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Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":993,"derivative":{"expiration_date":"2024-02-08","underlying":"Common Stock","underlying_shares":993},"source":{"system":"sec-edgar","filing":"0001407682-21-000040","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000040/edgardoc.xml","form_type":"4"}},{"id":2870420,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of IBU"}}],"security":"Performance Stock Unit","published_at":"2021-02-10T21:29:20.000Z","date":"2021-02-08","kind":"grant","acquired":true,"shares":994,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":994,"derivative":{"expiration_date":"2023-02-08","underlying":"Common Stock","underlying_shares":994},"source":{"system":"sec-edgar","filing":"0001407682-21-000040","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000040/edgardoc.xml","form_type":"4"}},{"id":2870419,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of IBU"}}],"security":"Common Stock","published_at":"2021-02-10T21:29:20.000Z","date":"2021-02-08","kind":"grant","acquired":true,"shares":1987,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date."}],"balance_after":8049,"source":{"system":"sec-edgar","filing":"0001407682-21-000040","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000040/edgardoc.xml","form_type":"4"}},{"id":2873353,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of IBU"}}],"security":"Common Stock","published_at":"2021-02-09T21:33:16.000Z","date":"2021-02-07","kind":"tax_withholding","acquired":false,"shares":217,"price":59.95,"value":13009.15,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes 106 shares purchased on December 31, 2020 pursuant to the Issuer's Employee Stock Purchase Plan"}],"balance_after":6062,"source":{"system":"sec-edgar","filing":"0001407682-21-000024","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768221000024/edgardoc.xml","form_type":"4"}},{"id":3073026,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of IBU"}}],"security":"Common Stock","published_at":"2020-07-31T16:02:51.000Z","date":"2020-07-29","kind":"tax_withholding","acquired":false,"shares":213,"price":36.06,"value":7680.78,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit grants previously received by the Reporting Person."},{"field":"balance_after","element":"sharesOwnedFollowingTransaction","label":"F2","text":"Includes 589 shares purchased on June 30, 2020 pursuant to the Issuer's Employee Stock Purchase Plan."}],"balance_after":6173,"source":{"system":"sec-edgar","filing":"0001407682-20-000090","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000090/edgardoc.xml","form_type":"4"}},{"id":3115541,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of IBU"}}],"security":"Common Stock","published_at":"2020-06-10T19:32:01.000Z","date":"2020-02-28","kind":"purchase","acquired":true,"shares":1000,"price":30,"value":30000.0,"ownership":{"direct":true},"footnotes":[{"field":"date","element":"transactionDate","label":"F1","text":"The transaction being reported on this line is being reported late and will be disclosed in the Company's 2021 proxy statement."}],"balance_after":5797,"source":{"system":"sec-edgar","filing":"0001407682-20-000087","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000087/edgardoc.xml","form_type":"4"}},{"id":3280849,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of IBU"}}],"security":"Performance Stock Unit","published_at":"2020-02-11T23:09:18.000Z","date":"2020-02-07","kind":"grant","acquired":true,"shares":910,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":910,"derivative":{"expiration_date":"2023-02-07","underlying":"Common Stock","underlying_shares":910},"source":{"system":"sec-edgar","filing":"0001407682-20-000042","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":3,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000042/edgardoc.xml","form_type":"4"}},{"id":3280848,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of IBU"}}],"security":"Performance Stock Unit","published_at":"2020-02-11T23:09:18.000Z","date":"2020-02-07","kind":"grant","acquired":true,"shares":910,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"derivative.exercise_price","element":"conversionOrExercisePrice","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."},{"field":"derivative.exercise_date","element":"exerciseDate","label":"F2","text":"Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date."}],"balance_after":910,"derivative":{"expiration_date":"2022-02-07","underlying":"Common Stock","underlying_shares":910},"source":{"system":"sec-edgar","filing":"0001407682-20-000042","document":"edgardoc.xml","document_sequence":1,"table":"derivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000042/edgardoc.xml","form_type":"4"}},{"id":3280847,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of IBU"}}],"security":"Common Stock","published_at":"2020-02-11T23:09:18.000Z","date":"2020-02-07","kind":"grant","acquired":true,"shares":1821,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date."