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The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 17, 2021, 37,246 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":37246,"source":{"system":"sec-edgar","filing":"0001209191-21-011870","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121011870/doc4.xml","form_type":"4"}},{"id":3143303,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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held after this tax withholding forfeiture (and related vesting) on  May 17, 2020, 37,245 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":72966,"source":{"system":"sec-edgar","filing":"0001209191-20-030501","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030501/doc4.xml","form_type":"4"}},{"id":3143302,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common 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of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F3","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F6","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 16, 2020, 41,778 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":74979,"source":{"system":"sec-edgar","filing":"0001209191-20-030501","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030501/doc4.xml","form_type":"4"}},{"id":3143300,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS 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the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 46,893 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":77251,"source":{"system":"sec-edgar","filing":"0001209191-20-030501","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030501/doc4.xml","form_type":"4"}},{"id":3143299,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common 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Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and on the earlier of Mr. Aldeborgh's termination of employment or February 28, 2022.  Unearned restricted stock units will forfeit on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on May 15, 2020, 50,368 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":78794,"source":{"system":"sec-edgar","filing":"0001209191-20-030501","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030501/doc4.xml","form_type":"4"}},{"id":3238748,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2020-03-02T21:23:13.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":3087,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2021, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 37,065 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":65491,"source":{"system":"sec-edgar","filing":"0001209191-20-014449","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014449/doc4.xml","form_type":"4"}},{"id":3238747,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2020-03-02T21:23:13.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":1806,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the remainder of performance based restricted stock units granted to the executive in May 2018.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 5, 2019, and half of the earned shares vested on February 28, 2019. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of the 2018 performance based restricted stock units, 44,016 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,951 shares issuable under the executive's 2019 performance based restricted stock units, which also vested on February 28, 2020."}],"balance_after":68578,"source":{"system":"sec-edgar","filing":"0001209191-20-014449","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014449/doc4.xml","form_type":"4"}},{"id":3274794,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Stock option (right to buy)","published_at":"2020-02-13T21:35:34.000Z","date":"2020-02-13","kind":"exercise","acquired":false,"shares":47100,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":12.04,"exercise_date":"2019-07-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":47100},"source":{"system":"sec-edgar","filing":"0001209191-20-009219","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120009219/doc4.xml","form_type":"4"}},{"id":3274793,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2020-02-13T21:35:34.000Z","date":"2020-02-13","kind":"sale","acquired":false,"shares":47100,"price":28.76,"value":1354596.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $28.75 to $29.01, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 13, 2020, 48,082 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":70384,"source":{"system":"sec-edgar","filing":"0001209191-20-009219","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120009219/doc4.xml","form_type":"4"}},{"id":3274792,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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These shares were sold in multiple transactions at prices ranging from $28.75 to 28.85, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 11, 2020, 48,082 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":70384,"source":{"system":"sec-edgar","filing":"0001209191-20-008907","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":7,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008907/doc4.xml","form_type":"4"}},{"id":3277608,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2020-02-12T22:42:17.000Z","date":"2020-02-12","kind":"exercise","acquired":true,"shares":2900,"price":12.04,"value":34916.