{"transactions":[{"id":2687905,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, MBU"}}],"security":"Common Stock","published_at":"2021-06-02T21:03:12.000Z","date":"2021-06-01","kind":"tax_withholding","acquired":false,"shares":540,"price":72.06,"value":38912.4,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person."}],"balance_after":31998,"source":{"system":"sec-edgar","filing":"0001407682-21-000094","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000094/edgardoc.xml","form_type":"4"}},{"id":2687904,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, MBU"}}],"security":"Common Stock","published_at":"2021-06-02T21:03:12.000Z","date":"2021-05-31","kind":"tax_withholding","acquired":false,"shares":1575,"price":71.77,"value":113037.75,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person."}],"balance_after":32538,"source":{"system":"sec-edgar","filing":"0001407682-21-000094","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000094/edgardoc.xml","form_type":"4"}},{"id":2870424,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, Metro"}}],"security":"Performance Stock Unit","published_at":"2021-02-10T21:30:55.000Z","date":"2021-02-08","kind":"grant","acquired":true,"shares":972,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":972,"derivative":{"expiration_date":"2024-02-08","underlying":"Common Stock","underlying_shares":972},"source":{"system":"sec-edgar","filing":"0001407682-21-000042","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000042/edgardoc.xml","form_type":"4"}},{"id":2870423,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, Metro"}}],"security":"Performance Stock Unit","published_at":"2021-02-10T21:30:55.000Z","date":"2021-02-08","kind":"grant","acquired":true,"shares":973,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":973,"derivative":{"expiration_date":"2023-02-08","underlying":"Common Stock","underlying_shares":973},"source":{"system":"sec-edgar","filing":"0001407682-21-000042","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000042/edgardoc.xml","form_type":"4"}},{"id":2870422,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, Metro"}}],"security":"Common Stock","published_at":"2021-02-10T21:30:55.000Z","date":"2021-02-08","kind":"grant","acquired":true,"shares":1946,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date."}],"balance_after":34113,"source":{"system":"sec-edgar","filing":"0001407682-21-000042","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000042/edgardoc.xml","form_type":"4"}},{"id":2873352,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, Metro"}}],"security":"Common Stock","published_at":"2021-02-09T21:31:17.000Z","date":"2021-02-07","kind":"tax_withholding","acquired":false,"shares":219,"price":59.95,"value":13129.05,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person."}],"balance_after":32167,"source":{"system":"sec-edgar","filing":"0001407682-21-000022","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000022/edgardoc.xml","form_type":"4"}},{"id":3115542,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, MBU"}}],"security":"Common Stock","published_at":"2020-06-10T19:30:54.000Z","date":"2020-06-02","kind":"tax_withholding","acquired":false,"shares":492,"price":30.84,"value":15173.28,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person."}],"balance_after":32386,"source":{"system":"sec-edgar","filing":"0001407682-20-000086","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000086/edgardoc.xml","form_type":"4"}},{"id":3128217,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, Metro"}}],"security":"Common Stock","published_at":"2020-06-02T20:56:17.000Z","date":"2020-06-01","kind":"tax_withholding","acquired":false,"shares":540,"price":31.2,"value":16848.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person."}],"balance_after":32878,"source":{"system":"sec-edgar","filing":"0001407682-20-000085","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000085/edgardoc.xml","form_type":"4"}},{"id":3128216,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. Vice President & GM, Metro"}}],"security":"Common Stock","published_at":"2020-06-02T20:56:17.000Z","date":"2020-05-31","kind":"tax_withholding","acquired":false,"shares":1603,"price":31.08,"value":49821.24,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person."}],"balance_after":33418,"source":{"system":"sec-edgar","filing":"0001407682-20-000085","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000085/edgardoc.xml","form_type":"4"}},{"id":3280869,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. VP & GM, MBU"}}],"security":"Performance Stock Unit","published_at":"2020-02-11T23:16:09.000Z","date":"2020-02-07","kind":"grant","acquired":true,"shares":975,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":975,"derivative":{"expiration_date":"2023-02-07","underlying":"Common Stock","underlying_shares":975},"source":{"system":"sec-edgar","filing":"0001407682-20-000047","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000047/edgardoc.xml","form_type":"4"}},{"id":3280868,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. VP & GM, MBU"}}],"security":"Performance Stock Unit","published_at":"2020-02-11T23:16:09.000Z","date":"2020-02-07","kind":"grant","acquired":true,"shares":975,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":975,"derivative":{"expiration_date":"2022-02-07","underlying":"Common Stock","underlying_shares":975},"source":{"system":"sec-edgar","filing":"0001407682-20-000047","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000047/edgardoc.xml","form_type":"4"}},{"id":3280867,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":131033,"kind":"person","name":"SMEDT RODNEY","position":1,"cik":"0001230497","reported_name":"SMEDT RODNEY","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Sr. VP & GM, MBU"}}],"security":"Common Stock","published_at":"2020-02-11T23:16:09.000Z","date":"2020-02-07","kind":"grant","acquired":true,"shares":1951,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date."}],"balance_after":35021,"source":{"system":"sec-edgar","filing":"0001407682-20-000047","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000047/edgardoc.xml","form_type":"4"}}]}