{"transactions":[{"id":2957255,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":false,"shares":4000,"price":5.75,"value":23000.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":5.75,"exercise_date":"2017-09-17","expiration_date":"2027-03-17","underlying":"Amtech Systems, Inc. $0.01 par value common stock","underlying_shares":4000},"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":12,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957254,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":false,"shares":6000,"price":4.9,"value":29400.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":4.9,"exercise_date":"2020-09-04","expiration_date":"2030-03-04","underlying":"Amtech Systems, Inc. $0.01 par value common stock","underlying_shares":6000},"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":11,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957253,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":false,"shares":6000,"price":4.77,"value":28620.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":4.77,"exercise_date":"2019-09-06","expiration_date":"2029-03-06","underlying":"Amtech Systems, Inc. $0.01 par value common stock","underlying_shares":6000},"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":10,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957252,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":false,"shares":4000,"price":2.95,"value":11800.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":2.95,"exercise_date":"2013-12-11","expiration_date":"2022-12-11","underlying":"Amtech Systems, Inc. $0.01 par value common stock","underlying_shares":4000},"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":9,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957251,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":false,"shares":4000,"price":5.25,"value":21000.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":5.25,"exercise_date":"2016-11-17","expiration_date":"2025-11-17","underlying":"Amtech Systems, Inc. $0.01 par value common stock","underlying_shares":4000},"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":8,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957250,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"sale","acquired":false,"shares":6200,"price":6.75,"value":41850.0,"ownership":{"direct":true},"balance_after":2000,"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":7,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957249,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"sale","acquired":false,"shares":24000,"price":6.9,"value":165600.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price is the average sale price for multiple sale transactions.  Actual sale prices range from $6.85 to $6.965."}],"balance_after":8200,"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957248,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":true,"shares":4000,"price":5.75,"value":23000.0,"ownership":{"direct":true},"balance_after":32200,"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957247,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":true,"shares":6000,"price":4.9,"value":29400.0,"ownership":{"direct":true},"balance_after":28200,"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957246,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":true,"shares":6000,"price":4.77,"value":28620.0,"ownership":{"direct":true},"balance_after":22200,"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957245,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":true,"shares":4000,"price":2.95,"value":11800.0,"ownership":{"direct":true},"balance_after":16200,"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":2957244,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2020-12-04T21:51:04.000Z","date":"2020-12-03","kind":"exercise","acquired":true,"shares":4000,"price":5.25,"value":21000.0,"ownership":{"direct":true},"balance_after":12200,"source":{"system":"sec-edgar","filing":"0001209191-20-061818","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120061818/doc4.xml","form_type":"4"}},{"id":3225787,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2020-03-05T21:52:46.000Z","date":"2020-03-04","kind":"grant","acquired":true,"shares":6000,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price omitted because the transaction is a grant of a stock option."}],"balance_after":6000,"derivative":{"exercise_price":4.9,"exercise_date":"2020-09-04","expiration_date":"2030-03-04","underlying":"Amtech Systems, Inc. $0.01 par value common stock","underlying_shares":6000},"source":{"system":"sec-edgar","filing":"0001209191-20-016647","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919120016647/doc4.xml","form_type":"4"}},{"id":3605282,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2019-03-08T21:05:24.000Z","date":"2019-03-06","kind":"grant","acquired":true,"shares":6000,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price omitted because the transaction is a grant of a stock option."}],"balance_after":6000,"derivative":{"exercise_price":4.77,"exercise_date":"2019-09-06","expiration_date":"2029-03-06","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":6000},"source":{"system":"sec-edgar","filing":"0000720500-19-000010","document":"wf-form4_155207910839910.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050019000010/wf-form4_155207910839910.xml","form_type":"4"}},{"id":3933943,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-05-15T20:26:24.000Z","date":"2018-05-11","kind":"grant","acquired":true,"shares":6000,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price omitted because the transaction is a grant of a stock option."}],"balance_after":6000,"derivative":{"exercise_price":7.4,"exercise_date":"2018-11-11","expiration_date":"2028-05-11","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":6000},"source":{"system":"sec-edgar","filing":"0000720500-18-000028","document":"wf-form4_152641596800100.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000028/wf-form4_152641596800100.xml","form_type":"4"}},{"id":4095300,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":false,"shares":2000,"price":5.75,"value":11500.0,"ownership":{"direct":true},"balance_after":4000,"derivative":{"exercise_price":5.75,"exercise_date":"2017-09-18","expiration_date":"2027-03-17","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":2000},"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":17,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095299,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":false,"shares":2000,"price":5.25,"value":10500.0,"ownership":{"direct":true},"balance_after":4000,"derivative":{"exercise_price":5.25,"exercise_date":"2016-11-17","expiration_date":"2025-11-17","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":2000},"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":16,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095298,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":false,"shares":2000,"price":9.98,"value":19960.0,"ownership":{"direct":true},"balance_after":4000,"derivative":{"exercise_price":9.98,"exercise_date":"2015-11-19","expiration_date":"2024-11-19","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":2000},"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":15,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095297,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":false,"shares":1033,"price":7.98,"value":8243.34,"ownership":{"direct":true},"balance_after":2067,"derivative":{"exercise_price":7.98,"exercise_date":"2012-12-15","expiration_date":"2021-12-15","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":1033},"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":14,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095296,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":false,"shares":5000,"price":11.05,"value":55250.