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Entegris, Inc. 2020 Stock Plan in consideration of services as an employee."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"The option vests in four equal annual installments beginning on February 19, 2024 and thereafter on February 19, 2025, February 19, 2026 and February 19, 2027."}],"balance_after":91704,"derivative":{"exercise_price":80.71,"expiration_date":"2030-02-19","underlying":"Common Stock","underlying_shares":91704},"source":{"system":"sec-edgar","filing":"0001197452-23-000002","document":"wf-form4_167537206657747.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745223000002/wf-form4_167537206657747.xml","form_type":"4"}},{"id":2037914,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY 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108,715 shares of common stock to the Bertrand M. Loy Revocable Trust."},{"field":"shares","element":"transactionShares","label":"F2","text":"In addition to the 68,466 shares held by The BZH Trust, as previously reported, this number also includes 29,623 shares previously transferred by the Reporting Person to The BZH Trust in September 2020 and 10,626 shares previously transferred by the Reporting Person to The BZH Trust in May 2022."}],"balance_after":0,"source":{"system":"sec-edgar","filing":"0000921895-22-002653","document":"form412799001_09152022.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189522002653/form412799001_09152022.xml","form_type":"4"}},{"id":2172109,"issuer":{"id":7369,"kind":"organization","name":"HARVARD BIOSCIENCE INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-08-29T21:24:36.000Z","date":"2022-08-26","kind":"purchase","acquired":true,"shares":9291,"price":3.41,"value":31682.31,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"This transaction was executed in multiple trades at prices ranging from $3.32 to $3.47, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes (a) the shares purchased in the transaction described in footnote (1) above, (b) 47,493 restricted stock units that will vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders, immediately prior to the commencement of such meeting, and (ii) May 24, 2023, and (c) 342,867 shares of common stock held by the Reporting Person."}],"balance_after":399651,"source":{"system":"sec-edgar","filing":"0000921895-22-002574","document":"form412799001_08292022.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189522002574/form412799001_08292022.xml","form_type":"4"}},{"id":2173130,"issuer":{"id":7369,"kind":"organization","name":"HARVARD BIOSCIENCE INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-08-26T20:02:06.000Z","date":"2022-08-25","kind":"purchase","acquired":true,"shares":8244,"price":3.34,"value":27534.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"This transaction was executed in multiple trades at prices ranging from $3.23 to $3.44, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Includes (a) the shares described in footnote (2) above and (b) the shares purchased in the transaction described in footnote (3) above."}],"balance_after":390360,"source":{"system":"sec-edgar","filing":"0000921895-22-002553","document":"form412799001_08262022.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189522002553/form412799001_08262022.xml","form_type":"4"}},{"id":2173129,"issuer":{"id":7369,"kind":"organization","name":"HARVARD BIOSCIENCE INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-08-26T20:02:06.000Z","date":"2022-08-24","kind":"purchase","acquired":true,"shares":17291,"price":3.23,"value":55849.93,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"This transaction was executed in multiple trades at prices ranging from $3.17 to $3.28, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes (a) the shares purchased in the transaction described in footnote (1) above, (b) 47,493 restricted stock units that will vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders, immediately prior to the commencement of such meeting, and (ii) May 24, 2023, and (c) 317,332 shares of common stock held by the Reporting Person."}],"balance_after":382116,"source":{"system":"sec-edgar","filing":"0000921895-22-002553","document":"form412799001_08262022.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189522002553/form412799001_08262022.xml","form_type":"4"}},{"id":2175195,"issuer":{"id":7369,"kind":"organization","name":"HARVARD BIOSCIENCE INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-08-24T20:06:46.000Z","date":"2022-08-23","kind":"purchase","acquired":true,"shares":8939,"price":3.23,"value":28872.97,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"This transaction was executed in multiple trades at prices ranging from $3.195 to $3.26, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Includes (a) the shares described in footnote (2) above and (b) the shares purchased in the transaction described in footnote (3) above."}],"balance_after":364825,"source":{"system":"sec-edgar","filing":"0000921895-22-002529","document":"form412799001_08242022.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189522002529/form412799001_08242022.xml","form_type":"4"}},{"id":2175194,"issuer":{"id":7369,"kind":"organization","name":"HARVARD BIOSCIENCE INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-08-24T20:06:46.000Z","date":"2022-08-22","kind":"purchase","acquired":true,"shares":4918,"price":3.16,"value":15540.88,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"This transaction was executed in multiple trades at prices ranging from $3.13 to $3.22, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes (a) the shares purchased in the transaction described in footnote (1) above, (b) 47,493 restricted stock units that will vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders, immediately prior to the commencement of such meeting, and (ii) May 24, 2023, and (c) 303,475 shares of common stock held by the Reporting Person."