{"transactions":[{"id":743960,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-06-10T20:30:13.000Z","date":"2026-06-09","kind":"sale","planned":false,"acquired":false,"shares":10000,"price":65,"value":650000.0,"ownership":{"direct":true},"balance_after":85115.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000012","document":"form4-06102026_040601.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000012/form4-06102026_040601.xml","form_type":"4"}},{"id":762981,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-05-27T20:30:29.000Z","date":"2026-05-26","kind":"sale","planned":false,"acquired":false,"shares":5407,"price":61.84,"value":334368.88,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects average weighted sale price. Actual sale prices ranged from $61.82 to $61.87 per share. The reporting person undertakes to provide, upon the request of the SEC staff, the issuer or any security holder of the issuer, full information regarding the number of shares sold at each separate price."}],"balance_after":95115.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000010","document":"form4-05272026_040501.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000010/form4-05272026_040501.xml","form_type":"4"}},{"id":787960,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2026-05-08T20:40:07.000Z","date":"2026-03-10","kind":"exercise","planned":false,"acquired":true,"shares":32000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Each restricted stock unit represents a contingent right to receive one share of Veeco common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third\nanniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F3","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third\nanniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":40267,"derivative":{"underlying":"common stock","underlying_shares":32000},"source":{"system":"sec-edgar","filing":"0001811702-26-000008","document":"form4a-05082026_040501.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000008/form4a-05082026_040501.xml","form_type":"4/A","original_submission_date":"2026-03-10"}},{"id":830315,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-24T20:30:16.000Z","date":"2026-03-20","kind":"grant","planned":false,"acquired":true,"shares":373,"price":25.959,"value":9682.707,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F3","text":"Represents 373 shares purchased under the Veeco Employee Stock Purchase Plan on March 20, 2026."}],"balance_after":132522.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000006","document":"form4-03242026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000006/form4-03242026_040301.xml","form_type":"4"}},{"id":830314,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-24T20:30:16.000Z","date":"2026-03-20","kind":"tax_withholding","planned":false,"acquired":false,"shares":10144,"price":31,"value":314464.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":132149.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000006","document":"form4-03242026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000006/form4-03242026_040301.xml","form_type":"4"}},{"id":830313,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-24T20:30:16.000Z","date":"2026-03-20","kind":"exercise","planned":false,"acquired":true,"shares":26910,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On March 13, 2023, the reporting person was granted the contingent right to receive 15,600 performance-based restricted stock units (\"PRSUs\"). This contingent right was subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which was based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represented the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. The common stock award reflected in this filing represents achievement at the 172.5% level, which was realized."}],"balance_after":142293.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000006","document":"form4-03242026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000006/form4-03242026_040301.xml","form_type":"4"}},{"id":840402,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-16","kind":"exercise","planned":false,"acquired":false,"shares":2667,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.expiration_date","element":"expirationDate","label":"F1","text":"These restricted units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant.  Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":2667,"derivative":{"exercise_price":0,"exercise_date":"2026-03-14","underlying":"common stock","underlying_shares":2667},"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":9,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":840401,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-16","kind":"exercise","planned":false,"acquired":false,"shares":2800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.expiration_date","element":"expirationDate","label":"F1","text":"These restricted units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant.  Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":5600,"derivative":{"exercise_price":0,"exercise_date":"2026-03-14","underlying":"common stock","underlying_shares":2800},"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":8,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":840400,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-13","kind":"exercise","planned":false,"acquired":false,"shares":2800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.expiration_date","element":"expirationDate","label":"F1","text":"These restricted units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant.  Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":0,"derivative":{"exercise_price":0,"exercise_date":"2026-03-13","underlying":"common stock","underlying_shares":2800},"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":7,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":840399,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":1010,"price":30.95,"value":31259.5,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding due upon the vesting of restricted stock."}],"balance_after":115383.