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":11.05,"exercise_date":"2009-03-14","expiration_date":"2018-03-14","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":5000},"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":13,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095295,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":false,"shares":2000,"price":7.01,"value":14020.0,"ownership":{"direct":true},"balance_after":4000,"derivative":{"exercise_price":7.01,"exercise_date":"2014-12-12","expiration_date":"2023-12-12","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":2000},"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":12,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095294,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":false,"shares":1666,"price":6.15,"value":10245.9,"ownership":{"direct":true},"balance_after":3334,"derivative":{"exercise_price":6.15,"exercise_date":"2010-11-20","expiration_date":"2019-11-20","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":1666},"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":11,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095293,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":false,"shares":2000,"price":2.95,"value":5900.0,"ownership":{"direct":true},"balance_after":4000,"derivative":{"exercise_price":2.95,"exercise_date":"2013-12-11","expiration_date":"2022-12-11","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":2000},"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":10,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095292,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"sale","acquired":false,"shares":17699,"price":11.25,"value":199113.75,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":8200,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":9,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095291,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":true,"shares":2000,"price":5.75,"value":11500.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":25899,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":8,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095290,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":true,"shares":2000,"price":5.25,"value":10500.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":23899,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":7,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095289,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":true,"shares":2000,"price":9.98,"value":19960.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":21899,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095288,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":true,"shares":1033,"price":7.98,"value":8243.34,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":19899,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095287,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":true,"shares":5000,"price":11.05,"value":55250.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":18866,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095286,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":true,"shares":2000,"price":7.01,"value":14020.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":13866,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095285,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":true,"shares":1666,"price":6.15,"value":10245.9,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":11866,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4095284,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2018-01-19T22:39:03.000Z","date":"2018-01-18","kind":"exercise","acquired":true,"shares":2000,"price":2.95,"value":5900.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Option exercise and sales are pursuant to a previously disclosed 10b5-1 plan."}],"balance_after":10200,"source":{"system":"sec-edgar","filing":"0000720500-18-000009","document":"wf-form4_151640152946221.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050018000009/wf-form4_151640152946221.xml","form_type":"4"}},{"id":4287870,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. Non-Employee Director Stock Option","published_at":"2017-06-09T18:20:47.000Z","date":"2017-06-07","kind":"exercise","acquired":true,"shares":2900,"price":7.98,"value":23142.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 53,100."}],"balance_after":0,"derivative":{"exercise_price":7.98,"exercise_date":"2012-12-15","expiration_date":"2021-12-15","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":2900},"source":{"system":"sec-edgar","filing":"0000720500-17-000040","document":"wf-form4_149703242984026.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050017000040/wf-form4_149703242984026.xml","form_type":"4"}},{"id":4287869,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2017-06-09T18:20:47.000Z","date":"2017-06-08","kind":"sale","acquired":false,"shares":1800,"price":8.65,"value":15570.0,"ownership":{"direct":true},"balance_after":8200,"source":{"system":"sec-edgar","filing":"0000720500-17-000040","document":"wf-form4_149703242984026.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050017000040/wf-form4_149703242984026.xml","form_type":"4"}},{"id":4287868,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2017-06-09T18:20:47.000Z","date":"2017-06-07","kind":"sale","acquired":false,"shares":2900,"price":8.7,"value":25230.0,"ownership":{"direct":true},"balance_after":10000,"source":{"system":"sec-edgar","filing":"0000720500-17-000040","document":"wf-form4_149703242984026.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050017000040/wf-form4_149703242984026.xml","form_type":"4"}},{"id":4287867,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2017-06-09T18:20:47.000Z","date":"2017-06-07","kind":"exercise","acquired":true,"shares":2900,"price":7.98,"value":23142.0,"ownership":{"direct":true},"balance_after":12900,"source":{"system":"sec-edgar","filing":"0000720500-17-000040","document":"wf-form4_149703242984026.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050017000040/wf-form4_149703242984026.xml","form_type":"4"}},{"id":4377064,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":144894,"kind":"person","name":"KING ROBERT F","position":1,"cik":"0001266458","reported_name":"KING ROBERT F","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Amtech Systems, Inc. $.01 par value common stock","published_at":"2017-03-21T20:40:16.000Z","date":"2017-03-17","kind":"grant","acquired":true,"shares":0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price omitted because the transaction is a grant of a stock option."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 56,000."}],"balance_after":6000,"derivative":{"exercise_price":5.75,"exercise_date":"2017-09-18","expiration_date":"2027-03-17","underlying":"Amtech Systems, Inc. $.01 par value common stock","underlying_shares":0},"source":{"system":"sec-edgar","filing":"0000720500-17-000025","document":"wf-form4_149012879779563.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000072050017000025/wf-form4_149012879779563.xml","form_type":"4"}}]}