{"transactions":[{"id":763511,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2026-05-26T20:30:15.000Z","date":"2026-05-21","kind":"grant","planned":false,"acquired":true,"shares":12820,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of CLPT common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"The restricted stock units vest on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2027 annual meeting of stockholders."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"The restricted stock units vest on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2027 annual meeting of stockholders."}],"balance_after":12820,"derivative":{"underlying":"Common Stock","underlying_shares":12820},"source":{"system":"sec-edgar","filing":"0001193125-26-239432","document":"ownership.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000119312526239432/ownership.xml","form_type":"4"}},{"id":767721,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2026-05-21T20:30:19.000Z","date":"2026-05-19","kind":"exercise","planned":true,"acquired":false,"shares":12417,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 22, 2025, the reporting person was granted 12,417 restricted stock units, vesting on the earlier of (i)\nthe first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2026 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their\nscheduled vesting date."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 22, 2025, the reporting person was granted 12,417 restricted stock units, vesting on the earlier of (i)\nthe first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2026 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their\nscheduled vesting date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 22, 2025, the reporting person was granted 12,417 restricted stock units, vesting on the earlier of (i)\nthe first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2026 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their\nscheduled vesting date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 22, 2025, the reporting person was granted 12,417 restricted stock units, vesting on the earlier of (i)\nthe first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2026 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their\nscheduled vesting date."}],"balance_after":0,"derivative":{"underlying":"Common Stock","underlying_shares":12417},"source":{"system":"sec-edgar","filing":"0001193125-26-234575","document":"ownership.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000119312526234575/ownership.xml","form_type":"4"}},{"id":767720,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2026-05-21T20:30:19.000Z","date":"2026-05-20","kind":"sale","planned":true,"acquired":false,"shares":5091,"price":11.14,"value":56713.74,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F2","text":"This sale of shares was made pursuant to a Rule 10b5-1 trading plan to cover the tax liability incident to the vesting of 12,417 shares on May 19, 2026 under a restricted stock unit granted to the director on May 22, 2025."},{"field":"price","element":"transactionPricePerShare","label":"F3","text":"Represents a weighted average sales price per share. The shares were sold at prices ranging from $11.04 to $11.20. The Reporting Person has provided to the issuer, and will provide to any security holder of the issuer or the SEC\nstaff, upon request, information regarding the number of shares sold at each price within the range."}],"balance_after":48227,"source":{"system":"sec-edgar","filing":"0001193125-26-234575","document":"ownership.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000119312526234575/ownership.xml","form_type":"4"}},{"id":767719,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2026-05-21T20:30:19.000Z","date":"2026-05-19","kind":"exercise","planned":true,"acquired":true,"shares":12417,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 22, 2025, the reporting person was granted 12,417 restricted stock units, vesting on the earlier of (i)\nthe first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2026 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their\nscheduled vesting date."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 22, 2025, the reporting person was granted 12,417 restricted stock units, vesting on the earlier of (i)\nthe first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2026 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their\nscheduled vesting date."}],"balance_after":53318,"source":{"system":"sec-edgar","filing":"0001193125-26-234575","document":"ownership.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000119312526234575/ownership.xml","form_type":"4"}},{"id":1121108,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2025-06-05T20:17:02.000Z","date":"2025-06-03","kind":"sale","planned":false,"acquired":false,"shares":1200,"price":12.88,"value":15456.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This sale of shares was made to cover the tax liability incident to the vesting of 21,903 shares on May 16, 2025 under a restricted stock unit granted to the director on May 16, 2024."},{"field":"price","element":"transactionPricePerShare","label":"F3","text":"Represents a weighted average sales price per share. The shares were sold at prices ranging from $12.84 to $12.92. The Reporting Person has provided to the issuer, and will provide to any security holder of the issuer or the SEC staff, upon request, information regarding the number of shares sold at each price within the range."}],"balance_after":40901,"source":{"system":"sec-edgar","filing":"0000950170-25-082344","document":"ownership.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000095017025082344/ownership.xml","form_type":"4"}},{"id":1121107,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2025-06-05T20:17:02.000Z","date":"2025-06-03","kind":"sale","planned":false,"acquired":false,"shares":9000,"price":12.53,"value":112770.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This sale of shares was made to cover the tax liability incident to the vesting of 21,903 shares on May 16, 2025 under a restricted stock unit granted to the director on May 16, 2024."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents a weighted average sales price per share. The shares were sold at prices ranging from $11.84 to $12.81. The Reporting Person has provided to the issuer, and will provide to any security holder of the issuer or the SEC staff, upon request, information regarding the number of shares sold at each price within the range."}],"balance_after":42101,"source":{"system":"sec-edgar","filing":"0000950170-25-082344","document":"ownership.