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":840398,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-16","kind":"exercise","planned":false,"acquired":true,"shares":2800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These restricted units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant.  Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":116393.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":840397,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":983,"price":30.95,"value":30423.85,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding due upon the vesting of restricted stock."}],"balance_after":113593.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":840396,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-16","kind":"exercise","planned":false,"acquired":true,"shares":2667,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These restricted units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant.  Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":114576.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":840395,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-13","kind":"tax_withholding","planned":false,"acquired":false,"shares":1160,"price":31.46,"value":36493.6,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding due upon the vesting of restricted stock."}],"balance_after":111909.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":840394,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-17T20:55:05.000Z","date":"2026-03-13","kind":"exercise","planned":false,"acquired":true,"shares":2800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These restricted units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant.  Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":113069.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000004","document":"form4-03172026_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000004/form4-03172026_040301.xml","form_type":"4"}},{"id":847672,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2026-03-12T20:55:06.000Z","date":"2026-03-10","kind":"exercise","planned":false,"acquired":true,"shares":32000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These shares were acquired pursuant to a restricted stock award under the Veeco Instruments Inc. 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to one-third of such shares on each of the first, second and third anniversaries of the grant date, subject to the reporting person's continued service through such dates."}],"balance_after":110269.208,"source":{"system":"sec-edgar","filing":"0001811702-26-000002","document":"form4-03122026_040302.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170226000002/form4-03122026_040302.xml","form_type":"4"}},{"id":1026010,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-10-03T20:45:05.000Z","date":"2025-10-02","kind":"sale","planned":true,"acquired":false,"shares":3851,"price":34,"value":130934.0,"ownership":{"direct":true},"balance_after":78269.208,"source":{"system":"sec-edgar","filing":"0001811702-25-000007","document":"form4-10032025_041001.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170225000007/form4-10032025_041001.xml","form_type":"4"}},{"id":1033545,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-09-24T21:20:21.000Z","date":"2025-09-23","kind":"sale","planned":true,"acquired":false,"shares":4014,"price":30,"value":120420.0,"ownership":{"direct":true},"balance_after":82120.208,"source":{"system":"sec-edgar","filing":"0001811702-25-000005","document":"form4-09242025_090918.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170225000005/form4-09242025_090918.xml","form_type":"4"}},{"id":1039940,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-09-16T20:30:23.000Z","date":"2025-09-15","kind":"sale","planned":true,"acquired":false,"shares":4046,"price":26,"value":105196.0,"ownership":{"direct":true},"balance_after":86134.208,"source":{"system":"sec-edgar","filing":"0001811702-25-000003","document":"form4-09162025_040907.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000181170225000003/form4-09162025_040907.xml","form_type":"4"}},{"id":1097074,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-07-02T20:30:09.000Z","date":"2025-06-30","kind":"grant","planned":false,"acquired":true,"shares":925.926,"price":17.272,"value":15992.593872,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 925.926 shares purchased under the Veeco Employee Stock Purchase Plan on June 30, 2025."}],"balance_after":90180.208,"source":{"system":"sec-edgar","filing":"0001415889-25-019054","document":"form4-07022025_040701.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925019054/form4-07022025_040701.xml","form_type":"4"}},{"id":1119018,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-06-09T20:15:08.000Z","date":"2025-06-05","kind":"sale","planned":true,"acquired":false,"shares":11010,"price":20.5,"value":225705.0,"ownership":{"direct":true},"balance_after":89254.282,"source":{"system":"sec-edgar","filing":"0001415889-25-016233","document":"form4-06092025_040602.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925016233/form4-06092025_040602.xml","form_type":"4"}},{"id":1191750,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-03-26T20:15:07.000Z","date":"2025-03-24","kind":"tax_withholding","planned":false,"acquired":false,"shares":5173,"price":21.16,"value":109460.68,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":100264.282,"source":{"system":"sec-edgar","filing":"0001415889-25-009020","document":"form4-03262025_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925009020/form4-03262025_040301.xml","form_type":"4"}},{"id":1191749,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-03-26T20:15:07.000Z","date":"2025-03-24","kind":"exercise","planned":false,"acquired":true,"shares":14349,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On March 17, 2022, the reporting person was granted the contingent right to receive 16,250 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. The common stock award reflected in this filing represents achievement at the 88.3% level, which was realized."