}],"balance_after":355886,"source":{"system":"sec-edgar","filing":"0000921895-22-002529","document":"form412799001_08242022.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189522002529/form412799001_08242022.xml","form_type":"4"}},{"id":2177215,"issuer":{"id":7369,"kind":"organization","name":"HARVARD BIOSCIENCE INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-08-22T20:08:10.000Z","date":"2022-08-19","kind":"purchase","acquired":true,"shares":9608,"price":3.28,"value":31514.24,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"This transaction was executed in multiple trades at prices ranging from $3.24 to $3.30, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Includes (a) the shares described in footnote (2) above and (b) the shares purchased in the transaction described in footnote (3) above."}],"balance_after":350968,"source":{"system":"sec-edgar","filing":"0000921895-22-002509","document":"form412799001_08222022.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189522002509/form412799001_08222022.xml","form_type":"4"}},{"id":2177214,"issuer":{"id":7369,"kind":"organization","name":"HARVARD BIOSCIENCE INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-08-22T20:08:10.000Z","date":"2022-08-18","kind":"purchase","acquired":true,"shares":1151,"price":3.19,"value":3671.69,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"This transaction was executed in multiple trades at prices ranging from $3.175 to $3.20, inclusive. The price reported above reflects the weighted average purchase price. The Reporting Person hereby undertakes to provide upon request to the SEC staff, the Issuer or a security holder of the Issuer full information regarding the number of shares and prices at which the transaction was effected."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes (a) the shares purchased in the transaction described in footnote (1) above, (b) 47,493 restricted stock units that will vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders, immediately prior to the commencement of such meeting, and (ii) May 24, 2023, and (c) 292,716 shares of common stock held by the Reporting Person."}],"balance_after":341360,"source":{"system":"sec-edgar","filing":"0000921895-22-002509","document":"form412799001_08222022.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189522002509/form412799001_08222022.xml","form_type":"4"}},{"id":2183195,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2022-08-17T20:08:42.000Z","date":"2022-08-15","kind":"tax_withholding","acquired":false,"shares":9357,"price":105.39,"value":986134.23,"ownership":{"direct":true},"balance_after":190431,"source":{"system":"sec-edgar","filing":"0001197452-22-000010","document":"wf-form4_166076690799553.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745222000010/wf-form4_166076690799553.xml","form_type":"4"}},{"id":2210379,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2022-07-08T20:43:08.000Z","date":"2022-07-06","kind":"grant","acquired":true,"shares":116,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Reflects securities granted by Entegris, Inc. 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The reporting person disclaims beneficial ownership of these securities, and the filing of this report is not an admission that the reporting person is the beneficial owner of these securities for purposes of Section 16 or for any other purpose."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects securities granted by Entegris, Inc. (the \"Issuer\") pursuant to the terms of the Agreement and Plan of Merger, dated as of December 14, 2021 (the \"Merger Agreement\"), entered into by and among the Issuer, CMC Materials, Inc., (\"CMC\") and other parties thereto.  Pursuant to the terms of the Merger Agreement, (a) the Issuer acquired CMC (the \"Merger\"), and (b) each share of CMC common stock was converted into the right to receive $133 per share, without interest, and 0.4506 shares of Issuer common stock. 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These shares were sold in multiple transactions at prices ranging from $119.95 to $120.00, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":0,"source":{"system":"sec-edgar","filing":"0001197452-21-000017","document":"wf-form4_162888493321408.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000017/wf-form4_162888493321408.xml","form_type":"4"}},{"id":2604822,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-13T20:02:50.000Z","date":"2021-08-11","kind":"sale","acquired":false,"shares":2540,"price":119.259,"value":302917.86,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.795 to $119.67, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":200,"source":{"system":"sec-edgar","filing":"0001197452-21-000017","document":"wf-form4_162888493321408.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000017/wf-form4_162888493321408.xml","form_type":"4"}},{"id":2604821,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-13T20:02:50.000Z","date":"2021-08-11","kind":"sale","acquired":false,"shares":1860,"price":118.0889,"value":219645.354,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F4","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $117.655 to $118.61, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":2740,"source":{"system":"sec-edgar","filing":"0001197452-21-000017","document":"wf-form4_162888493321408.