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These shares are subject to certain restrictions which shall lapse on the earlier to occur of: (i) the date immediately preceding the date of the Company's 2025 Annual Meeting of stockholders and (ii) the first anniversary of the award date."}],"balance_after":55861,"source":{"system":"sec-edgar","filing":"0001415889-24-012873","document":"form4-05102024_040508.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588924012873/form4-05102024_040508.xml","form_type":"4"}},{"id":1726270,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-12-01T21:15:15.000Z","date":"2023-11-30","kind":"sale","planned":false,"acquired":false,"shares":7005,"price":28.52,"value":199782.6,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Reflects average weighted purchase price. Actual purchase prices ranged from $28.32 to $28.65 per share. The reporting person undertakes to provide, upon the request of the SEC staff, the issuer or any security holder of the issuer, full information regarding the number of shares purchased at each separate price."}],"balance_after":52184,"source":{"system":"sec-edgar","filing":"0001415889-23-015689","document":"form4-12012023_091208.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923015689/form4-12012023_091208.xml","form_type":"4"}},{"id":1741100,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-11-15T23:22:00.000Z","date":"2023-11-14","kind":"sale","planned":false,"acquired":false,"shares":3792,"price":38.2353,"value":144988.2576,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price represents the weighted average sale price for the transaction reported. Price range of shares sold is $37.95 through $38.50. Reporting person undertakes to provide, upon request by the SEC staff or a security holder of the Issuer, full information regarding the number of shares sold at each separate price."}],"balance_after":38701,"source":{"system":"sec-edgar","filing":"0001339595-23-000009","document":"wk-form4_1700090507.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000133959523000009/wk-form4_1700090507.xml","form_type":"4"}},{"id":1875259,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-31T00:37:45.000Z","date":"2023-05-19","kind":"grant","planned":false,"acquired":true,"shares":6770,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"date","element":"transactionDate","label":"F1","text":"The reporting person was granted restricted stock units (\"RSUs\") pursuant to a grant approved by the Board in March 2023"},{"field":"shares","element":"transactionShares","label":"F2","text":"Restricted Stock Units Vest and become exercisable on May 19, 2024. Settlements of vested units into common stock will occur on the earlier of May 19, 2024 or the date the reporting person ceases to provide service to the Issuer, and thereafter on the first market trading day if the applicable date is not a market trading day."},{"field":"shares","element":"transactionShares","label":"F3","text":"If the reporting person ceases to provide services to the Issuer for any reason, all Restricted Stock Units that have not yet vested shall be forfeited without consideration except as provided in our Equity Grant Policy for Outside Directors and any other agreements between the reporting person and Issuer, regarding award vesting and exercisability."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"The reported transaction involved the reporting person's receipt of a grant of 6,770 RSUs. The reporting person has reported prior awards of RSUs in Table II of Form 4. The total reported in Column 5 includes the 6,770 newly awarded RSUs, 4,833 RSUs previously reported in Table II, 4,833 of which vested on May 27, 2023, and 30,890 shares of common stock."}],"balance_after":42493,"source":{"system":"sec-edgar","filing":"0001628280-23-020199","document":"wf-form4_168549345097358.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000162828023020199/wf-form4_168549345097358.xml","form_type":"4"}},{"id":1894448,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-15T20:25:54.000Z","date":"2023-05-12","kind":"grant","planned":false,"acquired":true,"shares":6760,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These shares were awarded as restricted stock pursuant to the Veeco Instruments Inc. 2019 Stock Incentive Plan in consideration of services as a director. These shares are subject to certain restrictions which shall lapse on the earlier to occur of: (i) the date immediately preceding the date of the Company's 2024 Annual Meeting of stockholders and (ii) the first anniversary of the award date."}],"balance_after":59189,"source":{"system":"sec-edgar","filing":"0001415889-23-007982","document":"form4-05152023_080544.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588923007982/form4-05152023_080544.xml","form_type":"4"}},{"id":1893811,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-05-15T20:23:10.000Z","date":"2023-05-15","kind":"grant","planned":false,"acquired":true,"shares":1282,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on of May 15, 2023, 3,971 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":11907,"source":{"system":"sec-edgar","filing":"0001209191-23-029455","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123029455/doc4.xml","form_type":"4"}},{"id":2008507,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-02-17T21:32:33.000Z","date":"2023-02-16","kind":"sale","acquired":false,"shares":13000,"price":32.3056,"value":419972.