}],"balance_after":105437.282,"source":{"system":"sec-edgar","filing":"0001415889-25-009020","document":"form4-03262025_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925009020/form4-03262025_040301.xml","form_type":"4"}},{"id":1202610,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2025-03-18T20:20:05.000Z","date":"2025-03-14","kind":"exercise","planned":false,"acquired":false,"shares":2666,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.expiration_date","element":"expirationDate","label":"F1","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":5334,"derivative":{"exercise_price":0,"exercise_date":"2025-03-14","underlying":"common stock","underlying_shares":2666},"source":{"system":"sec-edgar","filing":"0001415889-25-008395","document":"form4-03182025_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008395/form4-03182025_040301.xml","form_type":"4"}},{"id":1202609,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Performance Based Restricted Stock Unit","published_at":"2025-03-18T20:20:05.000Z","date":"2025-03-14","kind":"grant","planned":false,"acquired":true,"shares":15600,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F3","text":"Each restricted stock unit represents a contingent right to receive one share of Veeco common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F4","text":"On March 14, 2024, the reporting person was granted the contingent right to receive 15,600 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F4","text":"On March 14, 2024, the reporting person was granted the contingent right to receive 15,600 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."}],"balance_after":15600,"derivative":{"underlying":"common stock","underlying_shares":15600},"source":{"system":"sec-edgar","filing":"0001415889-25-008395","document":"form4-03182025_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008395/form4-03182025_040301.xml","form_type":"4"}},{"id":1202608,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2025-03-18T20:20:05.000Z","date":"2025-03-14","kind":"grant","planned":false,"acquired":true,"shares":8400,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F3","text":"Each restricted stock unit represents a contingent right to receive one share of Veeco common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F1","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F1","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":8400,"derivative":{"underlying":"common stock","underlying_shares":8400},"source":{"system":"sec-edgar","filing":"0001415889-25-008395","document":"form4-03182025_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008395/form4-03182025_040301.xml","form_type":"4"}},{"id":1202607,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-03-18T20:20:05.000Z","date":"2025-03-17","kind":"tax_withholding","planned":false,"acquired":false,"shares":1050,"price":21.48,"value":22554.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":91088.282,"source":{"system":"sec-edgar","filing":"0001415889-25-008395","document":"form4-03182025_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008395/form4-03182025_040301.xml","form_type":"4"}},{"id":1202606,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-03-18T20:20:05.000Z","date":"2025-03-14","kind":"tax_withholding","planned":false,"acquired":false,"shares":1048,"price":21.3,"value":22322.4,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":92138.282,"source":{"system":"sec-edgar","filing":"0001415889-25-008395","document":"form4-03182025_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008395/form4-03182025_040301.xml","form_type":"4"}},{"id":1202605,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-03-18T20:20:05.000Z","date":"2025-03-14","kind":"exercise","planned":false,"acquired":true,"shares":2666,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":93186.282,"source":{"system":"sec-edgar","filing":"0001415889-25-008395","document":"form4-03182025_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008395/form4-03182025_040301.xml","form_type":"4"}},{"id":1207104,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2025-03-14T20:30:07.000Z","date":"2025-03-13","kind":"exercise","planned":false,"acquired":false,"shares":2800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.expiration_date","element":"expirationDate","label":"F1","text":"These shares were acquired pursuant to a restricted stock award under the Veeco Instruments Inc. 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to one-third of such shares on each of the first, second and third anniversaries of the grant date, subject to the reporting person's continued service through such dates."}],"balance_after":2800,"derivative":{"exercise_price":0,"exercise_date":"2025-03-13","underlying":"common stock","underlying_shares":2800},"source":{"system":"sec-edgar","filing":"0001415889-25-008102","document":"form4-03142025_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008102/form4-03142025_040301.xml","form_type":"4"}},{"id":1207103,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-03-14T20:30:07.000Z","date":"2025-03-13","kind":"tax_withholding","planned":false,"acquired":false,"shares":1161,"price":21.4,"value":24845.4,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":90520.282,"source":{"system":"sec-edgar","filing":"0001415889-25-008102","document":"form4-03142025_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008102/form4-03142025_040301.xml","form_type":"4"}},{"id":1207102,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-03-14T20:30:07.000Z","date":"2025-03-13","kind":"exercise","planned":false,"acquired":true,"shares":2800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These shares were acquired pursuant to a restricted stock award under the Veeco Instruments Inc. 2019 Stock Incentive Plan and are subject to certain restrictions.  These restrictions will lapse with respect to one-third of such shares on each of the first, second and third anniversaries of the grant date, subject to the reporting person's continued service through such dates."