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This Form 4 is being filed to report the identified transactions for the correct reporting person (Mary Puma). 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The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held on June 12, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":263058,"source":{"system":"sec-edgar","filing":"0001209191-23-036279","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123036279/doc4.xml","form_type":"4"}},{"id":1864228,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive Chairperson"}}],"security":"Common Stock","published_at":"2023-06-07T20:19:55.000Z","date":"2023-06-07","kind":"gift","planned":false,"acquired":false,"shares":4127,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares of Common Stock were donated by the reporting person as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held on June 7, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":274858,"source":{"system":"sec-edgar","filing":"0001209191-23-035075","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123035075/doc4.xml","form_type":"4"}},{"id":1864227,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive Chairperson"}}],"security":"Common Stock","published_at":"2023-06-07T20:19:55.000Z","date":"2023-06-07","kind":"sale","planned":false,"acquired":false,"shares":21701,"price":173.58,"value":3766859.58,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $173.37 to $173.69, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held on June 7, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":278985,"source":{"system":"sec-edgar","filing":"0001209191-23-035075","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123035075/doc4.xml","form_type":"4"}},{"id":1878499,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive Chairperson"}}],"security":"Common Stock","published_at":"2023-05-25T20:10:30.000Z","date":"2023-05-25","kind":"sale","planned":false,"acquired":false,"shares":19722,"price":151.83,"value":2994391.26,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $151.71 to $151.99, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 25, 2023, 67,420 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":300686,"source":{"system":"sec-edgar","filing":"0001209191-23-032150","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123032150/doc4.xml","form_type":"4"}},{"id":1887226,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive Chairperson"}}],"security":"Common Stock","published_at":"2023-05-18T20:06:26.000Z","date":"2023-05-18","kind":"gift","planned":false,"acquired":false,"shares":4778,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F7","text":"These shares of Common Stock were donated by the reporting person as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this gift on May 18, 2023, 67,420 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":315630,"source":{"system":"sec-edgar","filing":"0001209191-23-030595","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030595/doc4.xml","form_type":"4"}},{"id":1887225,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive Chairperson"}}],"security":"Common Stock","published_at":"2023-05-18T20:06:26.000Z","date":"2023-05-18","kind":"sale","planned":false,"acquired":false,"shares":8578,"price":141.52,"value":1213958.56,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $141.45 to $141.60, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F6","text":"Of the shares held after this sale on May 18, 2023, 67,420 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":320408,"source":{"system":"sec-edgar","filing":"0001209191-23-030595","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123030595/doc4.xml","form_type":"4"}},{"id":1887224,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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The shares are earned based on the achievement of 2023 performance goals. Assuming continuation of employment, 100% of the earned shares will vest on February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after the grant on May 15, 2023, 102,239 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":344430,"source":{"system":"sec-edgar","filing":"0001209191-23-029946","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029946/doc4.xml","form_type":"4"}},{"id":1897020,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Executive Chairperson"}}],"security":"Common Stock","published_at":"2023-05-11T20:15:45.000Z","date":"2023-05-11","kind":"sale","planned":false,"acquired":false,"shares":21705,"price":125,"value":2713125.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 11, 2023, 90,221 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":332412,"source":{"system":"sec-edgar","filing":"0001209191-23-028738","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123028738/doc4.xml","form_type":"4"}},{"id":1984305,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2023-03-01T21:17:40.000Z","date":"2023-02-28","kind":"tax_withholding","acquired":false,"shares":6289,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2022.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 16, 2023.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2024, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of shares issued on both the 2021 performance based restricted stock units and the 2022 performance based restricted stock units, 90,221 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":354117,"source":{"system":"sec-edgar","filing":"0001209191-23-014101","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123014101/doc4.xml","form_type":"4"}},{"id":1984304,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2023-03-01T21:17:40.000Z","date":"2023-02-28","kind":"tax_withholding","acquired":false,"shares":8552,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2023 of the remainder of performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022, and half of the earned shares vested on February 28, 2022. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2023 after the vesting of the 2021 performance based restricted stock units, 104,401 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 141,80 shares issuable under the executive's 2022 performance based restricted stock units, which also vested on February 28, 2023."