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price represents the weighted average sale price for the transaction reported. Price range of shares sold is $31.995 through $32.67. Reporting person undertakes to provide upon request by the SEC staff or a security holder of the Issuer, full information regarding the number of shares sold at each separate price."}],"balance_after":30890,"source":{"system":"sec-edgar","filing":"0001039399-23-000007","document":"wf-form4_167666951649336.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939923000007/wf-form4_167666951649336.xml","form_type":"4"}},{"id":2020362,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2023-02-13T21:27:59.000Z","date":"2023-02-13","kind":"sale","acquired":false,"shares":12000,"price":127.02,"value":1524240.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $127.01 to $127.18, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of February 13, 2023, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":10625,"source":{"system":"sec-edgar","filing":"0001209191-23-008723","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919123008723/doc4.xml","form_type":"4"}},{"id":2110610,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-11-18T21:16:40.000Z","date":"2022-11-18","kind":"sale","acquired":false,"shares":3000,"price":76.66,"value":229980.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 18, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":22625,"source":{"system":"sec-edgar","filing":"0001209191-22-057842","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122057842/doc4.xml","form_type":"4"}},{"id":2249904,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2022-06-01T21:06:20.000Z","date":"2022-05-27","kind":"grant","acquired":true,"shares":4833,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F1","text":"Restricted Stock Units Vest and become exercisable on May 27, 2023. Settlements of vested units into common stock will occur on the earlier of May 27, 2023 or the date the reporting person ceases to provide service to the Issuer, and thereafter on the first market trading day if the applicable date is not a market trading day."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"If the reporting person ceases to provide services to the Issuer for any reason, all Restricted Stock Units that have not yet vested shall be forfeited without consideration except as provided in our Equity GrantPolicy for Outside Directors and any other agreements between the reporting person and Issuer, regarding award vesting and exercisability."}],"balance_after":4833,"derivative":{"exercise_price":0,"underlying":"Common Stock","underlying_shares":4833},"source":{"system":"sec-edgar","filing":"0001039399-22-000051","document":"wf-form4_165411755661108.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939922000051/wf-form4_165411755661108.xml","form_type":"4"}},{"id":2268656,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2022-05-17T23:05:55.000Z","date":"2022-05-14","kind":"exercise","acquired":false,"shares":3792,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F1","text":"Restricted Stock Units Vest and become exercisable on May 14, 2022. Settlements of vested units into common stock will occur on the earlier of May 14, 2022 or the date the reporting person ceases to provideservice to the Issuer, and thereafter on the first market trading day if the applicable date is not a market trading day."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"If the reporting person ceases to provide services to the Issuer for any reason, all Restricted Stock Units that have not yet vested shall be forfeited without consideration except as provided in our Equity Grant Policy for Outside Directors and any other agreements between the reporting person and Issuer, regarding award vesting and exercisability."}],"balance_after":0,"derivative":{"exercise_price":0,"underlying":"Common Stock","underlying_shares":3792},"source":{"system":"sec-edgar","filing":"0001039399-22-000029","document":"wf-form4_165282870681963.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939922000029/wf-form4_165282870681963.xml","form_type":"4"}},{"id":2268655,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-17T23:05:55.000Z","date":"2022-05-14","kind":"exercise","acquired":true,"shares":3792,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":43890,"source":{"system":"sec-edgar","filing":"0001039399-22-000029","document":"wf-form4_165282870681963.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939922000029/wf-form4_165282870681963.xml","form_type":"4"}},{"id":2269524,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-17T20:39:32.000Z","date":"2022-05-16","kind":"purchase","acquired":true,"shares":2500,"price":21.6,"value":54000.0,"ownership":{"direct":true},"balance_after":52429,"source":{"system":"sec-edgar","filing":"0001415889-22-005145","document":"form4-05172022_010530.