}],"balance_after":91681.282,"source":{"system":"sec-edgar","filing":"0001415889-25-008102","document":"form4-03142025_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925008102/form4-03142025_040301.xml","form_type":"4"}},{"id":1309321,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2025-01-07T21:30:08.000Z","date":"2024-12-31","kind":"grant","planned":false,"acquired":true,"shares":39.654,"price":22.78,"value":903.31812,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 39.654 shares purchased under the Veeco Employee Stock Purchase Plan on December 31, 2024."}],"balance_after":88841.282,"source":{"system":"sec-edgar","filing":"0001415889-25-001000","document":"form4-01072025_040101.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588925001000/form4-01072025_040101.xml","form_type":"4"}},{"id":1455695,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-07-12T20:20:05.000Z","date":"2024-06-28","kind":"grant","planned":false,"acquired":true,"shares":757.677,"price":25.959,"value":19668.537243,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 757.677 shares purchased under the Veeco Employee Stock Purchase Plan on June 28, 2024."}],"balance_after":88841.628,"source":{"system":"sec-edgar","filing":"0001415889-24-019520","document":"form4-07122024_040701.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924019520/form4-07122024_040701.xml","form_type":"4"}},{"id":1566639,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-03-20T20:25:09.000Z","date":"2024-03-19","kind":"tax_withholding","planned":false,"acquired":false,"shares":17142,"price":33.74,"value":578371.08,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":88083.951,"source":{"system":"sec-edgar","filing":"0001415889-24-008744","document":"form4-03202024_040302.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924008744/form4-03202024_040302.xml","form_type":"4"}},{"id":1566638,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-03-20T20:25:09.000Z","date":"2024-03-19","kind":"exercise","planned":false,"acquired":true,"shares":39000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"On March 21, 2021, the reporting person was granted the contingent right to receive 19,500 performance-based restricted stock units (\"PRSUs\"). This contingent right was subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which was based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represented the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. The common stock award reflected in this filing represents achievement at the 200% level, which was realized."}],"balance_after":105225.951,"source":{"system":"sec-edgar","filing":"0001415889-24-008744","document":"form4-03202024_040302.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924008744/form4-03202024_040302.xml","form_type":"4"}},{"id":1566637,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-03-20T20:25:09.000Z","date":"2024-03-18","kind":"tax_withholding","planned":false,"acquired":false,"shares":1052,"price":33.74,"value":35494.48,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":66225.951,"source":{"system":"sec-edgar","filing":"0001415889-24-008744","document":"form4-03202024_040302.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924008744/form4-03202024_040302.xml","form_type":"4"}},{"id":1573873,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Performance Based Restricted Stock Unit","published_at":"2024-03-18T20:40:16.000Z","date":"2024-03-14","kind":"grant","planned":false,"acquired":true,"shares":24000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F3","text":"On March 14, 2024, the reporting person was granted the contingent right to receive 24,000 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"On March 14, 2024, the reporting person was granted the contingent right to receive 24,000 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F3","text":"On March 14, 2024, the reporting person was granted the contingent right to receive 24,000 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."}],"balance_after":24000,"derivative":{"underlying":"common stock","underlying_shares":24000},"source":{"system":"sec-edgar","filing":"0001415889-24-008283","document":"form4-03182024_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924008283/form4-03182024_040301.xml","form_type":"4"}},{"id":1573872,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2024-03-18T20:40:16.000Z","date":"2024-03-14","kind":"grant","planned":false,"acquired":true,"shares":8000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F1","text":"Each restricted stock unit represents a contingent right to receive one share of Veeco common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":8000,"derivative":{"underlying":"common stock","underlying_shares":8000},"source":{"system":"sec-edgar","filing":"0001415889-24-008283","document":"form4-03182024_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924008283/form4-03182024_040301.xml","form_type":"4"}},{"id":1573871,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-03-18T20:40:16.000Z","date":"2024-03-14","kind":"sale","planned":false,"acquired":false,"shares":5000,"price":34.1,"value":170500.0,"ownership":{"direct":true},"balance_after":67277.951,"source":{"system":"sec-edgar","filing":"0001415889-24-008283","document":"form4-03182024_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924008283/form4-03182024_040301.xml","form_type":"4"}},{"id":1577814,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2024-03-14T20:45:13.000Z","date":"2024-03-13","kind":"exercise","planned":false,"acquired":false,"shares":2800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"These shares were acquired pursuant to a restricted stock award under the Veeco Instructions Inc. 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to one-third of such shares on each of the first, second and third anniversaries of the grant date, subject to the reporting person's continued service through such dates."}],"balance_after":5600,"derivative":{"exercise_price":0,"exercise_date":"2024-03-13","underlying":"common stock","underlying_shares":2800},"source":{"system":"sec-edgar","filing":"0001415889-24-007999","document":"form4-03142024_040304.