{"transactions":[{"id":2187238,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":124645,"kind":"person","name":"FAUBERT RICHARD J","position":1,"cik":"0001230508","reported_name":"FAUBERT RICHARD J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-08-12T20:17:39.000Z","date":"2022-08-12","kind":"sale","acquired":false,"shares":15000,"price":76.28,"value":1144200.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $76.20 to $76.32, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 12, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":33625,"source":{"system":"sec-edgar","filing":"0001209191-22-045596","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122045596/doc4.xml","form_type":"4"}},{"id":2270700,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":124645,"kind":"person","name":"FAUBERT RICHARD J","position":1,"cik":"0001230508","reported_name":"FAUBERT RICHARD J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2022-05-16T20:27:15.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":2689,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":48625,"source":{"system":"sec-edgar","filing":"0001209191-22-029139","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122029139/doc4.xml","form_type":"4"}},{"id":2710648,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":124645,"kind":"person","name":"FAUBERT RICHARD J","position":1,"cik":"0001230508","reported_name":"FAUBERT RICHARD J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-05-17T20:36:14.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":3497,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 17, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this grant on of May 17, 2021, 3,497 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":45936,"source":{"system":"sec-edgar","filing":"0001209191-21-033170","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033170/doc4.xml","form_type":"4"}},{"id":3147560,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":124645,"kind":"person","name":"FAUBERT RICHARD J","position":1,"cik":"0001230508","reported_name":"FAUBERT RICHARD J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2020-05-15T12:49:14.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":6881,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 15, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2020,6,881 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":42439,"source":{"system":"sec-edgar","filing":"0001209191-20-029474","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120029474/doc4.xml","form_type":"4"}},{"id":3526247,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":124645,"kind":"person","name":"FAUBERT RICHARD J","position":1,"cik":"0001230508","reported_name":"FAUBERT RICHARD J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2019-05-15T21:14:58.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":6232,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 15, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2019, 6,232 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":35558,"source":{"system":"sec-edgar","filing":"0001209191-19-030087","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030087/doc4.xml","form_type":"4"}},{"id":3928707,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":124645,"kind":"person","name":"FAUBERT RICHARD J","position":1,"cik":"0001230508","reported_name":"FAUBERT RICHARD J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2018-05-17T12:11:08.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":5637,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of service on the Board of Directors, these restricted stock units will vest on November 16, 2018."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 16, 2018, 8,450 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":29326,"source":{"system":"sec-edgar","filing":"0001209191-18-030757","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118030757/doc4.xml","form_type":"4"}},{"id":4162499,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":124645,"kind":"person","name":"FAUBERT RICHARD J","position":1,"cik":"0001230508","reported_name":"FAUBERT RICHARD J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2017-11-15T22:10:07.000Z","date":"2017-11-14","kind":"sale","acquired":false,"shares":3000,"price":34.48,"value":103440.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $34.45 to $34.50, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 14, 2017, 9,427 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":26689,"source":{"system":"sec-edgar","filing":"0001209191-17-060937","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117060937/doc4.xml","form_type":"4"}},{"id":4316180,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":124645,"kind":"person","name":"FAUBERT RICHARD J","position":1,"cik":"0001230508","reported_name":"FAUBERT RICHARD J","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2017-05-17T20:42:20.000Z","date":"2017-05-17","kind":"grant","acquired":true,"shares":3802,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service as a director, 100% of these restricted stock units will vest on November 17, 2017."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 17, 2017, 9,427 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":26689,"source":{"system":"sec-edgar","filing":"0001209191-17-033131","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117033131/doc4.xml","form_type":"4"}}]}