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588922005145/form4-05172022_010530.xml","form_type":"4"}},{"id":2269523,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-17T20:39:32.000Z","date":"2022-05-13","kind":"grant","acquired":true,"shares":6591,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These shares were awarded as restricted stock pursuant to the Veeco Instruments Inc. 2019 Stock Incentive Plan in consideration of services as a director. These shares are subject to certain restrictions which shall lapse on the earlier to occur of: (i) the date immediately preceding the date of the Company's 2023 Annual Meeting of stockholders and (ii) the first anniversary of the award date."}],"source":{"system":"sec-edgar","filing":"0001415889-22-005145","document":"form4-05172022_010530.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000141588922005145/form4-05172022_010530.xml","form_type":"4"}},{"id":2270703,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-16T20:31:12.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":2689,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":25625,"source":{"system":"sec-edgar","filing":"0001209191-22-029147","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122029147/doc4.xml","form_type":"4"}},{"id":2404824,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-02-10T21:35:02.000Z","date":"2022-02-10","kind":"sale","acquired":false,"shares":3000,"price":72.81,"value":218430.0,"ownership":{"direct":true},"balance_after":22936,"source":{"system":"sec-edgar","filing":"0001209191-22-008484","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122008484/doc4.xml","form_type":"4"}},{"id":2406756,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-02-09T23:49:44.000Z","date":"2022-02-08","kind":"sale","acquired":false,"shares":6000,"price":41.6289,"value":249773.4,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price represents the weighted average sale price for the transaction reported. Price range of shares sold is $41.58 through $41.72. Reporting person undertakes to provide upon request by the SEC staff or a security holder of the Issuer, full information regarding the number of shares sold at each separate price."}],"balance_after":40098,"source":{"system":"sec-edgar","filing":"0001039399-22-000005","document":"wf-form4_164445056610087.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939922000005/wf-form4_164445056610087.xml","form_type":"4"}},{"id":2586881,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-08-30T21:04:40.000Z","date":"2021-08-30","kind":"sale","acquired":false,"shares":3500,"price":50.32,"value":176120.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This sale of  shares was made to cover the tax liability incident to the 2020 vesting of shares on restricted stock units previously granted to the director."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $50.27 to $50.49, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held as of August 30, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":25936,"source":{"system":"sec-edgar","filing":"0001209191-21-053855","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121053855/doc4.xml","form_type":"4"}},{"id":2708674,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2021-05-18T23:22:00.000Z","date":"2021-05-14","kind":"grant","acquired":true,"shares":3792,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"Restricted Stock Units Vest and become exercisable in 12 equal monthly installments with the vesting dates beginning on June 14, 2021 and ending on May 14, 2022. Settlements of vested units into common stock will occur on the earlier of May 14, 2022 or the date the reporting person ceases to provide service to the Issuer, and thereafter on the first market trading day if the applicable date is not a market trading day."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"If the reporting person ceases to provide services to the Issuer for any reason, all Restricted Stock Units that have not yet vested shall be forfeited without consideration except as provided in our Equity Grant Policy for Outside Directors and any other agreements between the reporting person and Issuer, regarding award vesting and exercisability."}],"balance_after":3792,"derivative":{"exercise_price":0,"underlying":"Common Stock","underlying_shares":3792},"source":{"system":"sec-edgar","filing":"0001039399-21-000029","document":"wf-form4_162138008146693.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939921000029/wf-form4_162138008146693.xml","form_type":"4"}},{"id":2708673,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2021-05-18T23:22:00.000Z","date":"2021-05-17","kind":"exercise","acquired":false,"shares":7098,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F1","text":"Restricted Stock Units vest and became exercisable in 12 equal monthly installments with the vesting dates beginning on June 15, 2020 and ending on May 15, 2021.  Settlements of vested units into common stock will occur on the earlier of May 15, 2021 or the date the reporting person ceases to provide service to the Issuer, and thereafter on the first market trading day if the applicable date is not a market trading day."