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000095017025082344/ownership.xml","form_type":"4"}},{"id":1135062,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2025-05-23T22:27:05.000Z","date":"2025-05-22","kind":"grant","planned":false,"acquired":true,"shares":12417,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"The restricted stock units vest on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2026 annual meeting of stockholders."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"The restricted stock units vest on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2026 annual meeting of stockholders."}],"balance_after":12417,"derivative":{"underlying":"Common Stock","underlying_shares":12417},"source":{"system":"sec-edgar","filing":"0000950170-25-077203","document":"ownership.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000095017025077203/ownership.xml","form_type":"4"}},{"id":1142374,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2025-05-19T20:55:39.000Z","date":"2025-05-16","kind":"exercise","planned":false,"acquired":false,"shares":21093,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 16, 2024, the reporting person was granted 21,093 restricted stock units, vesting on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2025 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their scheduled vesting date."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 16, 2024, the reporting person was granted 21,093 restricted stock units, vesting on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2025 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their scheduled vesting date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 16, 2024, the reporting person was granted 21,093 restricted stock units, vesting on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2025 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their scheduled vesting date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 16, 2024, the reporting person was granted 21,093 restricted stock units, vesting on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2025 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their scheduled vesting date."}],"balance_after":0,"derivative":{"underlying":"Common Stock","underlying_shares":21093},"source":{"system":"sec-edgar","filing":"0000950170-25-074501","document":"ownership.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000095017025074501/ownership.xml","form_type":"4"}},{"id":1142373,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2025-05-19T20:55:39.000Z","date":"2025-05-16","kind":"exercise","planned":false,"acquired":true,"shares":21093,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of ClearPoint Neuro, Inc. (\"CLPT\") common stock. On May 16, 2024, the reporting person was granted 21,093 restricted stock units, vesting on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2025 annual meeting of stockholders. This transaction represents the settlement of restricted stock units in shares of common stock on their scheduled vesting date."}],"balance_after":51101,"source":{"system":"sec-edgar","filing":"0000950170-25-074501","document":"ownership.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000095017025074501/ownership.xml","form_type":"4"}},{"id":1308531,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL"}}],"security":"Common Stock","published_at":"2025-01-07T12:52:04.000Z","date":"2025-01-03","kind":"tax_withholding","planned":false,"acquired":false,"shares":3083,"price":71.96,"value":221852.68,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on January 3, 2025 of certain restricted stock units granted to the executive in accordance with the Company's Executive Equity Retirement Program. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the Company's common stock on January 3, 2025,the date of the tax withholding,"},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of January 3, 2025, after the acceleration of vesting, 4,551 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":27323,"source":{"system":"sec-edgar","filing":"0001415889-25-000958","document":"form4-01072025_120100.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588925000958/form4-01072025_120100.xml","form_type":"4"}},{"id":1490551,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL AND GEN"}}],"security":"Common Stock","published_at":"2024-06-05T20:15:12.000Z","date":"2024-06-05","kind":"tax_withholding","planned":false,"acquired":false,"shares":272,"price":111.29,"value":30270.88,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date prior to the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting in May 2024 of 4 service vesting restricted stock units granted to the executive in May 2020, 2021, 2022 and 2023. As agreed with the executive, the shares issued to the executive on those vesting events were reduced by a number of shares to cover the executive's tax withholding obligation with respect to the vested restricted stock units. However, the number of shares withheld on the vesting dates was insufficient to cover a Massachusetts income tax surcharge applicable to the executive, so additional shares have been withheld to cover the shortfall, as reported herein."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this forfeiture event on June 5, 2024, 11,845 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":30406,"source":{"system":"sec-edgar","filing":"0001415889-24-015556","document":"form4-06052024_040606.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924015556/form4-06052024_040606.xml","form_type":"4"}},{"id":1509365,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL AND GEN"}}],"security":"Common Stock","published_at":"2024-05-20T20:15:13.000Z","date":"2024-05-17","kind":"tax_withholding","planned":false,"acquired":false,"shares":872,"price":113.23,"value":98736.56,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 17, 2024 of service vesting restricted stock units granted to the executive in May 2021. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on May 17, 2024, 11,845 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":30678,"source":{"system":"sec-edgar","filing":"0001415889-24-013739","document":"form4-05202024_040501.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013739/form4-05202024_040501.xml","form_type":"4"}},{"id":1510998,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2024-05-17T20:29:06.000Z","date":"2024-05-16","kind":"grant","planned":false,"acquired":true,"shares":21093,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of CLPT common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"The restricted stock units vest on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2025 annual meeting of stockholders."