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924007999/form4-03142024_040304.xml","form_type":"4"}},{"id":1577813,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-03-14T20:45:13.000Z","date":"2024-03-13","kind":"tax_withholding","planned":false,"acquired":false,"shares":1009,"price":35.1,"value":35415.9,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":72277.951,"source":{"system":"sec-edgar","filing":"0001415889-24-007999","document":"form4-03142024_040304.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924007999/form4-03142024_040304.xml","form_type":"4"}},{"id":1577812,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-03-14T20:45:13.000Z","date":"2024-03-13","kind":"exercise","planned":false,"acquired":true,"shares":2800,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"These shares were acquired pursuant to a restricted stock award under the Veeco Instructions Inc. 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to one-third of such shares on each of the first, second and third anniversaries of the grant date, subject to the reporting person's continued service through such dates."}],"balance_after":73286.951,"source":{"system":"sec-edgar","filing":"0001415889-24-007999","document":"form4-03142024_040304.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924007999/form4-03142024_040304.xml","form_type":"4"}},{"id":1577811,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-03-14T20:45:13.000Z","date":"2024-03-12","kind":"tax_withholding","planned":false,"acquired":false,"shares":1401,"price":34.71,"value":48628.71,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":70486.951,"source":{"system":"sec-edgar","filing":"0001415889-24-007999","document":"form4-03142024_040304.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924007999/form4-03142024_040304.xml","form_type":"4"}},{"id":1588210,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-03-08T22:00:07.000Z","date":"2024-03-06","kind":"sale","planned":false,"acquired":false,"shares":5000,"price":36.41,"value":182050.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects average weighted purchase price. Actual purchase prices ranged from $36.40 to $36.44 per share. The reporting person undertakes to provide, upon the request of the SEC staff, the issuer or any security holder of the issuer, full information regarding the number of shares purchased at each separate price."}],"balance_after":71887.951,"source":{"system":"sec-edgar","filing":"0001415889-24-007377","document":"form4-03082024_050301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924007377/form4-03082024_050301.xml","form_type":"4"}},{"id":1690061,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2024-01-04T21:30:34.000Z","date":"2023-12-29","kind":"grant","planned":false,"acquired":true,"shares":94.844,"price":21.93,"value":2079.92892,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 94.844 shares purchased under the Veeco Employee Stock Purchase Plan on December 29, 2023."}],"balance_after":76887.951,"source":{"system":"sec-edgar","filing":"0001415889-24-000610","document":"form4-01042024_040123.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924000610/form4-01042024_040123.xml","form_type":"4"}},{"id":1808014,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2023-08-15T20:35:10.000Z","date":"2023-08-11","kind":"sale","planned":false,"acquired":false,"shares":4671,"price":30,"value":140130.0,"ownership":{"direct":true},"balance_after":76793.107,"source":{"system":"sec-edgar","filing":"0001415889-23-012265","document":"form4-08152023_040801.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923012265/form4-08152023_040801.xml","form_type":"4"}},{"id":1831317,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2023-07-12T20:25:06.000Z","date":"2023-06-30","kind":"grant","planned":false,"acquired":true,"shares":1222.346,"price":15.683,"value":19170.052318,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 1,222.346 shares purchased under the Veeco Employee Stock Purchase Plan on June 30, 2023."}],"balance_after":81464.107,"source":{"system":"sec-edgar","filing":"0001415889-23-011049","document":"form4-07122023_040701.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923011049/form4-07122023_040701.xml","form_type":"4"}},{"id":1938655,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2023-03-27T20:30:11.000Z","date":"2023-03-23","kind":"tax_withholding","planned":false,"acquired":false,"shares":14422,"price":20.77,"value":299544.94,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":80241.76,"source":{"system":"sec-edgar","filing":"0001415889-23-005439","document":"form4-03272023_040304.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923005439/form4-03272023_040304.xml","form_type":"4"}},{"id":1938654,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2023-03-27T20:30:11.000Z","date":"2023-03-23","kind":"exercise","planned":false,"acquired":true,"shares":37284,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On March 17, 2020, the reporting person was granted the contingent right to receive 19,500 performance-based restricted stock units (\"PRSUs\"). This contingent right was subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which was based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represented the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. The common stock award reflected in this filing represents achievement at the 191.2%, level, which was realized."}],"balance_after":94663.76,"source":{"system":"sec-edgar","filing":"0001415889-23-005439","document":"form4-03272023_040304.