{"transactions":[{"id":2105577,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-11-23T21:17:01.000Z","date":"2022-11-23","kind":"sale","acquired":false,"shares":1798,"price":79.81,"value":143498.38,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $79.72 to $79.94, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 23, 2022, 8,795 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":31173,"source":{"system":"sec-edgar","filing":"0001209191-22-058642","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122058642/doc4.xml","form_type":"4"}},{"id":2105576,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-11-23T21:17:01.000Z","date":"2022-11-23","kind":"sale","acquired":false,"shares":6180,"price":79.08,"value":488714.4,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $78.72 to $79.70, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of November 23, 2022, 8,795 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":32971,"source":{"system":"sec-edgar","filing":"0001209191-22-058642","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122058642/doc4.xml","form_type":"4"}},{"id":2108956,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-11-21T21:17:54.000Z","date":"2022-11-18","kind":"tax_withholding","acquired":false,"shares":7621,"price":76.59,"value":583692.39,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"These shares were withheld by the Company for income tax liabilities associated with the vesting of shares under the Company's Executive Equity Retirement Program, in light of the executive's planned retirement."},{"field":"price","element":"transactionPricePerShare","label":"F3","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after the tax withholding forfeiture (and related vesting) on November 18, 2022, 8,795 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":39151,"source":{"system":"sec-edgar","filing":"0001209191-22-058121","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122058121/doc4.xml","form_type":"4"}},{"id":2187234,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-08-12T20:13:16.000Z","date":"2022-08-11","kind":"sale","acquired":false,"shares":13289,"price":71.2,"value":946176.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $71.04 to $71.23, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 11, 2022, 25,976 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":46772,"source":{"system":"sec-edgar","filing":"0001209191-22-045591","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122045591/doc4.xml","form_type":"4"}},{"id":2266174,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-05-18T21:02:05.000Z","date":"2022-05-17","kind":"tax_withholding","acquired":false,"shares":841,"price":60.56,"value":50930.96,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2022, 25,976 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":60061,"source":{"system":"sec-edgar","filing":"0001209191-22-030110","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030110/doc4.xml","form_type":"4"}},{"id":2266173,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-05-18T21:02:05.000Z","date":"2022-05-16","kind":"grant","acquired":true,"shares":5008,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,100% of the earned shares will vest on  February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this grant on May 16, 2022, 27,871 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":60902,"source":{"system":"sec-edgar","filing":"0001209191-22-030110","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030110/doc4.xml","form_type":"4"}},{"id":2266172,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William 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granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":55894,"source":{"system":"sec-edgar","filing":"0001209191-22-030110","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030110/doc4.xml","form_type":"4"}},{"id":2266171,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common 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forfeiture."}],"balance_after":56796,"source":{"system":"sec-edgar","filing":"0001209191-22-030110","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030110/doc4.xml","form_type":"4"}},{"id":2266170,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-05-18T21:02:05.000Z","date":"2022-05-15","kind":"tax_withholding","acquired":false,"shares":1462,"price":56.38,"value":82427.56,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 28,050 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":58195,"source":{"system":"sec-edgar","filing":"0001209191-22-030110","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122030110/doc4.xml","form_type":"4"}},{"id":2361751,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-03-02T22:00:45.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":2117,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2021.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 15, 2022.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2023, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of shares issued on both the 2020 performance based restricted stock units and the 2021 performance based restricted stock units, 31,346 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":59656,"source":{"system":"sec-edgar","filing":"0001209191-22-014834","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014834/doc4.xml","form_type":"4"}},{"id":2361750,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2022-03-02T22:00:45.000Z","date":"2022-02-28","kind":"tax_withholding","acquired":false,"shares":1852,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2022 of the remainder of performance based restricted stock units granted to the executive in May 2020.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021, and half of the earned shares vested on February 28, 2021. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2022 after the vesting of the 2020 performance based restricted stock units, 37,029 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 5,683 shares issuable under the executive's 2021 performance based restricted stock units, which also vested on February 28, 2022."