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"The restricted stock units vest on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2025 annual meeting of stockholders."}],"balance_after":21093,"derivative":{"underlying":"Common Stock","underlying_shares":21093},"source":{"system":"sec-edgar","filing":"0001285550-24-000071","document":"wk-form4_1715977723.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000128555024000071/wk-form4_1715977723.xml","form_type":"4"}},{"id":1512113,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL AND GEN"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:41.000Z","date":"2024-05-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":628,"price":113.57,"value":71321.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 16, 2024 of service vesting restricted stock units granted to the executive in May 2022. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this vesting event on May 16, 2024, 13,809 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":31550,"source":{"system":"sec-edgar","filing":"0001415889-24-013487","document":"form4-05172024_040529.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013487/form4-05172024_040529.xml","form_type":"4"}},{"id":1512112,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL AND GEN"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:41.000Z","date":"2024-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":300,"price":112.94,"value":33882.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F6","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2024 of service vesting restricted stock units granted to the executive in May 2020. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2024, 15,225 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32178,"source":{"system":"sec-edgar","filing":"0001415889-24-013487","document":"form4-05172024_040529.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013487/form4-05172024_040529.xml","form_type":"4"}},{"id":1512111,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL AND GEN"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:41.000Z","date":"2024-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":1017,"price":112.94,"value":114859.98,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F3","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2024 of service vesting restricted stock units granted to the executive in May 2023.  As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this vesting event on May 15, 2024, 15,900 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32478,"source":{"system":"sec-edgar","filing":"0001415889-24-013487","document":"form4-05172024_040529.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013487/form4-05172024_040529.xml","form_type":"4"}},{"id":1512110,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL AND GEN"}}],"security":"Common Stock","published_at":"2024-05-17T20:15:41.000Z","date":"2024-05-15","kind":"grant","planned":false,"acquired":true,"shares":3200,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2024.  In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2024 performance goals. 100% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on May 15, 2024, 18,623 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":33495,"source":{"system":"sec-edgar","filing":"0001415889-24-013487","document":"form4-05172024_040529.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924013487/form4-05172024_040529.xml","form_type":"4"}},{"id":1515808,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2024-05-15T13:21:27.000Z","date":"2024-05-14","kind":"exercise","planned":false,"acquired":false,"shares":17153,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F1","text":"Restricted stock units convert into common stock on a one-for-one basis."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"On May 25, 2023, the reporting person was granted 17,153 restricted stock units, vesting on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2024 annual meeting of stockholders."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"On May 25, 2023, the reporting person was granted 17,153 restricted stock units, vesting on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2024 annual meeting of stockholders."}],"balance_after":0,"derivative":{"underlying":"Common Stock","underlying_shares":17153},"source":{"system":"sec-edgar","filing":"0001285550-24-000059","document":"wk-form4_1715779277.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000128555024000059/wk-form4_1715779277.xml","form_type":"4"}},{"id":1515807,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2024-05-15T13:21:27.000Z","date":"2024-05-14","kind":"exercise","planned":false,"acquired":true,"shares":17153,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Restricted stock units convert into common stock on a one-for-one basis."}],"balance_after":30008,"source":{"system":"sec-edgar","filing":"0001285550-24-000059","document":"wk-form4_1715779277.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000128555024000059/wk-form4_1715779277.xml","form_type":"4"}},{"id":1607796,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL AND GEN"}}],"security":"Common Stock","published_at":"2024-03-01T21:30:31.000Z","date":"2024-02-28","kind":"tax_withholding","planned":false,"acquired":false,"shares":536,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of PRSUs granted to the executive in May 2023.  Of the units granted, 135% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2024, and half of the earned shares vested on February 28, 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held as of February 28, 2024 after the vesting of both the 2022 PRSUs and 2023 PRSUs, 15,423 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":30295,"source":{"system":"sec-edgar","filing":"0001415889-24-006103","document":"form4-03012024_040310.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924006103/form4-03012024_040310.xml","form_type":"4"}},{"id":1607795,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EXECUTIVE VP, HR/LEGAL AND GEN"}}],"security":"Common Stock","published_at":"2024-03-01T21:30:31.000Z","date":"2024-02-28","kind":"tax_withholding","planned":false,"acquired":false,"shares":1123,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2024 of the remainder of performance based restricted stock units (\"PRSUs\") granted to the executive in May 2022.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023, and half of the earned shares vested on February 28, 2023. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested PRSUs."