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000017/wf-form4_162888493321408.xml","form_type":"4"}},{"id":2604820,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-13T20:02:50.000Z","date":"2021-08-11","kind":"sale","acquired":false,"shares":1900,"price":117.0362,"value":222368.78,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $116.64 to $117.47, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":4600,"source":{"system":"sec-edgar","filing":"0001197452-21-000017","document":"wf-form4_162888493321408.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000017/wf-form4_162888493321408.xml","form_type":"4"}},{"id":2604819,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-13T20:02:50.000Z","date":"2021-08-11","kind":"sale","acquired":false,"shares":17210,"price":116.0428,"value":1997096.588,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $115.53 to $116.47, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":6500,"source":{"system":"sec-edgar","filing":"0001197452-21-000017","document":"wf-form4_162888493321408.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000017/wf-form4_162888493321408.xml","form_type":"4"}},{"id":2607866,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-11T20:06:03.000Z","date":"2021-08-10","kind":"sale","acquired":false,"shares":800,"price":121.6363,"value":97309.04,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F9","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.27 to $121.81, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":23710,"source":{"system":"sec-edgar","filing":"0001197452-21-000015","document":"wf-form4_162871234333190.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":8,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000015/wf-form4_162871234333190.xml","form_type":"4"}},{"id":2607865,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-11T20:06:03.000Z","date":"2021-08-10","kind":"sale","acquired":false,"shares":10441,"price":120.7425,"value":1260672.4425,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F8","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.25 to $121.22, inclusive. 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These shares were sold in multiple transactions at prices ranging from $122.52 to $123.02, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":88710,"source":{"system":"sec-edgar","filing":"0001197452-21-000015","document":"wf-form4_162871234333190.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000015/wf-form4_162871234333190.xml","form_type":"4"}},{"id":2607862,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-11T20:06:03.000Z","date":"2021-08-09","kind":"sale","acquired":false,"shares":47225,"price":121.6561,"value":5745209.3225,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.33 to $122.10, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":89010,"source":{"system":"sec-edgar","filing":"0001197452-21-000015","document":"wf-form4_162871234333190.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000015/wf-form4_162871234333190.xml","form_type":"4"}},{"id":2607861,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-11T20:06:03.000Z","date":"2021-08-09","kind":"sale","acquired":false,"shares":17475,"price":121.0307,"value":2115011.4825,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F4","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.33 to $121.32, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":136235,"source":{"system":"sec-edgar","filing":"0001197452-21-000015","document":"wf-form4_162871234333190.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000015/wf-form4_162871234333190.xml","form_type":"4"}},{"id":2607860,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-11T20:06:03.000Z","date":"2021-08-09","kind":"sale","acquired":false,"shares":7074,"price":121.6526,"value":860570.4924,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $121.37 to $122.00, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":174100,"source":{"system":"sec-edgar","filing":"0001197452-21-000015","document":"wf-form4_162871234333190.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000015/wf-form4_162871234333190.xml","form_type":"4"}},{"id":2607859,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-11T20:06:03.000Z","date":"2021-08-09","kind":"sale","acquired":false,"shares":2732,"price":121.0118,"value":330604.2376,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.33 to $121.32, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":181174,"source":{"system":"sec-edgar","filing":"0001197452-21-000015","document":"wf-form4_162871234333190.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000015/wf-form4_162871234333190.xml","form_type":"4"}},{"id":2612347,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-06T20:08:35.000Z","date":"2021-08-04","kind":"sale","acquired":false,"shares":2000,"price":126.1046,"value":252209.2,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.00 to $126.27, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":153710,"source":{"system":"sec-edgar","filing":"0001197452-21-000013","document":"wf-form4_162828049357497.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000013/wf-form4_162828049357497.xml","form_type":"4"}},{"id":2612346,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-06T20:08:35.000Z","date":"2021-08-04","kind":"sale","acquired":false,"shares":37178,"price":125.409,"value":4662455.802,"ownership":{"direct":false,"nature":"By Family Trust"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F4","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $125.00 to $125.96, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":155710,"source":{"system":"sec-edgar","filing":"0001197452-21-000013","document":"wf-form4_162828049357497.