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"If the reporting person ceases to provide services to the Issuer for any reason, all Restricted Stock Units that have not yet vested shall be forfeited without consideration except as provided in our Equity Grant Policy for Outside Directors and any other agreements between the reporting person and Issuer, regarding award vesting and exercisability."}],"balance_after":0,"derivative":{"exercise_price":0,"underlying":"Common Stock","underlying_shares":7098},"source":{"system":"sec-edgar","filing":"0001039399-21-000029","document":"wf-form4_162138008146693.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939921000029/wf-form4_162138008146693.xml","form_type":"4"}},{"id":2708672,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-05-18T23:22:00.000Z","date":"2021-05-17","kind":"exercise","acquired":true,"shares":7098,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":46098,"source":{"system":"sec-edgar","filing":"0001039399-21-000029","document":"wf-form4_162138008146693.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939921000029/wf-form4_162138008146693.xml","form_type":"4"}},{"id":2710651,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-05-17T20:39:23.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":3497,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on of May 17, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":29436,"source":{"system":"sec-edgar","filing":"0001209191-21-033178","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033178/doc4.xml","form_type":"4"}},{"id":2722015,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-05-10T20:40:24.000Z","date":"2021-05-07","kind":"grant","acquired":true,"shares":5378,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These shares were awarded as restricted stock pursuant to the Veeco Instruments Inc. 2019 Stock Incentive Plan in consideration of services as a director. These shares are subject to certain restrictions which shall lapse on the earlier to occur of: (i) the date immediately preceding the date of the Company's 2022 Annual Meeting of stockholders and (ii) the first anniversary of the award date."}],"balance_after":43338,"source":{"system":"sec-edgar","filing":"0001179110-21-005056","document":"edgar.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/103145/000117911021005056/edgar.xml","form_type":"4"}},{"id":3143404,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2020-05-19T22:09:02.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":7098,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F3","text":"Restricted Stock Units vest and became exercisable in 12 equal monthly installments with the vesting dates beginning on June 15, 2020 and ending on May 15, 2021.  Settlements of vested units into common stock will occur on the earlier of May 15, 2021 or the date the reporting person ceases to provide service to the Issuer, and thereafter on the first market trading day if the applicable date is not a market trading day."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"If the reporting person ceases to provide services to the Issuer for any reason, all Restricted Stock Units that have not yet vested shall be forfeited without consideration except as provided in our Equity Grant Policy for Outside Directors and any other agreements between the reporting person and Issuer, regarding award vesting and exercisability."}],"balance_after":7098,"derivative":{"exercise_price":0,"underlying":"Common Stock","underlying_shares":7098},"source":{"system":"sec-edgar","filing":"0001039399-20-000044","document":"wf-form4_158992612482635.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939920000044/wf-form4_158992612482635.xml","form_type":"4"}},{"id":3143403,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Restricted Stock Units","published_at":"2020-05-19T22:09:02.000Z","date":"2020-05-18","kind":"exercise","acquired":false,"shares":9000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_date","element":"exerciseDate","label":"F1","text":"Restricted Stock Units Vest and become exercisable in 12 equal monthly installments with the vesting dates beginning on June 17, 2019 and ending on May 17, 2020. Settlements of vested units into common stock will occur on the earlier of May 17, 2020 or the date the reporting person ceases to provide service to the Issuer, and thereafter on the first market trading day if the applicable date is not a market trading day."},{"field":"derivative.expiration_date","element":"expirationDate","label":"F2","text":"If the reporting person ceases to provide services to the Issuer for any reason, all Restricted Stock Units that have not yet vested shall be forfeited without consideration except as provided in our Equity Grant Policy for Outside Directors and any other agreements between the reporting person and Issuer, regarding award vesting and exercisability."}],"balance_after":0,"derivative":{"exercise_price":0,"underlying":"Common Stock","underlying_shares":9000},"source":{"system":"sec-edgar","filing":"0001039399-20-000044","document":"wf-form4_158992612482635.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939920000044/wf-form4_158992612482635.xml","form_type":"4"}},{"id":3143402,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-05-19T22:09:02.000Z","date":"2020-05-18","kind":"exercise","acquired":true,"shares":9000,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":39000,"source":{"system":"sec-edgar","filing":"0001039399-20-000044","document":"wf-form4_158992612482635.