{"transactions":[{"id":707235,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":29841,"kind":"person","name":"Ryzhik David","position":1,"cik":"0002123863","reported_name":"Ryzhik David","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP Interim CFO"}}],"security":"Common Stock","published_at":"2026-07-17T21:05:05.000Z","date":"2026-07-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":94,"price":145.01,"value":13630.94,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on July 15, 2026 of service vesting restricted stock units granted to the executive in July 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this vesting event on July 15, 2026, 7,688 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":9790,"source":{"system":"sec-edgar","filing":"0002123863-26-000008","document":"form4-07172026_050701.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212386326000008/form4-07172026_050701.xml","form_type":"4"}},{"id":707234,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":29841,"kind":"person","name":"Ryzhik David","position":1,"cik":"0002123863","reported_name":"Ryzhik David","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP Interim CFO"}}],"security":"Common Stock","published_at":"2026-07-17T21:05:05.000Z","date":"2026-07-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":127,"price":145.01,"value":18416.27,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on July 15, 2026 of service vesting restricted stock units granted to the executive in July 2024. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"This amount includes 56 shares of common stock acquired by the reporting person on June 30, 2026 pursuant to the company's 2020 Employee Stock Purchase Plan, rounded to the nearest whole share. Of the shares held after this vesting event on July 15, 2026, 8,007 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":9884,"source":{"system":"sec-edgar","filing":"0002123863-26-000008","document":"form4-07172026_050701.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212386326000008/form4-07172026_050701.xml","form_type":"4"}},{"id":734703,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":29841,"kind":"person","name":"Ryzhik David","position":1,"cik":"0002123863","reported_name":"Ryzhik David","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP Interim CFO"}}],"security":"Common Stock","published_at":"2026-06-17T21:05:06.000Z","date":"2026-06-16","kind":"tax_withholding","planned":false,"acquired":false,"shares":76,"price":176.845,"value":13440.22,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on June 16, 2026 of service vesting restricted stock units granted to the executive in June 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this vesting event on June 16, 2026, 8,439 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":9955,"source":{"system":"sec-edgar","filing":"0002123863-26-000006","document":"form4-06172026_050601.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212386326000006/form4-06172026_050601.xml","form_type":"4"}},{"id":772885,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":29841,"kind":"person","name":"Ryzhik David","position":1,"cik":"0002123863","reported_name":"Ryzhik David","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP Interim CFO"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:16.000Z","date":"2026-05-15","kind":"tax_withholding","planned":false,"acquired":false,"shares":226,"price":155.18,"value":35070.68,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F3","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held after this vesting event on May 15, 2026, 8,695 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":10031,"source":{"system":"sec-edgar","filing":"0002123863-26-000004","document":"form4-05192026_050512.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212386326000004/form4-05192026_050512.xml","form_type":"4"}},{"id":772884,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":29841,"kind":"person","name":"Ryzhik David","position":1,"cik":"0002123863","reported_name":"Ryzhik David","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"SVP Interim CFO"}}],"security":"Common Stock","published_at":"2026-05-19T21:05:16.000Z","date":"2026-05-15","kind":"grant","planned":false,"acquired":true,"shares":3115,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held following this grant on May 15, 2026, 9,464 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":10257,"source":{"system":"sec-edgar","filing":"0002123863-26-000004","document":"form4-05192026_050512.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000212386326000004/form4-05192026_050512.xml","form_type":"4"}}]}