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000013/wf-form4_162828049357497.xml","form_type":"4"}},{"id":2612345,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-06T20:08:35.000Z","date":"2021-08-04","kind":"sale","acquired":false,"shares":900,"price":126.1232,"value":113510.88,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.02 to $126.21, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":183906,"source":{"system":"sec-edgar","filing":"0001197452-21-000013","document":"wf-form4_162828049357497.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000013/wf-form4_162828049357497.xml","form_type":"4"}},{"id":2612344,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-08-06T20:08:35.000Z","date":"2021-08-04","kind":"sale","acquired":false,"shares":16100,"price":125.3783,"value":2018590.63,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 10, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $125.00 to $125.97, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":184806,"source":{"system":"sec-edgar","filing":"0001197452-21-000013","document":"wf-form4_162828049357497.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000013/wf-form4_162828049357497.xml","form_type":"4"}},{"id":2693852,"issuer":{"id":7369,"kind":"organization","name":"HARVARD BIOSCIENCE INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-05-27T20:17:28.000Z","date":"2021-05-25","kind":"grant","acquired":true,"shares":14400,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents an award of 14,400 restricted stock units that fully vest on the earlier to occur of (i) the date of the Issuer's next Annual Meeting of Stockholders after May 18, 2021, immediately prior to the commencement of such meeting, and (ii) May 25, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes (a) the award described in footnote (1) above, (b) an award of 15,975 remaining unvested restricted stock units vesting in equal quarterly installments on June 30, 2021, September 30, 2021 and December 31, 2021, and (c) 256,451 shares of common stock held by the Reporting Person."}],"balance_after":286826,"source":{"system":"sec-edgar","filing":"0000921895-21-001511","document":"form412799loy_05272021.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1123494/000092189521001511/form412799loy_05272021.xml","form_type":"4"}},{"id":2750024,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-04-14T23:01:28.000Z","date":"2021-04-14","kind":"sale","acquired":false,"shares":15153,"price":119.286,"value":1807540.758,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F13","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.05 to $119.825, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":200906,"source":{"system":"sec-edgar","filing":"0001197452-21-000010","document":"wf-form4_161844127417706.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":12,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000010/wf-form4_161844127417706.xml","form_type":"4"}},{"id":2750023,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-04-14T23:01:28.000Z","date":"2021-04-14","kind":"sale","acquired":false,"shares":58055,"price":118.506,"value":6879865.83,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F12","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $118.05 to $119.04, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":216059,"source":{"system":"sec-edgar","filing":"0001197452-21-000010","document":"wf-form4_161844127417706.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":11,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000010/wf-form4_161844127417706.xml","form_type":"4"}},{"id":2750022,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-04-14T23:01:28.000Z","date":"2021-04-14","kind":"sale","acquired":false,"shares":26792,"price":117.783,"value":3155642.136,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F11","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $117.05 to $118.04, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":274114,"source":{"system":"sec-edgar","filing":"0001197452-21-000010","document":"wf-form4_161844127417706.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":10,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000010/wf-form4_161844127417706.xml","form_type":"4"}},{"id":2750021,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-04-14T23:01:28.000Z","date":"2021-04-13","kind":"sale","acquired":false,"shares":400,"price":120.521,"value":48208.4,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F10","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $120.49 to $120.57, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":300906,"source":{"system":"sec-edgar","filing":"0001197452-21-000010","document":"wf-form4_161844127417706.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":9,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000010/wf-form4_161844127417706.xml","form_type":"4"}},{"id":2750020,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":26939,"kind":"person","name":"LOY BERTRAND","position":1,"cik":"0001197452","reported_name":"LOY BERTRAND","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President & CEO"}}],"security":"Common Stock","published_at":"2021-04-14T23:01:28.000Z","date":"2021-04-13","kind":"sale","acquired":false,"shares":3400,"price":119.461,"value":406167.4,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on March 4, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F9","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $119.27 to $120.05, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":301306,"source":{"system":"sec-edgar","filing":"0001197452-21-000010","document":"wf-form4_161844127417706.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":8,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000119745221000010/wf-form4_161844127417706.xml","form_type":"4"}}],"next_cursor":"2021-04-14T23:01:28.000000Z,2750020"}