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of PRSUs on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of February 28, 2024 after the vesting of the 2022 PRSUs and before the vesting of the 2023 PRSUs, 17,246 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":30831,"source":{"system":"sec-edgar","filing":"0001415889-24-006103","document":"form4-03012024_040310.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000141588924006103/form4-03012024_040310.xml","form_type":"4"}},{"id":1709704,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-12-15T21:21:11.000Z","date":"2023-12-14","kind":"gift","planned":false,"acquired":false,"shares":365,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares of Common Stock were donated by the executive as a gift to a Fidelity Charitable Account, a donor advised fund, entitled L&G Fallon Charitable Fund."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of December 14, 2023, 20,121 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":31006,"source":{"system":"sec-edgar","filing":"0001209191-23-058768","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123058768/doc4.xml","form_type":"4"}},{"id":1786161,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-09-07T20:35:12.000Z","date":"2023-09-07","kind":"sale","planned":false,"acquired":false,"shares":3098,"price":181.32,"value":561729.36,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $181.31 to $181.63, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of September 7, 2023, 20,121 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":31371,"source":{"system":"sec-edgar","filing":"0001209191-23-048637","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123048637/doc4.xml","form_type":"4"}},{"id":1864226,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-06-07T20:17:12.000Z","date":"2023-06-07","kind":"sale","planned":false,"acquired":false,"shares":1584,"price":172.73,"value":273604.32,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 7, 2023, 20,121 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":34469,"source":{"system":"sec-edgar","filing":"0001209191-23-035069","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123035069/doc4.xml","form_type":"4"}},{"id":1876231,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2023-05-26T18:10:01.000Z","date":"2023-05-25","kind":"grant","planned":false,"acquired":true,"shares":17153,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of CLPT common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"The restricted stock units vest on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2024 annual meeting of stockholders."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"The restricted stock units vest on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2024 annual meeting of stockholders."}],"balance_after":17153,"derivative":{"underlying":"Common Stock","underlying_shares":17153},"source":{"system":"sec-edgar","filing":"0001285550-23-000059","document":"wf-form4_168512457667509.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000128555023000059/wf-form4_168512457667509.xml","form_type":"4"}},{"id":1878498,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-05-25T20:09:29.000Z","date":"2023-05-25","kind":"sale","planned":false,"acquired":false,"shares":1881,"price":152.2,"value":286288.2,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $152.20 to $152.21, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 25, 2023, 20,121 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":36053,"source":{"system":"sec-edgar","filing":"0001209191-23-032147","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123032147/doc4.xml","form_type":"4"}},{"id":1887214,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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forfeiture."}],"balance_after":37934,"source":{"system":"sec-edgar","filing":"0001209191-23-030583","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030583/doc4.xml","form_type":"4"}},{"id":1887213,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-05-18T20:03:45.000Z","date":"2023-05-17","kind":"tax_withholding","planned":false,"acquired":false,"shares":872,"price":137.69,"value":120065.68,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2023, 20,121 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":40344,"source":{"system":"sec-edgar","filing":"0001209191-23-030583","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030583/doc4.xml","form_type":"4"}},{"id":1887212,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-05-18T20:03:45.000Z","date":"2023-05-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":628,"price":129.92,"value":81589.76,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 22,086 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":41216,"source":{"system":"sec-edgar","filing":"0001209191-23-030583","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030583/doc4.xml","form_type":"4"}},{"id":1891936,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-05-16T22:35:28.000Z","date":"2023-05-16","kind":"sale","planned":false,"acquired":false,"shares":4120,"price":129.84,"value":534940.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $129.65 to $130.15, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this sale on May 16, 2023, 23,502 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":41844,"source":{"system":"sec-edgar","filing":"0001209191-23-029944","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029944/doc4.xml","form_type":"4"}},{"id":1891935,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-05-16T22:35:28.000Z","date":"2023-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":1209,"price":127.99,"value":154739.91,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2023, 23,502 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":45964,"source":{"system":"sec-edgar","filing":"0001209191-23-029944","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029944/doc4.xml","form_type":"4"}},{"id":1891934,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-05-16T22:35:28.000Z","date":"2023-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":1263,"price":127.99,"value":161651.37,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2023, 26,226 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":47173,"source":{"system":"sec-edgar","filing":"0001209191-23-029944","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029944/doc4.xml","form_type":"4"}},{"id":1891933,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-05-16T22:35:28.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":2700,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment,50% of the earned shares will vest on  February 28, 2024 and 50% of the earned shares will vest on February 28, 2025. Unearned restricted stock units will forfeit on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2023, 29,073 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":48436,"source":{"system":"sec-edgar","filing":"0001209191-23-029944","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029944/doc4.xml","form_type":"4"}},{"id":1891932,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-05-16T22:35:28.