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These shares were sold in multiple transactions at prices ranging from $4.19 to $4.22, inclusive.  The reporting person undertakes to provide to Amtech Systems, Inc., any security holder of Amtech Systems, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in footnote 1 to this Form 4."}],"balance_after":103702,"source":{"system":"sec-edgar","filing":"0000950170-24-015974","document":"ownership.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000095017024015974/ownership.xml","form_type":"4"}},{"id":1644586,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":43043,"kind":"person","name":"Averick Robert M","position":1,"cik":"0001343599","reported_name":"Averick Robert M","relationship":{"director":true,"officer":false,"ten_percent_owner":true,"other":false}}],"security":"Common Stock","published_at":"2024-02-14T21:01:47.000Z","date":"2024-02-13","kind":"purchase","planned":false,"acquired":true,"shares":20500,"price":4.21,"value":86305.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The reported price in Column 4 is a weighted average price rounded to the nearest hundredth. The prices of shares purchased on February 13, 2024 ranged from $4.15 to $4.25 per share. Mr. Averick undertakes to provide the Issuer, any security holder of the Issuer, or the staff of the SEC, upon request, full information regarding the number of shares purchased within the price range described in this footnote."}],"balance_after":414000,"source":{"system":"sec-edgar","filing":"0001104659-24-023568","document":"tm246260-1_4seq1.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/720500/000110465924023568/tm246260-1_4seq1.xml","form_type":"4"}},{"id":1703905,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":43043,"kind":"person","name":"Averick Robert M","position":1,"cik":"0001343599","reported_name":"Averick Robert M","relationship":{"director":true,"officer":false,"ten_percent_owner":true,"other":false}}],"security":"Common Stock","published_at":"2023-12-20T21:01:24.000Z","date":"2023-12-18","kind":"purchase","planned":false,"acquired":true,"shares":14000,"price":3.9,"value":54600.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F5","text":"The reported price in Column 4 is a weighted average price rounded to the nearest hundredth. The prices of shares purchased on December 18, 2023 ranged from $3.90 to $3.91 per share. Mr. Averick undertakes to provide the Issuer, any security holder of the Issuer, or the staff of the SEC, upon request, full information regarding the number of shares purchased within the price range described in this footnote."}],"balance_after":393500,"source":{"system":"sec-edgar","filing":"0001104659-23-127725","document":"tm2333289d1_4seq1.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":4,"url":"https://www.sec.gov/Archives/edgar/data/720500/000110465923127725/tm2333289d1_4seq1.xml","form_type":"4"}},{"id":1706146,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":26445,"kind":"person","name":"DAIGLE ROBERT C","position":1,"cik":"0001267540","reported_name":"DAIGLE ROBERT C","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Executive Officer"}}],"security":"Amtech Systems, Inc. $0.01 par value common stock","published_at":"2023-12-19T21:51:35.000Z","date":"2023-12-19","kind":"purchase","planned":false,"acquired":true,"shares":20000,"price":3.9,"value":78000.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F2","text":"The price reported in Column 4 is a weighted average price.  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The reporting person undertakes to provide to Amtech Systems, Inc., any security holder of Amtech Systems, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price within the ranges set forth in footnote 1 to this Form 4."}],"balance_after":100202,"source":{"system":"sec-edgar","filing":"0001209191-23-059189","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919123059189/doc4.xml","form_type":"4"}},{"id":1706145,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":26445,"kind":"person","name":"DAIGLE ROBERT C","position":1,"cik":"0001267540","reported_name":"DAIGLE ROBERT C","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Executive Officer"}}],"security":"Amtech Systems, Inc. $0.01 par value common stock","published_at":"2023-12-19T21:51:35.000Z","date":"2023-12-18","kind":"purchase","planned":false,"acquired":true,"shares":46000,"price":3.96,"value":182160.0,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted average price.  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The reporting person undertakes to provide to Amtech Systems, Inc., any security holder of Amtech Systems, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price within the ranges set forth in footnote 1 to this Form 4."}],"balance_after":80202,"source":{"system":"sec-edgar","filing":"0001209191-23-059189","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919123059189/doc4.xml","form_type":"4"}},{"id":1797169,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":26445,"kind":"person","name":"DAIGLE ROBERT C","position":1,"cik":"0001267540","reported_name":"DAIGLE ROBERT C","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Executive Officer"}}],"security":"Amtech Systems, Inc. $0.01 par value common stock","published_at":"2023-08-25T21:57:07.000Z","date":"2023-08-25","kind":"purchase","planned":false,"acquired":true,"shares":4000,"price":8.6,"value":34400.0,"ownership":{"direct":true},"balance_after":34202,"source":{"system":"sec-edgar","filing":"0001209191-23-047396","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":2,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919123047396/doc4.xml","form_type":"4"}},{"id":1797168,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":26445,"kind":"person","name":"DAIGLE ROBERT C","position":1,"cik":"0001267540","reported_name":"DAIGLE ROBERT C","relationship":{"director":true,"officer":true,"ten_percent_owner":false,"other":false,"officer_title":"Chief Executive Officer"}}],"security":"Amtech Systems, Inc. $0.01 par value common stock","published_at":"2023-08-25T21:57:07.000Z","date":"2023-08-24","kind":"purchase","planned":false,"acquired":true,"shares":8250,"price":8.59,"value":70867.5,"ownership":{"direct":true},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F1","text":"The price reported in Column 4 is a weighted average price.  These shares were purchased in multiple transactions at prices ranging from $8.57 to $8.60, inclusive.  The reporting person undertakes to provide to Amtech Systems, Inc., any security holder of Amtech Systems, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares purchased at each separate price within the ranges set forth in footnote 1 to this Form 4."}],"balance_after":30202,"source":{"system":"sec-edgar","filing":"0001209191-23-047396","document":"doc4.xml","document_sequence":1,"table":"nonDerivative","row_type":"transaction","position":1,"url":"https://www.sec.gov/Archives/edgar/data/720500/000120919123047396/doc4.xml","form_type":"4"}},{"id":1801294,"issuer":{"id":6122,"kind":"organization","name":"AMTECH SYSTEMS INC","symbol":"ASYS"},"owners":[{"id":43043,"kind":"person","name":"Averick Robert M","position":1,"cik":"0001343599","reported_name":"Averick Robert M","relationship":{"director":true,"officer":false,"ten_percent_owner":true,"other":false}}],"security":"Common Stock","published_at":"2023-08-21T20:02:45.000Z","date":"2023-08-18","kind":"purchase","planned":false,"acquired":true,"shares":9000,"price":8.96,"value":80640.0,"ownership":{"direct":false,"nature":"See footnote 5 below"},"footnotes":[{"field":"price","element":"transactionPricePerShare","label":"F4","text":"The reported prices in Column 4 are weighted average prices rounded to the nearest hundredth. 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