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 11, 2020, 48,082 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":73284,"source":{"system":"sec-edgar","filing":"0001209191-20-008907","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008907/doc4.xml","form_type":"4"}},{"id":3277607,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2020-02-12T22:42:17.000Z","date":"2020-02-12","kind":"sale","acquired":false,"shares":7974,"price":28.84,"value":229970.16,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $28.84 to $28.97, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 11, 2020, 48,082 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":70384,"source":{"system":"sec-edgar","filing":"0001209191-20-008907","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008907/doc4.xml","form_type":"4"}},{"id":3277606,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2020-02-12T22:42:17.000Z","date":"2020-02-12","kind":"exercise","acquired":true,"shares":7974,"price":7.2,"value":57412.8,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 11, 2020, 48,082 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":112410,"source":{"system":"sec-edgar","filing":"0001209191-20-008907","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008907/doc4.xml","form_type":"4"}},{"id":3277605,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2020-02-12T22:42:17.000Z","date":"2020-02-11","kind":"sale","acquired":false,"shares":42026,"price":28.92,"value":1215391.92,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $28.90 to $29.12, inclusive. 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The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 11, 2020, 48,082 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":70384,"source":{"system":"sec-edgar","filing":"0001209191-20-008907","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008907/doc4.xml","form_type":"4"}},{"id":3513724,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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as of May 17, 2019, 48,084 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":75177,"source":{"system":"sec-edgar","filing":"0001209191-19-032286","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119032286/doc4a.xml","form_type":"4/A","original_submission_date":"2019-05-17"}},{"id":3513723,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common 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Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held as of May 15, 2019, 57,729 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":78594,"source":{"system":"sec-edgar","filing":"0001209191-19-032286","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119032286/doc4a.xml","form_type":"4/A","original_submission_date":"2019-05-17"}},{"id":3513720,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2019-05-23T20:13:14.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":13902,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2019, 43,827 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":64692,"source":{"system":"sec-edgar","filing":"0001209191-19-032286","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119032286/doc4a.xml","form_type":"4/A","original_submission_date":"2019-05-17"}},{"id":3521604,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN 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granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":75178,"source":{"system":"sec-edgar","filing":"0001209191-19-030923","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030923/doc4.xml","form_type":"4"}},{"id":3521603,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common 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Compensation Committee determined that restricted stock units with performance vesting terms granted in May 2018 had been earned as to 100% of the units. In accordance with the terms of these grants, on February 28, 2019, 50% of the earned shares vested. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2019, 29,925 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":50790,"source":{"system":"sec-edgar","filing":"0001209191-19-014937","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119014937/doc4.xml","form_type":"4"}},{"id":3926111,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2018-05-18T20:06:29.000Z","date":"2018-05-17","kind":"tax_withholding","acquired":false,"shares":737,"price":22.4,"value":16508.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"Represents the closing price on May 17, 2018."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 17, 2018."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held as of May 17, 2018, 33,989 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":51889,"source":{"system":"sec-edgar","filing":"0001209191-18-031380","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031380/doc4.xml","form_type":"4"}},{"id":3926110,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2018-05-18T20:06:29.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":8131,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2019 and February 28, 2020, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2018, 36,489 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":52626,"source":{"system":"sec-edgar","filing":"0001209191-18-031380","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031380/doc4.xml","form_type":"4"}},{"id":3926109,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2018-05-18T20:06:29.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":8131,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2019, May 16, 2020, May 16, 2021 and May 16, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held as of May 16, 2018, 28,358 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":44495,"source":{"system":"sec-edgar","filing":"0001209191-18-031380","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031380/doc4.xml","form_type":"4"}},{"id":3926108,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN 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forfeiture."}],"balance_after":36364,"source":{"system":"sec-edgar","filing":"0001209191-18-031380","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031380/doc4.xml","form_type":"4"}},{"id":4020697,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2018-03-02T21:06:47.000Z","date":"2018-02-28","kind":"tax_withholding","acquired":false,"shares":927,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares beneficially owned by the executive on February 28, 2018, 25,342 were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":37872,"source":{"system":"sec-edgar","filing":"0001209191-18-015555","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118015555/doc4.xml","form_type":"4"}},{"id":4020696,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN 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These shares were sold in multiple transactions at prices ranging from $32.95 to $33.48, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 8, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":39446,"source":{"system":"sec-edgar","filing":"0001209191-17-060055","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117060055/doc4.xml","form_type":"4"}},{"id":4167892,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2017-11-09T23:11:47.000Z","date":"2017-11-08","kind":"exercise","acquired":true,"shares":87500,"price":7.96,"value":696500.