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":2700,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2024, May 15, 2025, May 15, 2026 and May 15, 2027."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2023, 26,373 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":45736,"source":{"system":"sec-edgar","filing":"0001209191-23-029944","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029944/doc4.xml","form_type":"4"}},{"id":1984299,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-03-01T21:13:00.000Z","date":"2023-02-28","kind":"tax_withholding","acquired":false,"shares":3823,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 23,673 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":43036,"source":{"system":"sec-edgar","filing":"0001209191-23-014084","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123014084/doc4.xml","form_type":"4"}},{"id":1984298,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-03-01T21:13:00.000Z","date":"2023-02-28","kind":"tax_withholding","acquired":false,"shares":1772,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 27,496 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 3,823 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023."}],"balance_after":44449,"source":{"system":"sec-edgar","filing":"0001209191-23-014084","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123014084/doc4.xml","form_type":"4"}},{"id":2020361,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2023-02-13T21:27:15.000Z","date":"2023-02-13","kind":"sale","acquired":false,"shares":3531,"price":127.67,"value":450802.77,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.58 to $127.80, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 13, 2023, 31,406 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":44239,"source":{"system":"sec-edgar","filing":"0001209191-23-008720","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123008720/doc4.xml","form_type":"4"}},{"id":2116602,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-11-15T21:43:43.000Z","date":"2022-11-15","kind":"sale","acquired":false,"shares":3563,"price":79,"value":281477.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 15, 2022, 31,406 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":47770,"source":{"system":"sec-edgar","filing":"0001209191-22-057010","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122057010/doc4.xml","form_type":"4"}},{"id":2187236,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-08-12T20:14:49.000Z","date":"2022-08-12","kind":"sale","acquired":false,"shares":3787,"price":75.5,"value":285918.5,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $75.50 to $75.53, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 12, 2022, 31,406 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":51333,"source":{"system":"sec-edgar","filing":"0001209191-22-045592","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122045592/doc4.xml","form_type":"4"}},{"id":2253075,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, 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Stock","underlying_shares":6179},"source":{"system":"sec-edgar","filing":"0001420506-22-001131","document":"doc4_1007.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000142050622001131/doc4_1007.xml","form_type":"4"}},{"id":2253074,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-27T20:19:12.000Z","date":"2022-05-25","kind":"grant","acquired":false,"shares":9269,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The shares are restricted stock and will vest in full on the earlier of (i) the first anniversary of the grant date, or (ii) the day immediately preceding the Company's 2023 annual meeting of stockholders."}],"balance_after":12855,"source":{"system":"sec-edgar","filing":"0001420506-22-001131","document":"doc4_1007.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000142050622001131/doc4_1007.xml","form_type":"4"}},{"id":2266169,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-05-18T21:00:11.000Z","date":"2022-05-17","kind":"tax_withholding","acquired":false,"shares":872,"price":60.56,"value":52808.32,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2022, 31,406 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":55120,"source":{"system":"sec-edgar","filing":"0001209191-22-030106","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030106/doc4.xml","form_type":"4"}},{"id":2266168,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-05-18T21:00:11.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":5664,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F8","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024.  Unearned restricted stock units will forfeit on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this second grant on May 16, 2022, 33,370 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":55992,"source":{"system":"sec-edgar","filing":"0001209191-22-030106","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030106/doc4.xml","form_type":"4"}},{"id":2266167,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-05-18T21:00:11.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":5664,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this first grant on May 16, 2022, 27,706 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":50328,"source":{"system":"sec-edgar","filing":"0001209191-22-030106","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030106/doc4.xml","form_type":"4"}},{"id":2266166,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-05-18T21:00:11.000Z","date":"2022-05-16","kind":"tax_withholding","acquired":false,"shares":842,"price":56.38,"value":47471.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 22,042 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":44664,"source":{"system":"sec-edgar","filing":"0001209191-22-030106","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030106/doc4.xml","form_type":"4"}},{"id":2266165,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-05-18T21:00:11.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":1208,"price":56.38,"value":68107.04,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 23,940 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":45506,"source":{"system":"sec-edgar","filing":"0001209191-22-030106","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030106/doc4.xml","form_type":"4"}},{"id":2266164,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-05-18T21:00:11.