,"ownership":{"direct":true},"balance_after":14200,"source":{"system":"sec-edgar","filing":"0001407682-18-000076","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1094392/000140768218000076/edgardoc.xml","form_type":"4"}},{"id":3939527,"issuer":{"id":131655,"kind":"organization","name":"RUDOLPH TECHNOLOGIES INC","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2018-05-10T17:33:04.000Z","date":"2018-05-09","kind":"sale","acquired":false,"shares":400,"price":31.35,"value":12540.0,"ownership":{"direct":true},"balance_after":17800,"source":{"system":"sec-edgar","filing":"0001407682-18-000076","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1094392/000140768218000076/edgardoc.xml","form_type":"4"}},{"id":4312205,"issuer":{"id":131655,"kind":"organization","name":"RUDOLPH TECHNOLOGIES INC","symbol":"ONTO"},"owners":[{"id":44981,"kind":"person","name":"MILLER DAVID BRIAN","position":1,"cik":"0001233488","reported_name":"MILLER DAVID BRIAN","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2017-05-19T10:01:52.000Z","date":"2017-05-17","kind":"grant","acquired":true,"shares":4200,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date.  Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting."}],"balance_after":18200,"source":{"system":"sec-edgar","filing":"0001407682-17-000125","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1094392/000140768217000125/edgardoc.xml","form_type":"4"}}]}