}],"balance_after":360406,"source":{"system":"sec-edgar","filing":"0001209191-23-014101","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123014101/doc4.xml","form_type":"4"}},{"id":2020358,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2023-02-13T21:19:18.000Z","date":"2023-02-13","kind":"sale","acquired":false,"shares":2300,"price":125.93,"value":289639.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $125.77 to $126.14, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."}],"balance_after":361605,"source":{"system":"sec-edgar","filing":"0001209191-23-008706","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123008706/doc4.xml","form_type":"4"}},{"id":2020357,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2023-02-13T21:19:18.000Z","date":"2023-02-13","kind":"sale","acquired":false,"shares":22497,"price":124.88,"value":2809425.36,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $124.75 to $125.57, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 13, 2023, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":363905,"source":{"system":"sec-edgar","filing":"0001209191-23-008706","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123008706/doc4.xml","form_type":"4"}},{"id":2085409,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-12-15T21:31:28.000Z","date":"2022-12-14","kind":"gift","acquired":false,"shares":7109,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares of Common Stock were donated by the executive as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of December 14, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":386402,"source":{"system":"sec-edgar","filing":"0001209191-22-061444","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122061444/doc4.xml","form_type":"4"}},{"id":2092424,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-12-08T21:40:40.000Z","date":"2022-12-08","kind":"sale","acquired":false,"shares":4202,"price":80.31,"value":337462.62,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.07 to $80.68, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of December 8, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":393511,"source":{"system":"sec-edgar","filing":"0001209191-22-060361","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122060361/doc4.xml","form_type":"4"}},{"id":2096665,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-12-05T23:00:32.000Z","date":"2022-12-05","kind":"sale","acquired":false,"shares":2697,"price":80.12,"value":216083.64,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.05 to $80.20, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of December 1, 2022 and December 5, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":397713,"source":{"system":"sec-edgar","filing":"0001209191-22-059825","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122059825/doc4.xml","form_type":"4"}},{"id":2096664,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-12-05T23:00:32.000Z","date":"2022-12-01","kind":"sale","acquired":false,"shares":1500,"price":80.02,"value":120030.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.00 to $80.12, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of December 1, 2022 and December 5, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":400410,"source":{"system":"sec-edgar","filing":"0001209191-22-059825","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122059825/doc4.xml","form_type":"4"}},{"id":2103563,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-11-28T21:15:11.000Z","date":"2022-11-23","kind":"sale","acquired":false,"shares":3998,"price":80.01,"value":319879.98,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $80.00 to $80.10, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 23, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":401910,"source":{"system":"sec-edgar","filing":"0001209191-22-058855","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122058855/doc4.xml","form_type":"4"}},{"id":2128101,"issuer":{"id":30,"kind":"organization","name":"NORDSON CORP","symbol":"NDSN"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"NDSN","published_at":"2022-11-02T19:12:41.000Z","date":"2022-11-01","kind":"grant","acquired":true,"shares":730,"price":225.93,"value":164928.9,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On November 1, 2022, the Company awarded 730 restricted stock units an as annual grant to non-employee directors, valued at the fourth quarter average stock price of $225.93  per share.  Such shares vest on October 31, 2023 unless, with certain exceptions, the reporting person ceases to be a director prior to the vesting date."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"The total holdings include 25 shares accrued from dividend payments through participation in the Company's Deferred Compensation Plans and 5 shares accrued from divdend payments through participation in the Company's Dividend Reinvestment Plan."}],"balance_after":18906,"source":{"system":"sec-edgar","filing":"0000072331-22-000113","document":"wf-form4_166741634410335.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/72331/000007233122000113/wf-form4_166741634410335.xml","form_type":"4"}},{"id":2187237,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-08-12T20:15:52.000Z","date":"2022-08-12","kind":"sale","acquired":false,"shares":13288,"price":75.94,"value":1009090.72,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $75.83 to $76.19, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 12, 2022, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":405908,"source":{"system":"sec-edgar","filing":"0001209191-22-045593","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122045593/doc4.xml","form_type":"4"}},{"id":2266194,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-05-18T20:58:47.000Z","date":"2022-05-17","kind":"tax_withholding","acquired":false,"shares":3232,"price":60.56,"value":195729.92,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2022, 118,906 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":419196,"source":{"system":"sec-edgar","filing":"0001209191-22-030101","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030101/doc4.xml","form_type":"4"}},{"id":2266193,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-05-18T20:58:47.