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The shares issued to the reporting person on the vesting were reduced by a number of shares having a value equal to the reporting person's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on May 16, 2026, 4,582 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":8360,"source":{"system":"sec-edgar","filing":"0002124265-26-000008","document":"form4-05202026_050508.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212426526000008/form4-05202026_050508.xml","form_type":"4"}},{"id":772889,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":43601,"kind":"person","name":"Sutton Todd","position":1,"cik":"0002124265","reported_name":"Sutton Todd","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"VP Corporate Controller"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:18.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":103,"price":155.18,"value":15983.54,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the reporting person in May 2023. The shares issued to the reporting person on the vesting were reduced by a number of shares having a value equal to the reporting person's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this vesting event on May 15, 2026, 5,207 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":8544,"source":{"system":"sec-edgar","filing":"0002124265-26-000006","document":"form4-05192026_050513.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212426526000006/form4-05192026_050513.xml","form_type":"4"}},{"id":772888,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":43601,"kind":"person","name":"Sutton Todd","position":1,"cik":"0002124265","reported_name":"Sutton Todd","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"VP Corporate Controller"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:18.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":112,"price":155.18,"value":17380.16,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F6","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the reporting person in May 2024. The shares issued to the reporting person on the vesting were reduced by a number of shares having a value equal to the reporting person's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this vesting event on May 15, 2026, 5,557 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":8647,"source":{"system":"sec-edgar","filing":"0002124265-26-000006","document":"form4-05192026_050513.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212426526000006/form4-05192026_050513.xml","form_type":"4"}},{"id":772887,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":43601,"kind":"person","name":"Sutton Todd","position":1,"cik":"0002124265","reported_name":"Sutton Todd","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"VP Corporate Controller"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:18.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":226,"price":155.18,"value":35070.68,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F3","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the reporting person in May 2025. The shares issued to the reporting person on the vesting were reduced by a number of shares having a value equal to the reporting person's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this vesting event on May 15, 2026, 5,937 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":8759,"source":{"system":"sec-edgar","filing":"0002124265-26-000006","document":"form4-05192026_050513.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212426526000006/form4-05192026_050513.xml","form_type":"4"}},{"id":772886,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":43601,"kind":"person","name":"Sutton Todd","position":1,"cik":"0002124265","reported_name":"Sutton Todd","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"VP Corporate Controller"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:18.000Z","date":"2026-05-15","kind":"grant","planned":false,"acquired":true,"shares":1168,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held following this grant on May 15, 2026, 6,706 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":8985,"source":{"system":"sec-edgar","filing":"0002124265-26-000006","document":"form4-05192026_050513.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212426526000006/form4-05192026_050513.xml","form_type":"4"}},{"id":777534,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":43601,"kind":"person","name":"Sutton Todd","position":1,"cik":"0002124265","reported_name":"Sutton Todd","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"VP Corporate Controller"}}],"security":"Common Stock","published_at":"2026-05-15T21:05:08.000Z","date":"2026-05-14","kind":"sale","planned":false,"acquired":false,"shares":2574,"price":163.8946,"value":421864.7004,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $163.8067 to $164.1301, inclusive. The reporting person undertakes to provide to the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this sale on May 14, 2026, 5,538 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":7817,"source":{"system":"sec-edgar","filing":"0002124265-26-000004","document":"form4-05152026_050503.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212426526000004/form4-05152026_050503.xml","form_type":"4"}}]}