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The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":3500,"source":{"system":"sec-edgar","filing":"0001407682-22-000034","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000034/edgardoc.xml","form_type":"4"}},{"id":2390442,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-02-17T21:32:50.000Z","date":"2022-02-15","kind":"sale","acquired":false,"shares":33523,"price":89.6,"value":3003660.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price. 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The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":18860,"source":{"system":"sec-edgar","filing":"0001407682-22-000034","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000034/edgardoc.xml","form_type":"4"}},{"id":2390441,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-02-17T21:32:50.000Z","date":"2022-02-15","kind":"sale","acquired":false,"shares":12172,"price":89.03,"value":1083673.16,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted average price. 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The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":52383,"source":{"system":"sec-edgar","filing":"0001407682-22-000034","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000034/edgardoc.xml","form_type":"4"}},{"id":2428301,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-01-24T21:31:36.000Z","date":"2022-01-20","kind":"gift","acquired":false,"shares":100,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":64555,"source":{"system":"sec-edgar","filing":"0001407682-22-000011","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000011/edgardoc.xml","form_type":"4"}},{"id":2440817,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-01-07T21:39:55.000Z","date":"2021-12-10","kind":"gift","acquired":false,"shares":1000,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":64655,"source":{"system":"sec-edgar","filing":"0001407682-22-000004","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000004/edgardoc.xml","form_type":"5"}},{"id":2440816,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-01-07T21:39:55.000Z","date":"2021-03-05","kind":"gift","acquired":false,"shares":250,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":280788,"source":{"system":"sec-edgar","filing":"0001407682-22-000004","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000004/edgardoc.xml","form_type":"5"}},{"id":2478244,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-12-10T18:21:14.000Z","date":"2021-12-08","kind":"sale","acquired":false,"shares":22633,"price":98.12,"value":2220749.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $98.00 to $98.42, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":65905,"source":{"system":"sec-edgar","filing":"0001407682-21-000140","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000140/edgardoc.xml","form_type":"4"}},{"id":2527667,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-11-03T21:12:46.000Z","date":"2021-11-01","kind":"sale","acquired":false,"shares":50000,"price":80.36,"value":4018000.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $80.00 to $80.78, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":88538,"source":{"system":"sec-edgar","filing":"0001407682-21-000130","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000130/edgardoc.xml","form_type":"4"}},{"id":2665093,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-06-17T15:56:42.000Z","date":"2021-06-15","kind":"sale","acquired":false,"shares":4296,"price":75.16,"value":322887.36,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $75.00 to $75.40, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":138538,"source":{"system":"sec-edgar","filing":"0001407682-21-000103","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000103/edgardoc.xml","form_type":"4"}},{"id":2669356,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-06-15T14:26:47.000Z","date":"2021-06-14","kind":"sale","acquired":false,"shares":45303,"price":75.1,"value":3402255.3,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $75.00 to $75.59, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":142834,"source":{"system":"sec-edgar","filing":"0001407682-21-000097","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000097/edgardoc.xml","form_type":"4"}},{"id":2669355,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-06-15T14:26:47.000Z","date":"2021-06-11","kind":"sale","acquired":false,"shares":401,"price":75,"value":30075.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021."}],"balance_after":188137,"source":{"system":"sec-edgar","filing":"0001407682-21-000097","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000097/edgardoc.xml","form_type":"4"}},{"id":2696243,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-05-26T18:44:32.000Z","date":"2021-05-24","kind":"sale","acquired":false,"shares":30000,"price":65.52,"value":1965600.0,"ownership":{"direct":false,"nature":"Trust - CRT"},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $65.02 to $65.72, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":0,"source":{"system":"sec-edgar","filing":"0001407682-21-000089","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000089/edgardoc.xml","form_type":"4"}},{"id":2717619,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-05-12T19:59:15.000Z","date":"2021-05-11","kind":"grant","acquired":true,"shares":2500,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. 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These shares were sold in multiple transactions at prices ranging from $71.25 to $71.63, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":186038,"source":{"system":"sec-edgar","filing":"0001407682-21-000068","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000068/edgardoc.xml","form_type":"4"}},{"id":2749923,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-04-14T20:31:53.000Z","date":"2021-04-13","kind":"sale","acquired":false,"shares":16511,"price":70.19,"value":1158907.09,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F4","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $70.00 to $70.66, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":186838,"source":{"system":"sec-edgar","filing":"0001407682-21-000068","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000068/edgardoc.xml","form_type":"4"}},{"id":2749922,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-04-14T20:31:53.000Z","date":"2021-04-12","kind":"sale","acquired":false,"shares":21110,"price":71.24,"value":1503876.4,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $71.00 to $71.47, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":203349,"source":{"system":"sec-edgar","filing":"0001407682-21-000068","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000068/edgardoc.xml","form_type":"4"}},{"id":2749921,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-04-14T20:31:53.000Z","date":"2021-04-12","kind":"sale","acquired":false,"shares":11579,"price":70.58,"value":817245.82,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The stock sales reported on this Form 4 were effected pursuant to a Rule 10b5-1 trading plan adopted by the reporting person on March 12, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $70.00 to $70.99, inclusive. The Reporting Person undertakes to provide to the Issuer, any security holder of the Issuer, or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote to this Form 4."}],"balance_after":224459,"source":{"system":"sec-edgar","filing":"0001407682-21-000068","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000068/edgardoc.xml","form_type":"4"}},{"id":2788023,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-03-16T23:45:35.000Z","date":"2021-03-12","kind":"gift","acquired":true,"shares":30000,"price":0,"value":0.0,"ownership":{"direct":false,"nature":"Trust - CRT"},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F2","text":"Represents shares of Common Stock that the reporting person transferred to a charitable remainder trust created on March 12, 2021 (the \"CRT\") of which the reporting person is the trustee."}],"balance_after":30000,"source":{"system":"sec-edgar","filing":"0001407682-21-000064","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000064/edgardoc.xml","form_type":"4"}},{"id":2788022,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-03-16T23:45:35.000Z","date":"2021-03-12","kind":"gift","acquired":false,"shares":30000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F2","text":"Represents shares of Common Stock that the reporting person transferred to a charitable remainder trust created on March 12, 2021 (the \"CRT\") of which the reporting person is the trustee."}],"balance_after":236038,"source":{"system":"sec-edgar","filing":"0001407682-21-000064","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000064/edgardoc.xml","form_type":"4"}},{"id":2788021,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-03-16T23:45:35.000Z","date":"2021-03-12","kind":"gift","acquired":false,"shares":15000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"Represents gift of shares of Common Stock to the Schwab Charitable Fund. This transaction is reportable on Form 5, but the reporting person is voluntarily reporting early on Form 4."}],"balance_after":266038,"source":{"system":"sec-edgar","filing":"0001407682-21-000064","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000064/edgardoc.xml","form_type":"4"}},{"id":2864945,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":127453,"kind":"person","name":"Rhine Bruce C","position":1,"cik":"0001369134","reported_name":"Rhine Bruce C","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-02-12T23:27:35.000Z","date":"2021-02-11","kind":"sale","acquired":false,"shares":3703,"price":61.6,"value":228104.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price. 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