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":21008,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F8","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024.  Unearned restricted stock units will forfeit on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F9","text":"Of the shares held after this second grant on May 16, 2022, 126,192 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":422428,"source":{"system":"sec-edgar","filing":"0001209191-22-030101","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030101/doc4.xml","form_type":"4"}},{"id":2266192,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-05-18T20:58:47.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":21008,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this first grant on May 16, 2022, 105,184 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":401420,"source":{"system":"sec-edgar","filing":"0001209191-22-030101","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030101/doc4.xml","form_type":"4"}},{"id":2266191,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY 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the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":380412,"source":{"system":"sec-edgar","filing":"0001209191-22-030101","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030101/doc4.xml","form_type":"4"}},{"id":2266190,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-05-18T20:58:47.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":4832,"price":56.38,"value":272428.16,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 92,307 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":384019,"source":{"system":"sec-edgar","filing":"0001209191-22-030101","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030101/doc4.xml","form_type":"4"}},{"id":2266189,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-05-18T20:58:47.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":5050,"price":56.38,"value":284719.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 103,201 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":388851,"source":{"system":"sec-edgar","filing":"0001209191-22-030101","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030101/doc4.xml","form_type":"4"}},{"id":2331101,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-03-16T21:26:26.000Z","date":"2022-03-16","kind":"sale","acquired":false,"shares":11000,"price":69.23,"value":761530.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $69.00 to $69.71, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of March 16, 2022, 114,586 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":393901,"source":{"system":"sec-edgar","filing":"0001209191-22-019280","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122019280/doc4.xml","form_type":"4"}},{"id":2361749,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-03-02T22:00:00.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":9695,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units,114,586 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":404901,"source":{"system":"sec-edgar","filing":"0001209191-22-014830","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014830/doc4.xml","form_type":"4"}},{"id":2361748,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2022-03-02T22:00:00.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":9664,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 136,444 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 21,858 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022."}],"balance_after":414596,"source":{"system":"sec-edgar","filing":"0001209191-22-014830","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014830/doc4.xml","form_type":"4"}},{"id":2515756,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2021-11-12T13:40:05.000Z","date":"2021-11-11","kind":"sale","acquired":false,"shares":1000,"price":62.06,"value":62060.0,"ownership":{"direct":false,"nature":"Held by spouse"},"balance_after":5000,"source":{"system":"sec-edgar","filing":"0001209191-21-064034","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121064034/doc4.xml","form_type":"4"}},{"id":2527999,"issuer":{"id":30,"kind":"organization","name":"NORDSON CORP","symbol":"NDSN"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-11-03T12:35:45.000Z","date":"2021-11-01","kind":"grant","acquired":true,"shares":608,"price":238.43,"value":144965.44,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On November 1, 2021, the Company awarded 608 restricted stock units as an annual grant to non-employee directors, valued at the fourth quarter average stock price of $238.43 per share. Such shares vest on October 31, 2022 unless, with certain exceptions, the reporting person ceases to be a director prior to the vesting date."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"The total holdings include 19 shares accrued from dividend payments through participation in the Company's Amended and Restated 2005 Deferred Compensation Plan and 5 shares accrued from dividend payments through participation in the Company's Dividend Reinvestment Plan"}],"balance_after":18146,"source":{"system":"sec-edgar","filing":"0001209191-21-062599","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/72331/000120919121062599/doc4.xml","form_type":"4"}},{"id":2569755,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2021-09-15T20:30:37.000Z","date":"2021-09-15","kind":"gift","acquired":false,"shares":10425,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares of Common Stock were donated by the executive as a gift to a Morgan Stanley Charitable Account, a donor advised fund, entitled MS GIFT EIVIND LANGE MARY PUMA DAF."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of September 15, 2021, 143,661 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":409688,"source":{"system":"sec-edgar","filing":"0001209191-21-056175","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121056175/doc4.xml","form_type":"4"}},{"id":2708629,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2021-05-18T21:35:23.