}],"balance_after":61773,"source":{"system":"sec-edgar","filing":"0001209191-22-014834","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919122014834/doc4.xml","form_type":"4"}},{"id":2591172,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2021-08-25T20:44:44.000Z","date":"2021-08-25","kind":"sale","acquired":false,"shares":15061,"price":49.09,"value":739344.49,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $49.00 to $49.59, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of August 25, 2021, 39,547 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":59836,"source":{"system":"sec-edgar","filing":"0001209191-21-053326","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121053326/doc4.xml","form_type":"4"}},{"id":2708587,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2021-05-18T21:31:41.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":7578,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023.  Unearned restricted stock units will forfeit on February 28, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held after this second grant on May 17, 2021, 39,547 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":74897,"source":{"system":"sec-edgar","filing":"0001209191-21-033618","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033618/doc4.xml","form_type":"4"}},{"id":2708586,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2021-05-18T21:31:41.000Z","date":"2021-05-17","kind":"grant","acquired":true,"shares":7578,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F7","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first grant on May 17, 2021, 31,969 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":67319,"source":{"system":"sec-edgar","filing":"0001209191-21-033618","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033618/doc4.xml","form_type":"4"}},{"id":2708585,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William 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the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":59741,"source":{"system":"sec-edgar","filing":"0001209191-21-033618","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033618/doc4.xml","form_type":"4"}},{"id":2708584,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common 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forfeiture."}],"balance_after":60850,"source":{"system":"sec-edgar","filing":"0001209191-21-033618","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033618/doc4.xml","form_type":"4"}},{"id":2708583,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2021-05-18T21:31:41.000Z","date":"2021-05-15","kind":"tax_withholding","acquired":false,"shares":1399,"price":38.16,"value":53385.84,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F1","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 28,924 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":61752,"source":{"system":"sec-edgar","filing":"0001209191-21-033618","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033618/doc4.xml","form_type":"4"}},{"id":2708582,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS 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the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 32,078 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":63151,"source":{"system":"sec-edgar","filing":"0001209191-21-033618","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121033618/doc4.xml","form_type":"4"}},{"id":2821443,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common 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These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 8, 2021.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2022, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of shares issued on both the 2019 performance based restricted stock units and the 2020 performance based restricted stock units, 35,374 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":64613,"source":{"system":"sec-edgar","filing":"0001209191-21-016214","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016214/doc4.xml","form_type":"4"}},{"id":2821442,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2021-03-02T22:17:33.000Z","date":"2021-02-28","kind":"tax_withholding","acquired":false,"shares":2924,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2021 of the remainder of performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020, and half of the earned shares vested on February 28, 2020. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2021 after the vesting of the 2019 performance based restricted stock units, 41,682 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,308 shares issuable under the executive's 2020 performance based restricted stock units, which also vested on February 28, 2021."}],"balance_after":67411,"source":{"system":"sec-edgar","filing":"0001209191-21-016214","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121016214/doc4.xml","form_type":"4"}},{"id":2846726,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Stock Option (right to buy)","published_at":"2021-02-19T21:56:28.000Z","date":"2021-02-19","kind":"exercise","acquired":false,"shares":21875,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":12.04,"exercise_date":"2019-07-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":21875},"source":{"system":"sec-edgar","filing":"0001209191-21-012401","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121012401/doc4.xml","form_type":"4"}},{"id":2846725,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2021-02-19T21:56:28.000Z","date":"2021-02-19","kind":"sale","acquired":false,"shares":21875,"price":39.99,"value":874781.25,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $39.91 to $40.19, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 19, 2021, 48,274 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":70335,"source":{"system":"sec-edgar","filing":"0001209191-21-012401","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121012401/doc4.xml","form_type":"4"}},{"id":2846724,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2021-02-19T21:56:28.000Z","date":"2021-02-19","kind":"exercise","acquired":true,"shares":21875,"price":12.04,"value":263375.