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(the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F5","text":"This option is fully vested."}],"balance_after":10564,"derivative":{"exercise_price":77.55,"expiration_date":"2031-12-06","underlying":"Common Stock","underlying_shares":10564},"source":{"system":"sec-edgar","filing":"0001209191-22-041708","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":7,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120919122041708/doc4.xml","form_type":"4"}},{"id":2210385,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"See Remarks"}}],"security":"Employee Stock Option (Right to Buy)","published_at":"2022-07-08T22:22:06.000Z","date":"2022-07-06","kind":"grant","acquired":true,"shares":12667,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F5","text":"This option is fully vested."}],"balance_after":12667,"derivative":{"exercise_price":79.97,"expiration_date":"2030-12-03","underlying":"Common Stock","underlying_shares":12667},"source":{"system":"sec-edgar","filing":"0001209191-22-041708","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120919122041708/doc4.xml","form_type":"4"}},{"id":2210384,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"See Remarks"}}],"security":"Employee Stock Option (Right to Buy)","published_at":"2022-07-08T22:22:06.000Z","date":"2022-07-06","kind":"grant","acquired":true,"shares":12656,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F5","text":"This option is fully vested."}],"balance_after":12656,"derivative":{"exercise_price":70.03,"expiration_date":"2029-12-05","underlying":"Common Stock","underlying_shares":12656},"source":{"system":"sec-edgar","filing":"0001209191-22-041708","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120919122041708/doc4.xml","form_type":"4"}},{"id":2210383,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"See Remarks"}}],"security":"Employee Stock Option (Right to Buy)","published_at":"2022-07-08T22:22:06.000Z","date":"2022-07-06","kind":"grant","acquired":true,"shares":17674,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F5","text":"This option is fully vested."}],"balance_after":17674,"derivative":{"exercise_price":55.88,"expiration_date":"2028-12-06","underlying":"Common Stock","underlying_shares":17674},"source":{"system":"sec-edgar","filing":"0001209191-22-041708","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120919122041708/doc4.xml","form_type":"4"}},{"id":2210382,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"See Remarks"}}],"security":"Employee Stock Option (Right to Buy)","published_at":"2022-07-08T22:22:06.000Z","date":"2022-07-06","kind":"grant","acquired":true,"shares":17477,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F5","text":"This option is fully vested."}],"balance_after":17477,"derivative":{"exercise_price":50.85,"expiration_date":"2027-12-05","underlying":"Common Stock","underlying_shares":17477},"source":{"system":"sec-edgar","filing":"0001209191-22-041708","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120919122041708/doc4.xml","form_type":"4"}},{"id":2210381,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"See Remarks"}}],"security":"Common Stock","published_at":"2022-07-08T22:22:06.000Z","date":"2022-07-06","kind":"grant","acquired":true,"shares":26024,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F3","text":"These shares are restricted stock units with restrictions that lapse over a four-year period with respect to 25% of these shares per year, beginning August 15, 2023 and thereafter on August 15, 2024, August 15, 2025 and August 15, 2026."},{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee."}],"balance_after":42404,"source":{"system":"sec-edgar","filing":"0001209191-22-041708","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120919122041708/doc4.xml","form_type":"4"}},{"id":2210380,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"See Remarks"}}],"security":"Common Stock","published_at":"2022-07-08T22:22:06.000Z","date":"2022-07-06","kind":"grant","acquired":true,"shares":16380,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."},{"field":"shares","element":"transactionShares","label":"F2","text":"Includes 14,827 restricted stock units, payable solely in Common Stock, with restrictions that lapse as follows: (i) 4,442 vest on September 30, 2022, (ii) 4,865 vest on September 30, 2023, and (iii) 5,520 vest on September 30, 2024."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock, and (c) CMC performance stock units and stock options held by the reporting person were replaced by Issuer restricted stock units and stock options, respectively. The Merger closed on July 6, 2022."