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":29144,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023.  Unearned restricted stock units will forfeit on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this second grant on May 17, 2021, 143,661 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":420113,"source":{"system":"sec-edgar","filing":"0001209191-21-033627","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033627/doc4.xml","form_type":"4"}},{"id":2708628,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2021-05-18T21:35:23.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":29144,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F7","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first grant on May 17, 2021, 114,517 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":390969,"source":{"system":"sec-edgar","filing":"0001209191-21-033627","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033627/doc4.xml","form_type":"4"}},{"id":2708627,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY 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executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":361825,"source":{"system":"sec-edgar","filing":"0001209191-21-033627","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033627/doc4.xml","form_type":"4"}},{"id":2708626,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common 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forfeiture."}],"balance_after":365637,"source":{"system":"sec-edgar","filing":"0001209191-21-033627","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033627/doc4.xml","form_type":"4"}},{"id":2708625,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2021-05-18T21:35:23.000Z","date":"2021-05-15","kind":"tax_withholding","acquired":false,"shares":4832,"price":38.16,"value":184389.12,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 102,098 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":369244,"source":{"system":"sec-edgar","filing":"0001209191-21-033627","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033627/doc4.xml","form_type":"4"}},{"id":2708624,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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first tax withholding forfeiture (and related vesting) on May 15, 2021, 112,993 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":374076,"source":{"system":"sec-edgar","filing":"0001209191-21-033627","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033627/doc4.xml","form_type":"4"}},{"id":2792449,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Stock Option (right to 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These shares were sold in multiple transactions at prices ranging from $39.01 to $40.00, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of March 11, 2021, 124,379 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":379126,"source":{"system":"sec-edgar","filing":"0001209191-21-020171","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121020171/doc4.xml","form_type":"4"}},{"id":2792447,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2021-03-12T21:33:31.000Z","date":"2021-03-11","kind":"exercise","acquired":true,"shares":75000,"price":12.04,"value":903000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of March 11, 2021, 124,379 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":454126,"source":{"system":"sec-edgar","filing":"0001209191-21-020171","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121020171/doc4.xml","form_type":"4"}},{"id":2821451,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2021-03-02T22:22:48.000Z","date":"2021-02-28","kind":"tax_withholding","acquired":false,"shares":9664,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2020.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 124,379 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":379126,"source":{"system":"sec-edgar","filing":"0001209191-21-016261","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016261/doc4.xml","form_type":"4"}},{"id":2821450,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2021-03-02T22:22:48.000Z","date":"2021-02-28","kind":"tax_withholding","acquired":false,"shares":10099,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 146,168 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 21,789 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021."}],"balance_after":388790,"source":{"system":"sec-edgar","filing":"0001209191-21-016261","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016261/doc4.xml","form_type":"4"}},{"id":2996067,"issuer":{"id":30,"kind":"organization","name":"NORDSON CORP","symbol":"NDSN"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-11-03T21:34:10.000Z","date":"2020-11-02","kind":"grant","acquired":true,"shares":662,"price":196.27,"value":129930.74,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On November 2, 2020, the Company awarded 662 restricted stock as an annual grant to non-employee directors, valued at the fourth quarter average stock price of $196.27 per share. Such shares vest on October 31, 2021 unless, with certain exceptions, the reporting person ceases to be a director prior to the vesting date."}],"balance_after":17514,"source":{"system":"sec-edgar","filing":"0001209191-20-056636","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/72331/000120919120056636/doc4.xml","form_type":"4"}},{"id":3010503,"issuer":{"id":30,"kind":"organization","name":"NORDSON CORP","symbol":"NDSN"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-10-08T12:47:31.000Z","date":"2020-10-06","kind":"sale","acquired":false,"shares":1848,"price":198.12,"value":366125.76,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price reflected is the weighted-average sale price for shares sold.  The shares were sold in multiple transactions, and the range of sale prices for the transactions reported was $198.01 to $198.21.  The reporting person undertakes to provide to the issuer, any security holder of the issuer, or any staff member of the Securities and Exchange Commission, upon request, information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"The total holdings include 14 shares accrued from dividend payments through participation in the Company's Amended and Restated 2005 Deferred Compensation Plan."