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The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2026, 29,823 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32221,"source":{"system":"sec-edgar","filing":"0001715912-26-000003","document":"form4-05192026_050502.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000171591226000003/form4-05192026_050502.xml","form_type":"4"}},{"id":772867,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44854,"kind":"person","name":"Evans Eileen","position":1,"cik":"0001715912","reported_name":"Evans Eileen","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, General Counsel and Sec'y"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:06.000Z","date":"2026-05-15","kind":"grant","planned":false,"acquired":true,"shares":3893,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. 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Unearned restricted stock units will forfeit at such time."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this grant on May 15, 2026, 31,616 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":33088,"source":{"system":"sec-edgar","filing":"0001715912-26-000003","document":"form4-05192026_050502.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000171591226000003/form4-05192026_050502.xml","form_type":"4"}},{"id":772866,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44854,"kind":"person","name":"Evans Eileen","position":1,"cik":"0001715912","reported_name":"Evans Eileen","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, General Counsel and Sec'y"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:06.000Z","date":"2026-05-15","kind":"grant","planned":false,"acquired":true,"shares":3893,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. 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The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on December 16, 2025, 22,934 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":24406,"source":{"system":"sec-edgar","filing":"0001715912-25-000004","document":"form4-12182025_051201.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000171591225000004/form4-12182025_051201.xml","form_type":"4"}},{"id":1147856,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44854,"kind":"person","name":"Evans Eileen","position":1,"cik":"0001715912","reported_name":"Evans Eileen","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, General Counsel and Sec'y"}}],"security":"Common Stock","published_at":"2025-05-15T21:00:33.000Z","date":"2025-05-15","kind":"grant","planned":false,"acquired":true,"shares":7172,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025.  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The shares of Issuer common stock were acquired by the reporting person pursuant to a pro rata stock dividend of Issuer shares paid by HPE to its common shareholders on September 1, 2017, a transaction exempt from Section 16 pursuant to Rule 16a-9(a)."}],"balance_after":0,"source":{"system":"sec-edgar","filing":"0001715912-17-000004","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1704254/000171591217000004/edgar.xml","form_type":"4/A","original_submission_date":"2017-09-06"}},{"id":4215560,"issuer":{"id":173249,"kind":"organization","name":"Seattle SpinCo, Inc.","symbol":"NONE"},"owners":[{"id":44854,"kind":"person","name":"Evans Eileen","position":1,"cik":"0001715912","reported_name":"Evans Eileen","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Secretary"}}],"security":"Class A Common Stock","published_at":"2017-09-06T17:53:30.000Z","date":"2017-09-01","kind":"other","acquired":false,"shares":16436,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Shares of Issuer common stock were disposed of pursuant to merger agreement between Issuer, Micro Focus International plc , Hewlett Packard Enterprise Company (\"HPE\") and Seattle MergerSub, Inc. in exchange for 16,436 American Depositary Shares having a market value of $29.45 per share on the effective date of the merger.  The shares of Issuer common stock were acquired by the reporting person pursuant to a pro rata stock dividend of Issuer shares paid by HPE to its common shareholders on September 1, 2017, a transaction exempt from Section 16 pursuant to Rule 16a-9(a)."}],"balance_after":0,"source":{"system":"sec-edgar","filing":"0001715912-17-000002","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1704254/000171591217000002/edgar.xml","form_type":"4"}}]}