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These shares were sold in multiple transactions at prices ranging from $85.11 to $85.99, inclusive. 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These shares were sold in multiple transactions at prices ranging from $84.08 to $85.02, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":34706,"source":{"system":"sec-edgar","filing":"0001208109-23-000004","document":"wf-form4_167649522394652.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810923000004/wf-form4_167649522394652.xml","form_type":"4"}},{"id":2014606,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2023-02-15T21:07:19.000Z","date":"2023-02-14","kind":"sale","acquired":false,"shares":1100,"price":83.34,"value":91674.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on August 22, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F6","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $82.98 to $83.67, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":35506,"source":{"system":"sec-edgar","filing":"0001208109-23-000004","document":"wf-form4_167649522394652.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810923000004/wf-form4_167649522394652.xml","form_type":"4"}},{"id":2014605,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2023-02-15T21:07:19.000Z","date":"2023-02-14","kind":"sale","acquired":false,"shares":1017,"price":82.3,"value":83699.1,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on August 22, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $81.75 to $82.67, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":36606,"source":{"system":"sec-edgar","filing":"0001208109-23-000004","document":"wf-form4_167649522394652.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810923000004/wf-form4_167649522394652.xml","form_type":"4"}},{"id":2014604,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2023-02-15T21:07:19.000Z","date":"2023-02-13","kind":"tax_withholding","acquired":false,"shares":1800,"price":84.94,"value":152892.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F3","text":"Shares automatically withheld upon settlement of performance share units to satisfy tax withholding obligations."}],"balance_after":37623,"source":{"system":"sec-edgar","filing":"0001208109-23-000004","document":"wf-form4_167649522394652.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810923000004/wf-form4_167649522394652.xml","form_type":"4"}},{"id":2014603,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2023-02-15T21:07:19.000Z","date":"2023-02-13","kind":"grant","acquired":true,"shares":5491,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Awarded in connection with the settlement of performance share units for the 2020-2022 performance cycle."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee."}],"balance_after":39423,"source":{"system":"sec-edgar","filing":"0001208109-23-000004","document":"wf-form4_167649522394652.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810923000004/wf-form4_167649522394652.xml","form_type":"4"}},{"id":2037923,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Employee Stock Option (Right to Buy)","published_at":"2023-02-02T21:12:47.000Z","date":"2023-01-31","kind":"grant","acquired":true,"shares":23164,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"The option vests in four equal annual installments beginning on February 19, 2024 and thereafter on February 19, 2025, February 19, 2026 and February 19, 2027.  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In the event of the Reporting Person's qualifying retirement prior to the first Vesting Date, the number of shares subject to the restricted stock units will be prorated by a fraction, the numerator of which is the number of whole months elapsed between the date of grant and the date of such qualifying retirement and the denominator of which is 12 (the \"Retirement Proration\")."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee."}],"balance_after":33932,"source":{"system":"sec-edgar","filing":"0001208109-23-000002","document":"wf-form4_167537235014220.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810923000002/wf-form4_167537235014220.xml","form_type":"4"}},{"id":2244144,"issuer":{"id":27424,"kind":"organization","name":"SkyWater Technology, LLC","symbol":"SKYT"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-06-03T20:45:05.000Z","date":"2022-06-01","kind":"grant","acquired":true,"shares":14947,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Represents a grant of restricted stock units (\"RSUs\"). The RSUs vest on the date immediately preceding the next occurring annual meeting of the Issuer's stockholders, contingent on the reporting person's continued service on such vesting date."}],"balance_after":17219,"source":{"system":"sec-edgar","filing":"0001819974-22-000032","document":"wf-form4_165428908365146.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1208109/000181997422000032/wf-form4_165428908365146.xml","form_type":"4"}},{"id":2277398,"issuer":{"id":137,"kind":"organization","name":"Laird Superfood, Inc.","symbol":"LSF"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-09T21:33:06.000Z","date":"2022-05-05","kind":"grant","acquired":true,"shares":14000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents a grant of restricted stock units. 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The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":20980,"source":{"system":"sec-edgar","filing":"0001208109-22-000014","document":"wf-form4_164884336382216.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":7,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000014/wf-form4_164884336382216.xml","form_type":"4"}},{"id":2312281,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-04-01T20:02:58.000Z","date":"2022-03-31","kind":"sale","acquired":false,"shares":320,"price":135.38,"value":43321.6,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 11, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F6","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $135.32 to $135.50, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":21280,"source":{"system":"sec-edgar","filing":"0001208109-22-000014","document":"wf-form4_164884336382216.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000014/wf-form4_164884336382216.xml","form_type":"4"}},{"id":2312280,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-04-01T20:02:58.000Z","date":"2022-03-31","kind":"sale","acquired":false,"shares":2070,"price":134.74,"value":278911.8,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 11, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $134.29 to $135.16, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":21600,"source":{"system":"sec-edgar","filing":"0001208109-22-000014","document":"wf-form4_164884336382216.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000014/wf-form4_164884336382216.xml","form_type":"4"}},{"id":2312279,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-04-01T20:02:58.000Z","date":"2022-03-31","kind":"sale","acquired":false,"shares":873,"price":133.73,"value":116746.29,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 11, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F4","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $133.20 to $134.18, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":23670,"source":{"system":"sec-edgar","filing":"0001208109-22-000014","document":"wf-form4_164884336382216.