}],"balance_after":16852,"source":{"system":"sec-edgar","filing":"0001209191-20-054259","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/72331/000120919120054259/doc4.xml","form_type":"4"}},{"id":3133036,"issuer":{"id":30,"kind":"organization","name":"NORDSON CORP","symbol":"NDSN"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY 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date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2020,168,939 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":398889,"source":{"system":"sec-edgar","filing":"0001209191-20-030447","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030447/doc4.xml","form_type":"4"}},{"id":3143291,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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second tax withholding forfeiture (and related vesting) on May 16, 2020, 177,533 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":402705,"source":{"system":"sec-edgar","filing":"0001209191-20-030447","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030447/doc4.xml","form_type":"4"}},{"id":3143290,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common 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forfeiture."}],"balance_after":406316,"source":{"system":"sec-edgar","filing":"0001209191-20-030447","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030447/doc4.xml","form_type":"4"}},{"id":3143289,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2020-05-19T20:13:42.000Z","date":"2020-05-15","kind":"tax_withholding","acquired":false,"shares":5055,"price":23.52,"value":118893.6,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 204,414 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":414642,"source":{"system":"sec-edgar","filing":"0001209191-20-030447","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030447/doc4.xml","form_type":"4"}},{"id":3143288,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and February 28, 2022.  Unearned restricted stock units will forfeit on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2020, 215,799 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":419697,"source":{"system":"sec-edgar","filing":"0001209191-20-030447","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030447/doc4.xml","form_type":"4"}},{"id":3143287,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2020-05-19T20:13:42.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":43578,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2021, May 15, 2022, May 15, 2023 and May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2020, 172,221 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":376119,"source":{"system":"sec-edgar","filing":"0001209191-20-030447","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030447/doc4.xml","form_type":"4"}},{"id":3156749,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Stock Option (right to buy)","published_at":"2020-05-08T21:04:13.000Z","date":"2020-05-08","kind":"exercise","acquired":false,"shares":75000,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":7.2,"exercise_date":"2018-07-15","expiration_date":"2021-07-15","underlying":"Common Stock","underlying_shares":75000},"source":{"system":"sec-edgar","filing":"0001209191-20-027976","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120027976/doc4.xml","form_type":"4"}},{"id":3156748,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2020-05-08T21:04:13.000Z","date":"2020-05-08","kind":"sale","acquired":false,"shares":75000,"price":26.13,"value":1959750.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $26.00 to $26.40, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 8, 2020, 128,643 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":332541,"source":{"system":"sec-edgar","filing":"0001209191-20-027976","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120027976/doc4.xml","form_type":"4"}},{"id":3156747,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2020-05-08T21:04:13.000Z","date":"2020-05-08","kind":"exercise","acquired":true,"shares":75000,"price":7.2,"value":540000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 8, 2020, 128,643 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":407541,"source":{"system":"sec-edgar","filing":"0001209191-20-027976","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120027976/doc4.xml","form_type":"4"}},{"id":3238758,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2020-03-02T21:35:23.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":10111,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2021, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 128,643 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":332541,"source":{"system":"sec-edgar","filing":"0001209191-20-014488","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014488/doc4.xml","form_type":"4"}},{"id":3238757,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Common Stock","published_at":"2020-03-02T21:35:23.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":7221,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the remainder of performance based restricted stock units granted to the executive in May 2018.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 5, 2019, and half of the earned shares vested on February 28, 2019. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of the 2018 performance based restricted stock units, 151,414 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 22,771 shares issuable under the executive's 2019 performance based restricted stock units, which also vested on February 28, 2020."}],"balance_after":342652,"source":{"system":"sec-edgar","filing":"0001209191-20-014488","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014488/doc4.xml","form_type":"4"}},{"id":3274661,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":25610,"kind":"person","name":"PUMA MARY G","position":1,"cik":"0001158015","reported_name":"PUMA MARY G","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"President and CEO"}}],"security":"Stock Option (right to 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