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 19, 2021, 48,274 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":92210,"source":{"system":"sec-edgar","filing":"0001209191-21-012401","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919121012401/doc4.xml","form_type":"4"}},{"id":3137672,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2020-05-22T20:11:58.000Z","date":"2020-05-22","kind":"sale","acquired":false,"shares":9853,"price":25.05,"value":246817.65,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $25.01 to $25.11, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 22, 2020, 48,274 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":70335,"source":{"system":"sec-edgar","filing":"0001209191-20-031699","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120031699/doc4.xml","form_type":"4"}},{"id":3143309,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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held after this tax withholding forfeiture (and related vesting) on  May 17, 2020, 48,274 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":80188,"source":{"system":"sec-edgar","filing":"0001209191-20-030517","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030517/doc4.xml","form_type":"4"}},{"id":3143308,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common 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forfeiture."}],"balance_after":80923,"source":{"system":"sec-edgar","filing":"0001209191-20-030517","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030517/doc4.xml","form_type":"4"}},{"id":3143307,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2020-05-19T20:43:08.000Z","date":"2020-05-16","kind":"tax_withholding","acquired":false,"shares":1504,"price":23.95,"value":36020.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F8","text":"Of the shares held after this first tax withholding forfeiture (and related vesting) on May 16, 2020, 52,807 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":81521,"source":{"system":"sec-edgar","filing":"0001209191-20-030517","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030517/doc4.xml","form_type":"4"}},{"id":3143306,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2020-05-19T20:43:08.000Z","date":"2020-05-15","kind":"tax_withholding","acquired":false,"shares":969,"price":23.52,"value":22790.88,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held after this tax withholding forfeiture (and related vesting) on May 15, 2020, 57,922 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":83025,"source":{"system":"sec-edgar","filing":"0001209191-20-030517","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030517/doc4.xml","form_type":"4"}},{"id":3143305,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2020-05-19T20:43:08.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":12615,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Based on the achievement of performance goals and assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2021 and February 28, 2022.  Unearned restricted stock units will forfeit on February 28, 2021."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held after this second grant on May 15, 2020, 61,217 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":83994,"source":{"system":"sec-edgar","filing":"0001209191-20-030517","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030517/doc4.xml","form_type":"4"}},{"id":3143304,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2020-05-19T20:43:08.000Z","date":"2020-05-15","kind":"grant","acquired":true,"shares":12615,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2021, May 15, 2022, May 15, 2023 and May 15, 2024."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held after this first grant on May 15, 2020, 48,602 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":71379,"source":{"system":"sec-edgar","filing":"0001209191-20-030517","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120030517/doc4.xml","form_type":"4"}},{"id":3238750,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2020-03-02T21:24:28.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":2927,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F4","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the first half of shares earned under performance based restricted stock units granted to the executive in May 2019.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 12, 2020.  The second half of the shares earned under this restricted stock unit award will vest on February 28, 2021, assuming continuation of the executive's services. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of shares issued on both the 2018 performance based restricted stock units and the 2019 performance based restricted stock units, 35,987 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":58764,"source":{"system":"sec-edgar","filing":"0001209191-20-014451","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014451/doc4.xml","form_type":"4"}},{"id":3238749,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2020-03-02T21:24:28.000Z","date":"2020-02-28","kind":"tax_withholding","acquired":false,"shares":1806,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2020 of the remainder of performance based restricted stock units granted to the executive in May 2018.  These shares were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 5, 2019, and half of the earned shares vested on February 28, 2019. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2020 after the vesting of the 2018 performance based restricted stock units, 42,578 shares were issuable on vesting of restricted stock units which are subject to forfeiture. This number includes 6,591 shares issuable under the executive's 2019 performance based restricted stock units, which also vested on February 28, 2020."