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000014/wf-form4_164884336382216.xml","form_type":"4"}},{"id":2312278,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-04-01T20:02:58.000Z","date":"2022-03-31","kind":"sale","acquired":false,"shares":6080,"price":132.75,"value":807120.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 11, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $132.19 to $133.18, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":24543,"source":{"system":"sec-edgar","filing":"0001208109-22-000014","document":"wf-form4_164884336382216.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000014/wf-form4_164884336382216.xml","form_type":"4"}},{"id":2312277,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-04-01T20:02:58.000Z","date":"2022-03-31","kind":"sale","acquired":false,"shares":2499,"price":131.63,"value":328943.37,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 11, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $131.17 to $132.08, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":30623,"source":{"system":"sec-edgar","filing":"0001208109-22-000014","document":"wf-form4_164884336382216.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000014/wf-form4_164884336382216.xml","form_type":"4"}},{"id":2312276,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-04-01T20:02:58.000Z","date":"2022-03-31","kind":"exercise","acquired":true,"shares":12142,"price":55.72,"value":676552.24,"ownership":{"direct":true},"balance_after":33122,"source":{"system":"sec-edgar","filing":"0001208109-22-000014","document":"wf-form4_164884336382216.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000014/wf-form4_164884336382216.xml","form_type":"4"}},{"id":2326825,"issuer":{"id":137,"kind":"organization","name":"Laird Superfood, Inc.","symbol":"LSF"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-03-17T19:53:42.000Z","date":"2022-03-15","kind":"purchase","acquired":true,"shares":15000,"price":3,"value":45000.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"The reporting person's purchase of common stock reported herein was matchable under Section16(b) of the Securities Exchange Act of 1934, to the extent of 1,964 shares, with the reporting person's sale of 1,964 shares on October 4, 2021. The reporting person has agreed to pay to Laird Superfood, Inc., upon settlement of the purchase, $28,555.03, representing the full amount of the profit realized in connection with the short-swing transaction, less transaction costs."}],"balance_after":17901,"source":{"system":"sec-edgar","filing":"0001593968-22-000769","document":"primary_01.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1208109/000159396822000769/primary_01.xml","form_type":"4"}},{"id":2349914,"issuer":{"id":27424,"kind":"organization","name":"SkyWater Technology, LLC","symbol":"SKYT"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-03-05T00:24:52.000Z","date":"2022-03-02","kind":"grant","acquired":true,"shares":2272,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Represents a grant of restricted stock units (\"RSUs\"). The RSUs vest on the date immediately preceding the next occurring annual meeting of the Issuer's stockholders, contingent on the reporting person's continued service on such vesting date."}],"balance_after":2272,"source":{"system":"sec-edgar","filing":"0001208109-22-000012","document":"wf-form4_164643987013909.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1208109/000120810922000012/wf-form4_164643987013909.xml","form_type":"4"}},{"id":2376733,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Employee Stock Option (Right to Buy)","published_at":"2022-02-24T21:02:46.000Z","date":"2022-02-22","kind":"exercise","acquired":false,"shares":10123,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F8","text":"Awarded pursuant to the Entegris, Inc. 2010 Stock Plan in consideration of services as an employee."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F9","text":"This option vests in four equal installments. The first three installments became exercisable on February 19, 2020, February 19, 2021, and February 19, 2022, respectively. The final installment will become exercisable on February 19, 2023."}],"balance_after":10123,"derivative":{"exercise_price":33.33,"expiration_date":"2026-02-19","underlying":"Common Stock","underlying_shares":10123},"source":{"system":"sec-edgar","filing":"0001208109-22-000008","document":"wf-form4_164573653081892.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":10,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000008/wf-form4_164573653081892.xml","form_type":"4"}},{"id":2376732,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Employee Stock Option (Right to Buy)","published_at":"2022-02-24T21:02:46.000Z","date":"2022-02-22","kind":"exercise","acquired":false,"shares":10205,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F8","text":"Awarded pursuant to the Entegris, Inc. 2010 Stock Plan in consideration of services as an employee."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F7","text":"This option is fully vested."}],"balance_after":0,"derivative":{"exercise_price":31.1,"expiration_date":"2025-02-19","underlying":"Common Stock","underlying_shares":10205},"source":{"system":"sec-edgar","filing":"0001208109-22-000008","document":"wf-form4_164573653081892.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":9,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000008/wf-form4_164573653081892.xml","form_type":"4"}},{"id":2376731,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-02-24T21:02:46.000Z","date":"2022-02-22","kind":"sale","acquired":false,"shares":300,"price":131.09,"value":39327.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 11, 2022."}],"balance_after":20980,"source":{"system":"sec-edgar","filing":"0001208109-22-000008","document":"wf-form4_164573653081892.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":8,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000008/wf-form4_164573653081892.xml","form_type":"4"}},{"id":2376730,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-02-24T21:02:46.000Z","date":"2022-02-22","kind":"sale","acquired":false,"shares":4271,"price":130.395,"value":556917.045,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 11, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F6","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $129.91 to $130.89, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":21280,"source":{"system":"sec-edgar","filing":"0001208109-22-000008","document":"wf-form4_164573653081892.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":7,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000008/wf-form4_164573653081892.xml","form_type":"4"}},{"id":2376729,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":30776,"kind":"person","name":"GRAVES GREGORY B","position":1,"cik":"0001208109","reported_name":"GRAVES GREGORY B","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP & CFO"}}],"security":"Common Stock","published_at":"2022-02-24T21:02:46.000Z","date":"2022-02-22","kind":"sale","acquired":false,"shares":2348,"price":128.9283,"value":302723.6484,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on February 11, 2022."},{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $128.69 to $129.68, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":25551,"source":{"system":"sec-edgar","filing":"0001208109-22-000008","document":"wf-form4_164573653081892.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000120810922000008/wf-form4_164573653081892.xml","form_type":"4"}}],"next_cursor":"2022-02-24T21:02:46.000000Z,2376729"}