}],"balance_after":16380,"source":{"system":"sec-edgar","filing":"0001209191-22-041708","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120919122041708/doc4.xml","form_type":"4"}},{"id":2212499,"issuer":{"id":125533,"kind":"organization","name":"CMC Materials, Inc.","symbol":"CCMP"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"officer":true,"officer_title":"VP & President of EC"}}],"security":"Stock Options (Right to Buy)","published_at":"2022-07-06T15:42:53.000Z","date":"2022-07-06","kind":"disposition_to_issuer","acquired":false,"shares":5803,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"Pursuant to the Merger Agreement, at the effective time of the Merger, each outstanding option to purchase shares of Issuer common stock (an \"Issuer Option\") vested in full and was assumed and converted into an option to purchase shares of Entegris common stock (an \"Entegris Option\"), as adjusted based on the Equity Award Exchange Ratio (as defined in the Merger Agreement)."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F8","text":"This Issuer Option, which originally provided for vesting in four equal annual installments beginning on 12/6/2022, vested in full and was assumed and converted into an Entegris Option to purchase 10,564 shares of Entegris common stock an exercise price of $77.55 per share."}],"balance_after":0,"derivative":{"exercise_price":141.18,"exercise_date":"2022-12-06","expiration_date":"2031-12-06","underlying":"Common Stock","underlying_shares":5803},"source":{"system":"sec-edgar","filing":"0001127602-22-018919","document":"form4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":8,"url":"https://www.sec.gov/Archives/edgar/data/1102934/000112760222018919/form4.xml","form_type":"4"}},{"id":2212498,"issuer":{"id":125533,"kind":"organization","name":"CMC Materials, Inc.","symbol":"CCMP"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"officer":true,"officer_title":"VP & President of EC"}}],"security":"Stock Options (Right to Buy)","published_at":"2022-07-06T15:42:53.000Z","date":"2022-07-06","kind":"disposition_to_issuer","acquired":false,"shares":6958,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"Pursuant to the Merger Agreement, at the effective time of the Merger, each outstanding option to purchase shares of Issuer common stock (an \"Issuer Option\") vested in full and was assumed and converted into an option to purchase shares of Entegris common stock (an \"Entegris Option\"), as adjusted based on the Equity Award Exchange Ratio (as defined in the Merger Agreement)."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F7","text":"This Issuer Option, which originally provided for vesting in four equal annual installments beginning on 12/3/2021, vested in full and was assumed and converted into an Entegris Option to purchase 12,667 shares of Entegris common stock an exercise price of $79.97 per share."}],"balance_after":0,"derivative":{"exercise_price":145.58,"exercise_date":"2021-12-03","expiration_date":"2030-12-03","underlying":"Common Stock","underlying_shares":6958},"source":{"system":"sec-edgar","filing":"0001127602-22-018919","document":"form4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":7,"url":"https://www.sec.gov/Archives/edgar/data/1102934/000112760222018919/form4.xml","form_type":"4"}},{"id":2212497,"issuer":{"id":125533,"kind":"organization","name":"CMC Materials, Inc.","symbol":"CCMP"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"officer":true,"officer_title":"VP & President of EC"}}],"security":"Stock Options (Right to Buy)","published_at":"2022-07-06T15:42:53.000Z","date":"2022-07-06","kind":"disposition_to_issuer","acquired":false,"shares":6952,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"Pursuant to the Merger Agreement, at the effective time of the Merger, each outstanding option to purchase shares of Issuer common stock (an \"Issuer Option\") vested in full and was assumed and converted into an option to purchase shares of Entegris common stock (an \"Entegris Option\"), as adjusted based on the Equity Award Exchange Ratio (as defined in the Merger Agreement)."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F6","text":"This Issuer Option, which originally provided for vesting in four equal annual installments beginning on 12/5/2020, vested in full and was assumed and converted into an Entegris Option to purchase 12,656 shares of Entegris common stock an exercise price of $70.03 per share."}],"balance_after":0,"derivative":{"exercise_price":127.48,"exercise_date":"2020-12-05","expiration_date":"2029-12-05","underlying":"Common Stock","underlying_shares":6952},"source":{"system":"sec-edgar","filing":"0001127602-22-018919","document":"form4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1102934/000112760222018919/form4.xml","form_type":"4"}},{"id":2212496,"issuer":{"id":125533,"kind":"organization","name":"CMC Materials, Inc.","symbol":"CCMP"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"officer":true,"officer_title":"VP & President of EC"}}],"security":"Stock Options (Right to Buy)","published_at":"2022-07-06T15:42:53.000Z","date":"2022-07-06","kind":"disposition_to_issuer","acquired":false,"shares":9708,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"Pursuant to the Merger Agreement, at the effective time of the Merger, each outstanding option to purchase shares of Issuer common stock (an \"Issuer Option\") vested in full and was assumed and converted into an option to purchase shares of Entegris common stock (an \"Entegris Option\"), as adjusted based on the Equity Award Exchange Ratio (as defined in the Merger Agreement)."