{"transactions":[{"id":2012550,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Operating Officer"}}],"security":"Performance Stock Unit","published_at":"2023-02-16T13:30:41.000Z","date":"2023-02-14","kind":"grant","acquired":true,"shares":1475,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"The Reporting Person was granted performance stock units (\"PSUs\"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"The Reporting Person was granted performance stock units (\"PSUs\"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":1475,"derivative":{"expiration_date":"2026-02-14","underlying":"Common Stock","underlying_shares":1475},"source":{"system":"sec-edgar","filing":"0001257815-23-000029","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000029/edgardoc.xml","form_type":"4"}},{"id":2012549,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Operating Officer"}}],"security":"Performance Stock Unit","published_at":"2023-02-16T13:30:41.000Z","date":"2023-02-14","kind":"grant","acquired":true,"shares":1476,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"The Reporting Person was granted performance stock units (\"PSUs\"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"The Reporting Person was granted performance stock units (\"PSUs\"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":1476,"derivative":{"expiration_date":"2025-02-14","underlying":"Common Stock","underlying_shares":1476},"source":{"system":"sec-edgar","filing":"0001257815-23-000029","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000029/edgardoc.xml","form_type":"4"}},{"id":2012548,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Operating Officer"}}],"security":"Common Stock","published_at":"2023-02-16T13:30:41.000Z","date":"2023-02-14","kind":"grant","acquired":true,"shares":2951,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"The Reporting Person was granted restricted stock units (\"RSUs\"), each of which represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date."}],"balance_after":8586,"source":{"system":"sec-edgar","filing":"0001257815-23-000029","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000029/edgardoc.xml","form_type":"4"}},{"id":2021292,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Operating Officer"}}],"security":"Common Stock","published_at":"2023-02-13T21:33:37.000Z","date":"2023-02-10","kind":"tax_withholding","acquired":false,"shares":223,"price":80.9,"value":18040.7,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes shares purchased pursuant to the Issuer's Employee Stock Purchase Plan."}],"balance_after":5635,"source":{"system":"sec-edgar","filing":"0001257815-23-000018","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000125781523000018/edgardoc.xml","form_type":"4"}},{"id":2146285,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Operating Officer"}}],"security":"Common Stock","published_at":"2022-10-04T20:24:12.000Z","date":"2022-10-01","kind":"tax_withholding","acquired":false,"shares":401,"price":64.05,"value":25684.05,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock units grants previously received by the Reporting Person."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes 246 shares purchased on June 30, 2022 pursuant to the Issuer's Employee Stock Purchase Plan."}],"balance_after":5857,"source":{"system":"sec-edgar","filing":"0001407682-22-000065","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000065/edgardoc.xml","form_type":"4"}},{"id":2399825,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Operating Officer"}}],"security":"Performance Stock Unit","published_at":"2022-02-14T21:33:12.000Z","date":"2022-02-10","kind":"grant","acquired":true,"shares":952,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":952,"derivative":{"expiration_date":"2025-02-10","underlying":"Common Stock","underlying_shares":952},"source":{"system":"sec-edgar","filing":"0001407682-22-000029","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000029/edgardoc.xml","form_type":"4"}},{"id":2399824,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Operating Officer"}}],"security":"Performance Stock Unit","published_at":"2022-02-14T21:33:12.000Z","date":"2022-02-10","kind":"grant","acquired":true,"shares":953,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":953,"derivative":{"expiration_date":"2024-02-10","underlying":"Common Stock","underlying_shares":953},"source":{"system":"sec-edgar","filing":"0001407682-22-000029","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000029/edgardoc.xml","form_type":"4"}},{"id":2399823,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Operating Officer"}}],"security":"Common Stock","published_at":"2022-02-14T21:33:12.000Z","date":"2022-02-10","kind":"grant","acquired":true,"shares":1905,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date."}],"balance_after":6012,"source":{"system":"sec-edgar","filing":"0001407682-22-000029","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768222000029/edgardoc.xml","form_type":"4"}},{"id":2550614,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":113429,"kind":"person","name":"Harlow James","position":1,"cik":"0001886460","reported_name":"Harlow James","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"Chief Operating Officer"}}],"security":"Common Stock","published_at":"2021-10-05T20:17:31.000Z","date":"2021-10-01","kind":"grant","acquired":true,"shares":4107,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date."}],"balance_after":4107,"source":{"system":"sec-edgar","filing":"0001407682-21-000122","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000122/edgardoc.xml","form_type":"4"}}]}