}],"balance_after":4797,"source":{"system":"sec-edgar","filing":"0001407682-20-000042","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000140768220000042/edgardoc.xml","form_type":"4"}},{"id":3385809,"issuer":{"id":3340,"kind":"organization","name":"ONTO INNOVATION INC.","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"SEE REMARKS"}}],"security":"Common Stock","published_at":"2019-10-30T10:06:13.000Z","date":"2019-10-25","kind":"grant","acquired":true,"shares":2976,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F2","text":"These restricted stock units (\"RSUs\") were originally granted under the Rudolph Technologies, Inc. 2018 Stock Plan (the \"Plan\") and vest periodically so long as the reporting person remains employed by Onto Innovation or one of its affiliates on each applicable vesting date. At the Effective Time, Onto Innovation assumed the Plan and related award agreements and the existing RSUs became restricted stock units of Onto Innovation, subject to the Exchange Ratio."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"On October 25, 2019, pursuant to an Agreement and Plan of Merger (the \"Merger Agreement\"), Rudolph Technologies, Inc. (\"Rudolph\") and Nanometrics Incorporated (\"Nanometrics\") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the \"Merger\"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to \"Onto Innovation Inc.\" (\"Onto Innovation\") and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Nanometrics common stock (the \"Exchange Ratio\"), with cash paid in lieu of fractional shares."}],"balance_after":2976,"source":{"system":"sec-edgar","filing":"0000899243-19-026284","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/704532/000089924319026284/doc4.xml","form_type":"4"}},{"id":3386522,"issuer":{"id":131655,"kind":"organization","name":"RUDOLPH TECHNOLOGIES INC","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of PCG"}}],"security":"Common Stock","published_at":"2019-10-29T21:06:51.000Z","date":"2019-10-25","kind":"disposition_to_issuer","acquired":false,"shares":3700,"ownership":{"direct":true},"footnotes":[{"field":"shares","element":"transactionShares","label":"F1","text":"On October 25, 2019, pursuant to an Agreement and Plan of Merger (the \"Merger Agreement\"), Rudolph Technologies, Inc. (\"Rudolph\") and Nanometrics Incorporated (\"Nanometrics\") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the \"Merger\"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to \"Onto Innovation Inc.\" and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) (\"Onto\") common stock (the \"Exchange Ratio\")."},{"field":"shares","element":"transactionShares","label":"F2","text":"(Continued from Footnote 1) Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio."},{"field":"price","element":"transactionPricePerShare","label":"F1","text":"On October 25, 2019, pursuant to an Agreement and Plan of Merger (the \"Merger Agreement\"), Rudolph Technologies, Inc. (\"Rudolph\") and Nanometrics Incorporated (\"Nanometrics\") effected an all-stock merger of equals to combine their respective businesses in which a wholly-owned subsidiary of Nanometrics merged with and into Rudolph, with Rudolph surviving as a wholly-owned subsidiary of Nanometrics (the \"Merger\"). Pursuant to the Merger Agreement, upon completion of the Merger, Nanometrics changed its name to \"Onto Innovation Inc.\" and each issued and outstanding share of Rudolph common stock was converted into the right to receive 0.8042 shares of Onto Innovation Inc. (formerly Nanometrics) (\"Onto\") common stock (the \"Exchange Ratio\")."},{"field":"price","element":"transactionPricePerShare","label":"F2","text":"(Continued from Footnote 1) Pursuant to the Merger Agreement, upon completion of the Merger, each outstanding and unvested restricted stock unit award and performance stock unit award held by the Reporting Person was assumed by Onto and converted into a restricted stock unit or a performance stock unit, as applicable, corresponding to shares of Onto common stock, subject to the Exchange Ratio."}],"balance_after":0,"source":{"system":"sec-edgar","filing":"0000899243-19-026206","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1094392/000089924319026206/doc4.xml","form_type":"4"}},{"id":3453665,"issuer":{"id":131655,"kind":"organization","name":"RUDOLPH TECHNOLOGIES INC","symbol":"ONTO"},"owners":[{"id":111300,"kind":"person","name":"Jin Ju","position":1,"cik":"0001783605","reported_name":"Jin Ju","relationship":{"director":false,"officer":false,"ten_percent_owner":false,"other":true,"other_text":"VP & General Manager of PCG"}}],"security":"Common Stock","published_at":"2019-07-30T15:36:44.000Z","date":"2019-07-29","kind":"grant","acquired":true,"shares":3700,"price":0,"value":0.0,"ownership":{"direct":true},"footnotes":[{"field":"security","element":"securityTitle","label":"F1","text":"Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock."},{"field":"shares","element":"transactionShares","label":"F2","text":"20% of the shares of Common Stock subject to the Restricted Stock Unit vest each year on the grant date.  Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting."}],"balance_after":3700,"source":{"system":"sec-edgar","filing":"0001407682-19-000095","document":"edgardoc.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/1094392/000140768219000095/edgardoc.xml","form_type":"4"}}]}