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":1263,"price":56.38,"value":71207.94,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 26,663 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":46714,"source":{"system":"sec-edgar","filing":"0001209191-22-030106","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030106/doc4.xml","form_type":"4"}},{"id":2328391,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-03-17T20:11:09.000Z","date":"2022-03-17","kind":"sale","acquired":false,"shares":3249,"price":71.85,"value":233440.65,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of March 17, 2022, 29,509 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":47977,"source":{"system":"sec-edgar","filing":"0001209191-22-019555","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122019555/doc4.xml","form_type":"4"}},{"id":2361756,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-03-02T22:02:50.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":2547,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 29,509 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":51225,"source":{"system":"sec-edgar","filing":"0001209191-22-014853","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014853/doc4.xml","form_type":"4"}},{"id":2361755,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2022-03-02T22:02:50.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":2307,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 35,402 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,893 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022."}],"balance_after":53772,"source":{"system":"sec-edgar","filing":"0001209191-22-014853","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014853/doc4.xml","form_type":"4"}},{"id":2521701,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2021-11-08T22:29:27.000Z","date":"2021-11-08","kind":"sale","acquired":false,"shares":6329,"price":62.27,"value":394106.83,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $61.84 to $62.62, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 8, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":52151,"source":{"system":"sec-edgar","filing":"0001209191-21-063422","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121063422/doc4.xml","form_type":"4"}},{"id":2588674,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2021-08-27T20:20:58.000Z","date":"2021-08-27","kind":"sale","acquired":false,"shares":6252,"price":50.58,"value":316226.16,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $50.50 to $50.76, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 27, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":58480,"source":{"system":"sec-edgar","filing":"0001209191-21-053619","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121053619/doc4.xml","form_type":"4"}},{"id":2610351,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2021-08-09T20:25:33.000Z","date":"2021-08-09","kind":"sale","acquired":false,"shares":4978,"price":44,"value":219032.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of August 9, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64732,"source":{"system":"sec-edgar","filing":"0001209191-21-050403","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121050403/doc4.xml","form_type":"4"}},{"id":2631855,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Stock Options (right to buy)","published_at":"2021-07-16T11:35:26.000Z","date":"2021-07-15","kind":"grant","acquired":true,"shares":7172,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"The shares subject to this option will vest in full on the first anniversary of the grant date."}],"balance_after":7172,"derivative":{"exercise_price":16.73,"expiration_date":"2031-07-15","underlying":"Common Stock","underlying_shares":7172},"source":{"system":"sec-edgar","filing":"0001420506-21-000894","document":"doc4_951.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000142050621000894/doc4_951.xml","form_type":"4"}},{"id":2631854,"issuer":{"id":2367,"kind":"organization","name":"ClearPoint Neuro, Inc.","symbol":"CLPT"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-07-16T11:35:26.000Z","date":"2021-07-15","kind":"grant","acquired":true,"shares":3586,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The shares are restricted stock and will vest in full on the first anniversary of the grant date."}],"balance_after":3586,"source":{"system":"sec-edgar","filing":"0001420506-21-000894","document":"doc4_951.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1285550/000142050621000894/doc4_951.xml","form_type":"4"}},{"id":2708611,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2021-05-18T21:32:52.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":7857,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023.  Unearned restricted stock units will forfeit on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this second grant on May 17, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":69710,"source":{"system":"sec-edgar","filing":"0001209191-21-033621","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033621/doc4.xml","form_type":"4"}},{"id":2708610,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2021-05-18T21:32:52.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":7857,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F7","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first grant on May 17, 2021, 29,064 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":61853,"source":{"system":"sec-edgar","filing":"0001209191-21-033621","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033621/doc4.xml","form_type":"4"}},{"id":2708609,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE 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executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":53996,"source":{"system":"sec-edgar","filing":"0001209191-21-033621","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033621/doc4.xml","form_type":"4"}},{"id":2708608,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common 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of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 25,292 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":55809,"source":{"system":"sec-edgar","filing":"0001209191-21-033621","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033621/doc4.xml","form_type":"4"}},{"id":2708606,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS 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the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 28,016 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":57018,"source":{"system":"sec-edgar","filing":"0001209191-21-033621","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033621/doc4.xml","form_type":"4"}},{"id":2792453,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common 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The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of March 11, 2021, 30,862 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":58281,"source":{"system":"sec-edgar","filing":"0001209191-21-020177","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121020177/doc4.xml","form_type":"4"}},{"id":2821445,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2021-03-02T22:20:56.000Z","date":"2021-02-28","kind":"tax_withholding","acquired":false,"shares":2198,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020.  