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The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":19048,"source":{"system":"sec-edgar","filing":"0001226867-21-000012","document":"wf-form4_163977486909155.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":6,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000122686721000012/wf-form4_163977486909155.xml","form_type":"4"}},{"id":2469099,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":114112,"kind":"person","name":"OLSON PAUL L H","position":1,"cik":"0001226867","reported_name":"OLSON PAUL L H","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-12-17T21:01:32.000Z","date":"2021-12-15","kind":"sale","acquired":false,"shares":200,"price":136.13,"value":27226.0,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F6","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. 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The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote."}],"balance_after":21471,"source":{"system":"sec-edgar","filing":"0001226867-21-000010","document":"wf-form4_163190905457155.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/1101302/000122686721000010/wf-form4_163190905457155.xml","form_type":"4"}},{"id":2567072,"issuer":{"id":3271,"kind":"organization","name":"ENTEGRIS INC"},"owners":[{"id":114112,"kind":"person","name":"OLSON PAUL L H","position":1,"cik":"0001226867","reported_name":"OLSON PAUL L H","relationship":{"director":true,"officer":false,"ten_percent_owner":false,"other":false}}],"security":"Common Stock","published_at":"2021-09-17T20:04:46.000Z","date":"2021-09-15","kind":"sale","acquired":false,"shares":576,"price":127.3377,"value":73346.5152,"ownership":{"direct":true},"footnotes":[{"field":"kind","element":"transactionCoding","label":"F1","text":"These shares were sold pursuant to a Rule 10b-5 Trading Plan established by the Reporting Person on March 3, 2021."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $126.82 to $127.66, inclusive. 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