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923005439/form4-03272023_040304.xml","form_type":"4"}},{"id":1943945,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2023-03-21T20:26:09.000Z","date":"2023-03-17","kind":"tax_withholding","planned":false,"acquired":false,"shares":2314,"price":21.29,"value":49265.06,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":57379.76,"source":{"system":"sec-edgar","filing":"0001415889-23-005280","document":"form4-03212023_080301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923005280/form4-03212023_080301.xml","form_type":"4"}},{"id":1953095,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Performance Based Restricted Stock Unit","published_at":"2023-03-15T20:40:07.000Z","date":"2023-03-13","kind":"grant","acquired":true,"shares":15600,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F4","text":"On March 13, 2023, the reporting person was granted the contingent right to receive 15,600 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"shares","element":"transactionShares","label":"F4","text":"On March 13, 2023, the reporting person was granted the contingent right to receive 15,600 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F4","text":"On March 13, 2023, the reporting person was granted the contingent right to receive 15,600 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F4","text":"On March 13, 2023, the reporting person was granted the contingent right to receive 15,600 performance-based restricted stock units (\"PRSUs\"). This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\"). Each PRSU represents the contingent right to receive one share of Veeco common stock. The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria. If the Criteria are not achieved, the award will be forfeited. Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."}],"balance_after":15600,"derivative":{"underlying":"common stock","underlying_shares":15600},"source":{"system":"sec-edgar","filing":"0001415889-23-004952","document":"form4-03152023_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923004952/form4-03152023_040301.xml","form_type":"4"}},{"id":1953094,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Restricted Stock Unit","published_at":"2023-03-15T20:40:07.000Z","date":"2023-03-13","kind":"grant","acquired":true,"shares":8400,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Each restricted stock unit represents a contingent right to receive one share of Veeco common stock."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F3","text":"These restricted stock units (RSUs) were acquired pursuant to an award under the Veeco Instruments 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to 1/3 of such RSUs on each of the first, second and third anniversaries of the date of grant. Vested shares of Veeco common stock will be delivered to the reporting person on the vesting date."}],"balance_after":8400,"derivative":{"underlying":"common stock","underlying_shares":8400},"source":{"system":"sec-edgar","filing":"0001415889-23-004952","document":"form4-03152023_040301.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923004952/form4-03152023_040301.xml","form_type":"4"}},{"id":1953093,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2023-03-15T20:40:07.000Z","date":"2023-03-14","kind":"tax_withholding","acquired":false,"shares":1387,"price":20.51,"value":28447.37,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":59693.76,"source":{"system":"sec-edgar","filing":"0001415889-23-004952","document":"form4-03152023_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923004952/form4-03152023_040301.xml","form_type":"4"}},{"id":1953092,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2023-03-15T20:40:07.000Z","date":"2023-03-13","kind":"tax_withholding","acquired":false,"shares":1448,"price":20.82,"value":30147.36,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":61080.76,"source":{"system":"sec-edgar","filing":"0001415889-23-004952","document":"form4-03152023_040301.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923004952/form4-03152023_040301.xml","form_type":"4"}},{"id":2158032,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2022-09-16T20:34:51.000Z","date":"2022-09-14","kind":"tax_withholding","acquired":false,"shares":1940,"price":20.16,"value":39110.4,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":62528.76,"source":{"system":"sec-edgar","filing":"0001415889-22-009718","document":"form4-09162022_010941.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588922009718/form4-09162022_010941.xml","form_type":"4"}},{"id":2210377,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - PRODUCT LINE DEVELOPMENT"}}],"security":"Common Stock","published_at":"2022-07-08T20:07:21.000Z","date":"2022-06-30","kind":"grant","acquired":true,"shares":805.672,"price":16.49,"value":13285.53128,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 805.672 shares purchased under the Veeco Employee Stock Purchase Plan on June 30, 2022."}],"balance_after":64468.76,"source":{"system":"sec-edgar","filing":"0001415889-22-007556","document":"form4-07082022_010711.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588922007556/form4-07082022_010711.xml","form_type":"4"}},{"id":2320643,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2022-03-23T20:20:47.000Z","date":"2022-03-21","kind":"tax_withholding","acquired":false,"shares":3245,"price":29.18,"value":94689.1,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":63663.088,"source":{"system":"sec-edgar","filing":"0001179110-22-002391","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911022002391/edgar.xml","form_type":"4"}},{"id":2320642,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2022-03-23T20:20:47.000Z","date":"2022-03-21","kind":"exercise","acquired":true,"shares":9000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On March 14, 2019, the reporting person was granted the contingent right to receive 6,000 performance-based restricted stock units (\"PRSUs\").  This contingent right was subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which was based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represented the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  The common stock award reflected in this filing represents achievement at the 150% level, which was realized."}],"balance_after":66908.088,"source":{"system":"sec-edgar","filing":"0001179110-22-002391","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911022002391/edgar.xml","form_type":"4"}},{"id":2323751,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Restricted Stock Unit","published_at":"2022-03-21T20:21:14.000Z","date":"2022-03-17","kind":"grant","acquired":true,"shares":16250,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F3","text":"On March 17, 2022, the reporting person was granted the contingent right to receive 16,250 performance-based restricted stock units (\"PRSUs\").  