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F5","text":"This Issuer Option, which originally provided for vesting in four equal annual installments beginning on 12/6/2019, vested in full and was assumed and converted into an Entegris Option to purchase 17,674 shares of Entegris common stock an exercise price of $55.88 per share."}],"balance_after":0,"derivative":{"exercise_price":101.73,"exercise_date":"2019-12-06","expiration_date":"2028-12-06","underlying":"Common Stock","underlying_shares":9708},"source":{"system":"sec-edgar","filing":"0001127602-22-018919","document":"form4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1102934/000112760222018919/form4.xml","form_type":"4"}},{"id":2212495,"issuer":{"id":125533,"kind":"organization","name":"CMC Materials, Inc.","symbol":"CCMP"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"officer":true,"officer_title":"VP & President of EC"}}],"security":"Stock Options (Right to Buy)","published_at":"2022-07-06T15:42:53.000Z","date":"2022-07-06","kind":"disposition_to_issuer","acquired":false,"shares":9600,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"Pursuant to the Merger Agreement, at the effective time of the Merger, each outstanding option to purchase shares of Issuer common stock (an \"Issuer Option\") vested in full and was assumed and converted into an option to purchase shares of Entegris common stock (an \"Entegris Option\"), as adjusted based on the Equity Award Exchange Ratio (as defined in the Merger Agreement)."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F4","text":"This Issuer Option, which originally provided for vesting in four equal annual installments beginning on 12/5/2018, vested in full and was assumed and converted into an Entegris Option to purchase 17,477 shares of Entegris common stock an exercise price of $50.85 per share."}],"balance_after":0,"derivative":{"exercise_price":92.57,"exercise_date":"2018-12-05","expiration_date":"2027-12-05","underlying":"Common Stock","underlying_shares":9600},"source":{"system":"sec-edgar","filing":"0001127602-22-018919","document":"form4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1102934/000112760222018919/form4.xml","form_type":"4"}},{"id":2212494,"issuer":{"id":125533,"kind":"organization","name":"CMC Materials, Inc.","symbol":"CCMP"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"officer":true,"officer_title":"VP & President of EC"}}],"security":"Common Stock","published_at":"2022-07-06T15:42:53.000Z","date":"2022-07-06","kind":"disposition_to_issuer","acquired":false,"shares":14827,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Reflects the conversion of performance share units with respect to Issuer common stock (\"PSUs\") into time-based restricted stock units with respect to Entegris common stock (\"RSUs\") in accordance with the Merger Agreement.  Transaction represents the satisfaction of all performance vesting conditions at the target level of performance in connection with the Merger pursuant to the terms of the Merger Agreement. The RSUs remain subject to time-based vesting requirements and are convertible into shares of Entegris common stock on a one-for-one basis on the applicable vesting dates."}],"balance_after":0,"source":{"system":"sec-edgar","filing":"0001127602-22-018919","document":"form4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1102934/000112760222018919/form4.xml","form_type":"4"}},{"id":2212493,"issuer":{"id":125533,"kind":"organization","name":"CMC Materials, Inc.","symbol":"CCMP"},"owners":[{"id":41534,"kind":"person","name":"Woodland Daniel D.","position":1,"cik":"0001630039","reported_name":"Woodland Daniel D.","relationship":{"officer":true,"officer_title":"VP & President of EC"}}],"security":"Common Stock","published_at":"2022-07-06T15:42:53.000Z","date":"2022-07-06","kind":"grant","acquired":true,"shares":14827,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Reflects the conversion of performance share units with respect to Issuer common stock (\"PSUs\") into time-based restricted stock units with respect to Entegris common stock (\"RSUs\") in accordance with the Merger Agreement.  Transaction represents the satisfaction of all performance vesting conditions at the target level of performance in connection with the Merger pursuant to the terms of the Merger Agreement. 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