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 8, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":126946,"source":{"system":"sec-edgar","filing":"0001209191-17-060055","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117060055/doc4.xml","form_type":"4"}},{"id":4316184,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2017-05-17T20:55:06.000Z","date":"2017-05-17","kind":"grant","acquired":true,"shares":3333,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F5","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, some or all of these restricted stock units will vest on February 28, 2018 based on performance vesting criteria.  Unvested restricted stock units will forfeit on that date.  The executive has agreed that a number of shares, having a value equal to the required tax withholding at vesting, will be withheld from the shares issued on the vest date."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F6","text":"Of the shares held as of May 17, 2017, 28,675 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":39466,"source":{"system":"sec-edgar","filing":"0001209191-17-033180","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117033180/doc4.xml","form_type":"4"}},{"id":4316183,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2017-05-17T20:55:06.000Z","date":"2017-05-17","kind":"grant","acquired":true,"shares":10000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on May 17, 2018, May 17, 2019, May 17, 2020 and May 17, 2021.  The executive has agreed that a number of shares, having a value equal to the required tax withholding at vesting, will be withheld from the shares issued on each vest date."}],"balance_after":36133,"source":{"system":"sec-edgar","filing":"0001209191-17-033180","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117033180/doc4.xml","form_type":"4"}},{"id":4316182,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2017-05-17T20:55:06.000Z","date":"2017-05-16","kind":"tax_withholding","acquired":false,"shares":1660,"price":21.75,"value":36105.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price on May 16, 2017."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 16, 2017."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of May 16, 2017, 15,342 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":26133,"source":{"system":"sec-edgar","filing":"0001209191-17-033180","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117033180/doc4.xml","form_type":"4"}},{"id":4325121,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Stock Option (right to buy)","published_at":"2017-05-12T00:36:33.000Z","date":"2017-05-10","kind":"exercise","acquired":false,"shares":50000,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":5.08,"exercise_date":"2017-01-15","expiration_date":"2020-01-15","underlying":"Common Stock","underlying_shares":50000},"source":{"system":"sec-edgar","filing":"0001209191-17-031683","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117031683/doc4.xml","form_type":"4"}},{"id":4325120,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2017-05-12T00:36:33.000Z","date":"2017-05-09","kind":"sale","acquired":false,"shares":50000,"price":21.04,"value":1052000.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $20.80 to $21.35, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 10, 2017, 20,455 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":27793,"source":{"system":"sec-edgar","filing":"0001209191-17-031683","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117031683/doc4.xml","form_type":"4"}},{"id":4325119,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2017-05-12T00:36:33.000Z","date":"2017-05-10","kind":"exercise","acquired":true,"shares":50000,"price":5.08,"value":254000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of May 10, 2017, 20,455 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":77793,"source":{"system":"sec-edgar","filing":"0001209191-17-031683","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117031683/doc4.xml","form_type":"4"}},{"id":4439877,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2017-02-17T21:08:02.000Z","date":"2017-02-15","kind":"tax_withholding","acquired":false,"shares":1545,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 15, 2017."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"On February 15, 2017, restricted stock units with performance vesting terms granted in May 2016 were determined to have vested as to 60% of the units.  The remaining units forfeited.  The shares issued to the executive on the vested units were reduced by shares having a value equal to the executive's tax withholding obligation.  After these events, of the shares held by the executive as of February 15, 2017, 20,455 were issuable on vesting of other restricted stock units which remain subject to forfeiture."}],"balance_after":27793,"source":{"system":"sec-edgar","filing":"0001209191-17-012063","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117012063/doc4.xml","form_type":"4"}},{"id":4439876,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":142510,"kind":"person","name":"ALDEBORGH JOHN E","position":1,"cik":"0001192438","reported_name":"ALDEBORGH JOHN E","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Customer Operations"}}],"security":"Common Stock","published_at":"2017-02-17T21:08:02.000Z","date":"2017-02-15","kind":"disposition_to_issuer","acquired":false,"shares":2727,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares were issuable on restricted stock units which forfeited on February 15, 2017 as a result of the non-achievement of 2016 performance goals."}],"balance_after":29338,"source":{"system":"sec-edgar","filing":"0001209191-17-012063","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117012063/doc4.xml","form_type":"4"}}]}