This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represents the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  If the Criteria are not achieved, the award will be forfeited.  Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"On March 17, 2022, the reporting person was granted the contingent right to receive 16,250 performance-based restricted stock units (\"PRSUs\").  This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represents the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  If the Criteria are not achieved, the award will be forfeited.  Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F3","text":"On March 17, 2022, the reporting person was granted the contingent right to receive 16,250 performance-based restricted stock units (\"PRSUs\").  This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represents the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  If the Criteria are not achieved, the award will be forfeited.  Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"derivative.underlying_shares","element":"underlyingSecurityShares","label":"F3","text":"On March 17, 2022, the reporting person was granted the contingent right to receive 16,250 performance-based restricted stock units (\"PRSUs\").  This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represents the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  If the Criteria are not achieved, the award will be forfeited.  Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"On March 17, 2022, the reporting person was granted the contingent right to receive 16,250 performance-based restricted stock units (\"PRSUs\").  This contingent right is subject to the reporting person's continued service with the Company and the achievement of three-year performance criteria, which is based on the Company's total shareholder return relative to other companies in the Russell 2000 as specified in the award agreement (the \"Criteria\").  Each PRSU represents the contingent right to receive one share of Veeco common stock.  The award, if earned, could range from 50% to 200% of the granted PRSUs based on the achievement of the Criteria.  If the Criteria are not achieved, the award will be forfeited.  Subject to having been earned, vested shares will be delivered to the reporting person on the date specified in the award agreement, but in no case earlier than the third anniversary of the grant date."}],"balance_after":16250,"derivative":{"exercise_price":0,"underlying":"Common Stock","underlying_shares":16250},"source":{"system":"sec-edgar","filing":"0001179110-22-002341","document":"edgar.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911022002341/edgar.xml","form_type":"4"}},{"id":2323750,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2022-03-21T20:21:14.000Z","date":"2022-03-17","kind":"grant","acquired":true,"shares":8750,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"These shares were acquired pursuant to a restricted stock award under the Veeco Instructions Inc. 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to one-third of such shares on each of the first, second and third anniversaries of the grant date, subject to the reporting person's continued service through such dates."}],"balance_after":57908.088,"source":{"system":"sec-edgar","filing":"0001179110-22-002341","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911022002341/edgar.xml","form_type":"4"}},{"id":2323749,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2022-03-21T20:21:14.000Z","date":"2022-03-17","kind":"tax_withholding","acquired":false,"shares":1262,"price":28.79,"value":36332.98,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":49158.088,"source":{"system":"sec-edgar","filing":"0001179110-22-002341","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911022002341/edgar.xml","form_type":"4"}},{"id":2332218,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2022-03-16T20:14:14.000Z","date":"2022-03-14","kind":"tax_withholding","acquired":false,"shares":1901,"price":27.7,"value":52657.7,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":50420.088,"source":{"system":"sec-edgar","filing":"0001179110-22-002266","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911022002266/edgar.xml","form_type":"4"}},{"id":2446508,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2022-01-05T21:13:36.000Z","date":"2021-12-31","kind":"grant","acquired":true,"shares":249.237,"price":19.984,"value":4980.752208,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 249.237 shares purchased under the Veeco Employee Stock Purchase Plan on December 31, 2021."}],"balance_after":52321.088,"source":{"system":"sec-edgar","filing":"0001179110-22-000244","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911022000244/edgar.xml","form_type":"4"}},{"id":2568507,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-09-16T20:15:58.000Z","date":"2021-09-14","kind":"tax_withholding","acquired":false,"shares":1990,"price":22.64,"value":45053.6,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":52071.852,"source":{"system":"sec-edgar","filing":"0001179110-21-008803","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021008803/edgar.xml","form_type":"4"}},{"id":2580686,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-09-03T20:06:19.000Z","date":"2021-09-01","kind":"tax_withholding","acquired":false,"shares":505,"price":22.79,"value":11508.95,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":54061.852,"source":{"system":"sec-edgar","filing":"0001179110-21-008586","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021008586/edgar.xml","form_type":"4"}},{"id":2640247,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-07-07T20:46:36.000Z","date":"2021-06-30","kind":"grant","acquired":true,"shares":1077.719,"price":15.096,"value":16269.246024,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 1,077.719 shares purchased under the Veeco Employee Stock Purchase Plan on June 30, 2021."