}],"balance_after":61691,"source":{"system":"sec-edgar","filing":"0001209191-20-014451","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120014451/doc4.xml","form_type":"4"}},{"id":3277587,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Stock Option (right to buy)","published_at":"2020-02-12T22:37:39.000Z","date":"2020-02-11","kind":"exercise","acquired":false,"shares":12500,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":7.2,"exercise_date":"2018-07-15","expiration_date":"2021-07-15","underlying":"Common Stock","underlying_shares":12500},"source":{"system":"sec-edgar","filing":"0001209191-20-008903","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008903/doc4.xml","form_type":"4"}},{"id":3277586,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2020-02-12T22:37:39.000Z","date":"2020-02-11","kind":"sale","acquired":false,"shares":12500,"price":29.02,"value":362750.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $29.01 to $29.02, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of February 11, 2020, 46,644 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":63497,"source":{"system":"sec-edgar","filing":"0001209191-20-008903","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008903/doc4.xml","form_type":"4"}},{"id":3277585,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz 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forfeiture."}],"balance_after":75997,"source":{"system":"sec-edgar","filing":"0001209191-20-008903","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919120008903/doc4.xml","form_type":"4"}},{"id":3364526,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2019-11-20T21:15:27.000Z","date":"2019-11-20","kind":"sale","acquired":false,"shares":15000,"price":22.5,"value":337500.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 20, 2019, 46,646 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":63499,"source":{"system":"sec-edgar","filing":"0001209191-19-057433","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119057433/doc4.xml","form_type":"4"}},{"id":3513753,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common 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forfeiture."}],"balance_after":78499,"source":{"system":"sec-edgar","filing":"0001209191-19-032287","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119032287/doc4a.xml","form_type":"4/A","original_submission_date":"2019-05-17"}},{"id":3513752,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common 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forfeiture."}],"balance_after":79610,"source":{"system":"sec-edgar","filing":"0001209191-19-032287","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119032287/doc4a.xml","form_type":"4/A","original_submission_date":"2019-05-17"}},{"id":3513751,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common 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forfeiture."}],"balance_after":80513,"source":{"system":"sec-edgar","filing":"0001209191-19-032287","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119032287/doc4a.xml","form_type":"4/A","original_submission_date":"2019-05-17"}},{"id":3513750,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2019-05-23T20:13:54.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":13183,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held as of May 15, 2019, 59,291 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":82784,"source":{"system":"sec-edgar","filing":"0001209191-19-032287","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119032287/doc4a.xml","form_type":"4/A","original_submission_date":"2019-05-17"}},{"id":3513749,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2019-05-23T20:13:54.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":13183,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2019, 43,108 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":69601,"source":{"system":"sec-edgar","filing":"0001209191-19-032287","document":"doc4a.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119032287/doc4a.xml","form_type":"4/A","original_submission_date":"2019-05-17"}},{"id":3521609,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz 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and are subject to forfeiture."}],"balance_after":78500,"source":{"system":"sec-edgar","filing":"0001209191-19-030925","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":5,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030925/doc4.xml","form_type":"4"}},{"id":3521608,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2019-05-17T20:24:18.000Z","date":"2019-05-16","kind":"tax_withholding","acquired":false,"shares":903,"price":16.95,"value":15305.85,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"Represents the closing price of the common stock on the date of the tax withholding."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F5","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2019, 49,146 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":79610,"source":{"system":"sec-edgar","filing":"0001209191-19-030925","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030925/doc4.xml","form_type":"4"}},{"id":3521607,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES 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held as of May 16, 2019, 49,146 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":80513,"source":{"system":"sec-edgar","filing":"0001209191-19-030925","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030925/doc4.xml","form_type":"4"}},{"id":3521606,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common 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Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2020 and February 28, 2021, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2020."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"Of the shares held as of May 15, 2019, 59,291 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":82784,"source":{"system":"sec-edgar","filing":"0001209191-19-030925","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030925/doc4.xml","form_type":"4"}},{"id":3521605,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2019-05-17T20:24:18.000Z","date":"2019-05-15","kind":"grant","acquired":true,"shares":13183,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 15, 2020, May 15, 2021, May 15, 2022 and May 15, 2023."