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the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 16, 2020, 44,189 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":83611,"source":{"system":"sec-edgar","filing":"0001209191-20-030572","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030572/doc4.xml","form_type":"4"}},{"id":3143324,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-05-19T21:08:28.000Z","date":"2020-05-16","kind":"tax_withholding","acquired":false,"shares":1404,"price":23.95,"value":33625.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 16, 2020, 46,046 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":84169,"source":{"system":"sec-edgar","filing":"0001209191-20-030572","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030572/doc4.xml","form_type":"4"}},{"id":3143323,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-05-19T21:08:28.000Z","date":"2020-05-15","kind":"tax_withholding","acquired":false,"shares":837,"price":23.52,"value":19686.24,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 50,859 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":85573,"source":{"system":"sec-edgar","filing":"0001209191-20-030572","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030572/doc4.xml","form_type":"4"}},{"id":3143322,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-05-19T21:08:28.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":10894,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and February 28, 2022.  Unearned restricted stock units will forfeit on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2020, 53,705 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":86410,"source":{"system":"sec-edgar","filing":"0001209191-20-030572","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030572/doc4.xml","form_type":"4"}},{"id":3143321,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-05-19T21:08:28.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":10894,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2021, May 15, 2022, May 15, 2023 and May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2020, 42,811 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":75516,"source":{"system":"sec-edgar","filing":"0001209191-20-030572","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030572/doc4.xml","form_type":"4"}},{"id":3238756,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-03-02T21:27:47.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":2129,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2021, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 31,917 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":64622,"source":{"system":"sec-edgar","filing":"0001209191-20-014460","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014460/doc4.xml","form_type":"4"}},{"id":3238755,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-03-02T21:27:47.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":1420,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the remainder of performance based restricted stock units granted to the executive in May 2018.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 5, 2019, and half of the earned shares vested on February 28, 2019. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of the 2018 performance based restricted stock units, 37,609 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,692 shares issuable under the executive's 2019 performance based restricted stock units, which also vested on February 28, 2020."}],"balance_after":66751,"source":{"system":"sec-edgar","filing":"0001209191-20-014460","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014460/doc4.xml","form_type":"4"}},{"id":3260015,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Stock Option (right to buy)","published_at":"2020-02-20T22:40:02.000Z","date":"2020-02-20","kind":"exercise","acquired":false,"shares":19500,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":7.2,"exercise_date":"2018-07-15","expiration_date":"2021-07-15","underlying":"Common Stock","underlying_shares":19500},"source":{"system":"sec-edgar","filing":"0001209191-20-011225","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120011225/doc4.xml","form_type":"4"}},{"id":3260014,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-02-20T22:40:02.000Z","date":"2020-02-20","kind":"sale","acquired":false,"shares":19500,"price":28.25,"value":550875.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $28.22 to $28.45, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 19, 2020, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":68171,"source":{"system":"sec-edgar","filing":"0001209191-20-011225","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120011225/doc4.xml","form_type":"4"}},{"id":3260013,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-02-20T22:40:02.000Z","date":"2020-02-20","kind":"exercise","acquired":true,"shares":19500,"price":7.2,"value":140400.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 19, 2020, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":87671,"source":{"system":"sec-edgar","filing":"0001209191-20-011225","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120011225/doc4.xml","form_type":"4"}},{"id":3260012,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2020-02-20T22:40:02.000Z","date":"2020-02-19","kind":"sale","acquired":false,"shares":5900,"price":27.88,"value":164492.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $27.85 to $27.96, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 19, 2020, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":68171,"source":{"system":"sec-edgar","filing":"0001209191-20-011225","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120011225/doc4.xml","form_type":"4"}},{"id":3342431,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Stock Option (right to buy)","published_at":"2019-12-13T21:20:17.000Z","date":"2019-12-10","kind":"exercise","acquired":false,"shares":18000,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":19500,"derivative":{"exercise_price":7.2,"exercise_date":"2018-07-15","expiration_date":"2021-07-15","underlying":"Common Stock","underlying_shares":18000},"source":{"system":"sec-edgar","filing":"0001209191-19-060376","document":"doc4a.