}],"balance_after":54566.852,"source":{"system":"sec-edgar","filing":"0001179110-21-007437","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021007437/edgar.xml","form_type":"4"}},{"id":2665234,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-06-18T00:14:32.000Z","date":"2021-06-16","kind":"tax_withholding","acquired":false,"shares":352,"price":25.17,"value":8859.84,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":53489.132,"source":{"system":"sec-edgar","filing":"0001179110-21-006850","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021006850/edgar.xml","form_type":"4"}},{"id":2725964,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-05-06T20:13:50.000Z","date":"2021-05-04","kind":"tax_withholding","acquired":false,"shares":620,"price":22.75,"value":14105.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":53841.132,"source":{"system":"sec-edgar","filing":"0001179110-21-004951","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021004951/edgar.xml","form_type":"4"}},{"id":2725963,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-05-06T20:13:50.000Z","date":"2021-05-04","kind":"grant","acquired":true,"shares":1822,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents the vesting of a portion of the PRSUs granted on March 14, 2018 based on partial achievement of the performance criteria specified in the award agreement. The performance period for this award ended March 31, 2021, and the vesting occurred on May 4, 2021, the date of the Company's filing of its first quarter 2021 10-Q report."}],"balance_after":54461.132,"source":{"system":"sec-edgar","filing":"0001179110-21-004951","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021004951/edgar.xml","form_type":"4"}},{"id":2778397,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-03-19T20:22:18.000Z","date":"2021-03-17","kind":"tax_withholding","acquired":false,"shares":1371,"price":21.59,"value":29599.89,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":52639.132,"source":{"system":"sec-edgar","filing":"0001179110-21-003625","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021003625/edgar.xml","form_type":"4"}},{"id":2788151,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-03-16T20:53:46.000Z","date":"2021-03-12","kind":"grant","acquired":true,"shares":10500,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These shares were acquired pursuant to a restricted stock award under the Veeco Instructions Inc. 2019 Stock Incentive Plan and are subject to certain restrictions. These restrictions will lapse with respect to one-third of such shares on each of the first, second and third anniversaries of the grant date, subject to the reporting person's continued service through such dates."}],"balance_after":54010.132,"source":{"system":"sec-edgar","filing":"0001179110-21-003481","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021003481/edgar.xml","form_type":"4"}},{"id":2918008,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2021-01-06T21:21:06.000Z","date":"2021-01-05","kind":"grant","acquired":true,"shares":288.916,"price":11.084,"value":3202.344944,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares purchased under the Veeco Employee Stock Purchase Plan on December 31, 2020."}],"balance_after":43510.132,"source":{"system":"sec-edgar","filing":"0001179110-21-000321","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021000321/edgar.xml","form_type":"4"}},{"id":3030829,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2020-09-16T20:14:52.000Z","date":"2020-09-14","kind":"tax_withholding","acquired":false,"shares":1773,"price":10.68,"value":18935.64,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":43221.2159,"source":{"system":"sec-edgar","filing":"0001179110-20-009823","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911020009823/edgar.xml","form_type":"4"}},{"id":3040355,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2020-09-03T20:21:26.000Z","date":"2020-09-01","kind":"tax_withholding","acquired":false,"shares":450,"price":11.89,"value":5350.5,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":44994.2159,"source":{"system":"sec-edgar","filing":"0001179110-20-009534","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911020009534/edgar.xml","form_type":"4"}},{"id":3094223,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2020-07-02T20:08:55.000Z","date":"2020-06-30","kind":"grant","acquired":true,"shares":1422.1392,"price":11.467,"value":16307.6702064,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents 1422.1392 shares purchased under the Veeco Employee Stock Purchase Plan on June 30, 2020."}],"balance_after":45444.2159,"source":{"system":"sec-edgar","filing":"0001179110-20-007946","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911020007946/edgar.xml","form_type":"4"}},{"id":3108122,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2020-06-17T20:14:00.000Z","date":"2020-06-16","kind":"tax_withholding","acquired":false,"shares":352,"price":12.74,"value":4484.48,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":44022.0767,"source":{"system":"sec-edgar","filing":"0001179110-20-007495","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911020007495/edgar.xml","form_type":"4"}},{"id":3108121,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":39873,"kind":"person","name":"Devasahayam Adrian","position":1,"cik":"0001811702","reported_name":"Devasahayam Adrian","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP - Product Line Development"}}],"security":"Common Stock","published_at":"2020-06-17T20:14:00.000Z","date":"2020-06-15","kind":"tax_withholding","acquired":false,"shares":906,"price":12.61,"value":11424.66,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents securities surrendered to Veeco to satisfy tax withholding obligations due upon the vesting of restricted stock."}],"balance_after":44374.0767,"source":{"system":"sec-edgar","filing":"0001179110-20-007495","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911020007495/edgar.xml","form_type":"4"}}]}