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares held as of May 15, 2019, 43,108 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":69601,"source":{"system":"sec-edgar","filing":"0001209191-19-030925","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119030925/doc4.xml","form_type":"4"}},{"id":3623640,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2019-03-01T21:08:32.000Z","date":"2019-02-28","kind":"tax_withholding","acquired":false,"shares":1100,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"On February 5, 2019, the Axcelis Technologies, Inc. Compensation Committee determined that restricted stock units with performance vesting terms granted in May 2018 had been earned as to 100% of the units. In accordance with the terms of these grants, on February 28, 2019, 50% of the earned shares vested. As agreed with the executive, the shares issued to the executive on the vested shares were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested shares."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F3","text":"Of the shares beneficially owned by the executive on February 28, 2019, 29,925 shares were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":56418,"source":{"system":"sec-edgar","filing":"0001209191-19-014939","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919119014939/doc4.xml","form_type":"4"}},{"id":3926107,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2018-05-18T20:07:04.000Z","date":"2018-05-17","kind":"tax_withholding","acquired":false,"shares":737,"price":22.4,"value":16508.8,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F9","text":"Represents the closing price on May 17, 2018."},{"field":"acquired","element":"transactionAcquiredDisposedCode","label":"F8","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on May 17, 2018."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F10","text":"Of the shares held as of May 17, 2018, 33,989 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":57517,"source":{"system":"sec-edgar","filing":"0001209191-18-031381","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031381/doc4.xml","form_type":"4"}},{"id":3926106,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2018-05-18T20:07:04.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":8131,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F6","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, up to 50% of these restricted stock units will vest on each of February 28, 2019 and February 28, 2020, based on performance vesting criteria.  Unvested restricted stock units will forfeit on February 28, 2019."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F7","text":"Of the shares held as of May 16, 2018, 36,489 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":58254,"source":{"system":"sec-edgar","filing":"0001209191-18-031381","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031381/doc4.xml","form_type":"4"}},{"id":3926105,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2018-05-18T20:07:04.000Z","date":"2018-05-16","kind":"grant","acquired":true,"shares":8131,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2019, May 16, 2020, May 16, 2021 and May 16, 2022."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F5","text":"Of the shares held as of May 16, 2018, 28,358 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":50123,"source":{"system":"sec-edgar","filing":"0001209191-18-031381","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031381/doc4.xml","form_type":"4"}},{"id":3926104,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William 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forfeiture."}],"balance_after":41992,"source":{"system":"sec-edgar","filing":"0001209191-18-031381","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118031381/doc4.xml","form_type":"4"}},{"id":4020699,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2018-03-02T21:07:36.000Z","date":"2018-02-28","kind":"tax_withholding","acquired":false,"shares":927,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units on February 28, 2018."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Of the shares beneficially owned by the executive on February 28, 2018, 25,342 were issuable on vesting of restricted stock units which are subject to forfeiture."}],"balance_after":43500,"source":{"system":"sec-edgar","filing":"0001209191-18-015558","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118015558/doc4.xml","form_type":"4"}},{"id":4020698,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William 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forfeiture."}],"balance_after":44427,"source":{"system":"sec-edgar","filing":"0001209191-18-015558","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919118015558/doc4.xml","form_type":"4"}},{"id":4167888,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Stock Option (right to buy)","published_at":"2017-11-09T23:10:00.000Z","date":"2017-11-07","kind":"exercise","acquired":false,"shares":28125,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F4","text":"50,000 options were granted on July 15, 2015 and were vested as to 56.25% of the options as of October 15, 2017.  Of the remaining 21,875 options held by the executive after the sales reported on this form, 3,125 options will vest on the 15th of each of July, October, January, and April until fully vested on July 15, 2019, if the officer remains in the service of the Company on such vesting dates."}],"balance_after":21875,"derivative":{"exercise_price":12.04,"exercise_date":"2017-10-15","expiration_date":"2022-07-15","underlying":"Common Stock","underlying_shares":28125},"source":{"system":"sec-edgar","filing":"0001209191-17-060053","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117060053/doc4.xml","form_type":"4"}},{"id":4167887,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-11-09T23:10:00.000Z","date":"2017-11-07","kind":"sale","acquired":false,"shares":9000,"price":33.7,"value":303300.