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119060376/doc4a.xml","form_type":"4/A","original_submission_date":"2019-12-10"}},{"id":3342430,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-12-13T21:20:17.000Z","date":"2019-12-10","kind":"sale","acquired":false,"shares":18000,"price":22.8,"value":410400.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $22.76 to $22.89, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of December 10, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":84071,"source":{"system":"sec-edgar","filing":"0001209191-19-060376","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119060376/doc4a.xml","form_type":"4/A","original_submission_date":"2019-12-10"}},{"id":3342429,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-12-13T21:20:17.000Z","date":"2019-12-10","kind":"exercise","acquired":true,"shares":18000,"price":7.2,"value":129600.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of December 10, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":102071,"source":{"system":"sec-edgar","filing":"0001209191-19-060376","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119060376/doc4a.xml","form_type":"4/A","original_submission_date":"2019-12-10"}},{"id":3342466,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-12-13T21:07:27.000Z","date":"2019-12-13","kind":"sale","acquired":false,"shares":10000,"price":23.27,"value":232700.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $23.23 to $23.38, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of December 13, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":74071,"source":{"system":"sec-edgar","filing":"0001209191-19-060351","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119060351/doc4.xml","form_type":"4"}},{"id":3346801,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Stock Option (right to buy)","published_at":"2019-12-10T21:24:32.000Z","date":"2019-12-10","kind":"exercise","acquired":false,"shares":18000,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":19500,"derivative":{"exercise_price":7.2,"exercise_date":"2018-07-15","expiration_date":"2021-07-15","underlying":"Common Stock","underlying_shares":18000},"source":{"system":"sec-edgar","filing":"0001209191-19-059854","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119059854/doc4.xml","form_type":"4"}},{"id":3346800,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-12-10T21:24:32.000Z","date":"2019-12-10","kind":"sale","acquired":false,"shares":18000,"price":22.8,"value":410400.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $22.76 to $22.89, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of December 10, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":89071,"source":{"system":"sec-edgar","filing":"0001209191-19-059854","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119059854/doc4.xml","form_type":"4"}},{"id":3346799,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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forfeiture."}],"balance_after":102071,"source":{"system":"sec-edgar","filing":"0001209191-19-059854","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119059854/doc4.xml","form_type":"4"}},{"id":3521620,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:21.000Z","date":"2019-05-17","kind":"tax_withholding","acquired":false,"shares":819,"price":16.5,"value":13513.5,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held as of May 17, 2019, 41,404 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":84071,"source":{"system":"sec-edgar","filing":"0001209191-19-030930","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030930/doc4.xml","form_type":"4"}},{"id":3521619,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:21.000Z","date":"2019-05-16","kind":"tax_withholding","acquired":false,"shares":710,"price":16.95,"value":12034.5,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2019, 43,592 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":84890,"source":{"system":"sec-edgar","filing":"0001209191-19-030930","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030930/doc4.xml","form_type":"4"}},{"id":3521618,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:21.000Z","date":"2019-05-16","kind":"tax_withholding","acquired":false,"shares":1786,"price":16.95,"value":30272.7,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2019, 43,592 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":85600,"source":{"system":"sec-edgar","filing":"0001209191-19-030930","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030930/doc4.xml","form_type":"4"}},{"id":3521617,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:21.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":11385,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held as of May 15, 2019, 50,262 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":87386,"source":{"system":"sec-edgar","filing":"0001209191-19-030930","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030930/doc4.xml","form_type":"4"}},{"id":3521616,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-05-17T20:25:21.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":11385,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2019, 38,877 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":76001,"source":{"system":"sec-edgar","filing":"0001209191-19-030930","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030930/doc4.xml","form_type":"4"}},{"id":3623643,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":44169,"kind":"person","name":"FALLON LYNNETTE C","position":1,"cik":"0001195654","reported_name":"FALLON LYNNETTE C","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive VP, HR/Legal"}}],"security":"Common Stock","published_at":"2019-03-01T21:10:23.000Z","date":"2019-02-28","kind":"tax_withholding","acquired":false,"shares":1027,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"On February 5, 2019, the Axcelis Technologies, Inc. Compensation Committee determined that restricted stock units with performance vesting terms granted in May 2018 had been earned as to 100% of the units. In accordance with the terms of these grants, on February 28, 2019, 50% of the earned shares vested. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2019, 27,492 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":64616,"source":{"system":"sec-edgar","filing":"0001209191-19-014943","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119014943/doc4.xml","form_type":"4"}}],"next_cursor":"2019-03-01T21:10:23.000000Z,3623643"}