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939920000044/wf-form4_158992612482635.xml","form_type":"4"}},{"id":3147564,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-05-15T12:55:36.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":6881,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 15, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2020, 6,881 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":25939,"source":{"system":"sec-edgar","filing":"0001209191-20-029482","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120029482/doc4.xml","form_type":"4"}},{"id":3153114,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-05-12T22:22:20.000Z","date":"2020-05-11","kind":"sale","acquired":false,"shares":6000,"price":24.7811,"value":148686.6,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price represents the weighted average sale price for the transaction reported. Price range of shares sold is $24.70 through $24.91. Reporting person undertakes to provide upon request by the SEC staff or a security holder of the Issuer, full information regarding the number of shares sold at each separate price."}],"balance_after":30000,"source":{"system":"sec-edgar","filing":"0001039399-20-000030","document":"wf-form4_158932212174979.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939920000030/wf-form4_158932212174979.xml","form_type":"4"}},{"id":3154817,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-05-11T20:27:23.000Z","date":"2020-05-11","kind":"sale","acquired":false,"shares":6000,"price":26.61,"value":159660.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This sale of  shares was made to cover the tax liability incident to the 2019 vesting of shares on restricted stock units previously granted to the director."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $26.61 to $26.64, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."}],"balance_after":19058,"source":{"system":"sec-edgar","filing":"0001209191-20-028273","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120028273/doc4.xml","form_type":"4"}},{"id":3157484,"issuer":{"id":4322,"kind":"organization","name":"VEECO INSTRUMENTS INC"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-05-08T20:43:40.000Z","date":"2020-05-08","kind":"grant","acquired":true,"shares":10389,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These shares were awarded as restricted stock pursuant to the Veeco Instruments Inc. 2019 Stock Incentive Plan in consideration of services as a director. 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Reporting person undertakes to provide upon request by the SEC staff or a security holder of the Issuer, full information regarding the number of shares sold at each separate price."}],"balance_after":36000,"source":{"system":"sec-edgar","filing":"0001039399-20-000007","document":"wf-form4_158153136181195.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939920000007/wf-form4_158153136181195.xml","form_type":"4"}},{"id":3282772,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-02-10T21:38:27.000Z","date":"2020-02-10","kind":"sale","acquired":false,"shares":8500,"price":28.27,"value":240295.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $28.24 to $28.29, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."}],"balance_after":25058,"source":{"system":"sec-edgar","filing":"0001209191-20-007927","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120007927/doc4.xml","form_type":"4"}},{"id":3361558,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2019-11-22T20:15:26.000Z","date":"2019-11-20","kind":"sale","acquired":false,"shares":5000,"price":22.6829,"value":113414.5,"ownership":{"direct":false,"nature":"The St. Dennis 1998 Trust"},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price represents the weighted average sale price for the transaction reported. 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Reporting person undertakes to provide upon request by the SEC staff or a security holder of the Issuer, full information regarding the number of shares sold at each separate price."},{"field":"ownership.direct","element":"directOrIndirectOwnership","label":"F2","text":"The Shares are held of record by The St. Dennis 1998 Trust, for which the Reporting Person serves as co-Trustee, along with Sandra St. Dennis."}],"balance_after":46000,"source":{"system":"sec-edgar","filing":"0001039399-19-000087","document":"wf-form4_157445371029341.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1039399/000103939919000087/wf-form4_157445371029341.xml","form_type":"4"}},{"id":3432310,"issuer":{"id":3670,"kind":"organization","name":"FORMFACTOR INC","symbol":"FORM"},"owners":[{"id":13267,"kind":"person","name":"St Dennis Thomas","position":1,"cik":"0001339595","reported_name":"St Dennis Thomas","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2019-08-21T14:01:42.000Z","date":"2019-08-20","kind":"sale","acquired":false,"shares":3000,"price":17.259,"value":51777.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"Price represents the weighted average sale price for the transaction reported. 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