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F3","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $33.47 to $33.85, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 7, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":45094,"source":{"system":"sec-edgar","filing":"0001209191-17-060053","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117060053/doc4.xml","form_type":"4"}},{"id":4167886,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-11-09T23:10:00.000Z","date":"2017-11-07","kind":"sale","acquired":false,"shares":28125,"price":33.33,"value":937406.25,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $33.25 to $33.65, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 7, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":54094,"source":{"system":"sec-edgar","filing":"0001209191-17-060053","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117060053/doc4.xml","form_type":"4"}},{"id":4167885,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-11-09T23:10:00.000Z","date":"2017-11-07","kind":"exercise","acquired":true,"shares":28125,"price":12.04,"value":338625.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of November 7, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":82219,"source":{"system":"sec-edgar","filing":"0001209191-17-060053","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117060053/doc4.xml","form_type":"4"}},{"id":4210550,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Stock Option (right to buy)","published_at":"2017-09-13T20:25:06.000Z","date":"2017-09-12","kind":"exercise","acquired":false,"shares":12500,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":12500,"derivative":{"exercise_price":7.2,"exercise_date":"2017-07-15","expiration_date":"2021-07-15","underlying":"Common Stock","underlying_shares":12500},"source":{"system":"sec-edgar","filing":"0001209191-17-052599","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117052599/doc4.xml","form_type":"4"}},{"id":4210549,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-09-13T20:25:06.000Z","date":"2017-09-12","kind":"sale","acquired":false,"shares":12500,"price":22.57,"value":282125.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $22.55 to $22.625, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of September 12, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":54094,"source":{"system":"sec-edgar","filing":"0001209191-17-052599","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117052599/doc4.xml","form_type":"4"}},{"id":4210548,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-09-13T20:25:06.000Z","date":"2017-09-12","kind":"exercise","acquired":true,"shares":12500,"price":7.2,"value":90000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of September 12, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":66594,"source":{"system":"sec-edgar","filing":"0001209191-17-052599","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117052599/doc4.xml","form_type":"4"}},{"id":4288642,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Stock Option (right to buy)","published_at":"2017-06-08T21:12:17.000Z","date":"2017-06-06","kind":"exercise","acquired":false,"shares":75000,"price":0,"value":0.0,"ownership":{"direct":true},"balance_after":0,"derivative":{"exercise_price":7.96,"exercise_date":"2015-06-08","expiration_date":"2020-07-15","underlying":"Common Stock","underlying_shares":75000},"source":{"system":"sec-edgar","filing":"0001209191-17-038599","document":"doc4.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117038599/doc4.xml","form_type":"4"}},{"id":4288641,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-06-08T21:12:17.000Z","date":"2017-06-06","kind":"sale","acquired":false,"shares":75000,"price":23.39,"value":1754250.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $23.25 to $23.55, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 6, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":54094,"source":{"system":"sec-edgar","filing":"0001209191-17-038599","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117038599/doc4.xml","form_type":"4"}},{"id":4288640,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-06-08T21:12:17.000Z","date":"2017-06-06","kind":"exercise","acquired":true,"shares":75000,"price":7.96,"value":597000.0,"ownership":{"direct":true},"footnotes":[{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F1","text":"Of the shares held as of June 6, 2017, 28,675 were issuable on vesting of restricted stock units granted under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":129094,"source":{"system":"sec-edgar","filing":"0001209191-17-038599","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117038599/doc4.xml","form_type":"4"}},{"id":4316238,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-05-17T20:55:55.000Z","date":"2017-05-17","kind":"grant","acquired":true,"shares":3333,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F5","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, some or all of these restricted stock units will vest on February 28, 2018 based on performance vesting criteria.  Unvested restricted stock units will forfeit on that date.  The executive has agreed that a number of shares, having a value equal to the required tax withholding at vesting, will be withheld from the shares issued on the vest date."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F6","text":"Of the shares held as of May 17, 2017, 28,675 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture."}],"balance_after":54094,"source":{"system":"sec-edgar","filing":"0001209191-17-033183","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/1113232/000120919117033183/doc4.xml","form_type":"4"}},{"id":4316237,"issuer":{"id":4152,"kind":"organization","name":"AXCELIS TECHNOLOGIES INC","symbol":"ACLS"},"owners":[{"id":122109,"kind":"person","name":"Bintz William J","position":1,"cik":"0001411134","reported_name":"Bintz William J","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"EVP, Product Development"}}],"security":"Common Stock","published_at":"2017-05-17T20:55:55.000Z","date":"2017-05-17","kind":"grant","acquired":true,"shares":10000,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on May 17, 2018, May 17, 2019, May 17, 2020 and May 17, 2021.  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